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http://dx.doi.org/10.9725/kstle.2003.19.2.109

Nanotribological Characteristics of Plasma Treated Hydrophobic Thin Films on Silicon Surfaces using SPM  

윤의성 (한국과학기술연구원 트라이볼로지 연구센터)
양승호 (한국과학기술연구원 트라이볼로지 연구센터)
공호성 (한국과학기술연구원 트라이볼로지 연구센터)
고석근 (한국과학기술연구원 박막기술 연구센터)
Publication Information
Tribology and Lubricants / v.19, no.2, 2003 , pp. 109-115 More about this Journal
Abstract
Nanotribological characteristics between a Si$_3$N$_4$ AFM tip and hydrophobic thin films were experimentally studied. Tests were performed to measure the nano adhesion and friction in both AFM (atomic force microscope) and LFM (lateral force microscope) modes in various .ranges of normal load. Plasma-modified thin polymeric films were deposited on Si-wafer (100). Results showed that wetting angle of plasma-modified thin polymeric film increased with the treating time, which resulted in the hydrophobic surface and the decrease of adhesion and friction. Nanotribological characteristics of these surfaces were compared with those of other hydrophobic surfaces, such as DLC, OTS and IBAD-Ag coated surfaces. Those of OTS coated surface were superior to those of others, though wetting angle of plasma-modified thin polymeric film is higher.
Keywords
nano-adhesion; nano-friction; hydrophobic film; tribology; SPM;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
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