• 제목/요약/키워드: AC Plasma Power supply

검색결과 21건 처리시간 0.03초

가변전압 가변주파수(VVVF) 교류 플라즈마 전원장치 (AC Plasma Power Supply with Variable Voltage and Variable Frequency)

  • 신완호;윤기복;정환명;최재호
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2004년도 하계학술대회 논문집 B
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    • pp.1205-1207
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    • 2004
  • AC plasma power supply is used to control a ozone generator and a air pollution gas. AC plasma power supply is composed of power semiconductor switch devices and control board adapted SHE(Selected Harmonic Elimination) PWM method. AC plasma power supply with sinusoidal VVVF(variable voltage and variable frequency) is realized. Its output voltage range is from 0 [V] to 20[kV] and output frequency range is from 8[kHz] to 20[kHz]. Using proposed system, AC high voltage and high frequency discharge is tested in the DBD(dieletric barrier discharge) reactor, and the space distribution of a its non-thermal plasma is observed. In spite of the increasement of voltage and frequency, the proposed system have a stable operation characteristics. It is verified by the experimental results.

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3상 PFC 부스트 컨버터를 채용한 상압플라즈마 세정기용 고역률 정형파 펄스 출력형 전원장치에 관한 연구 (A Study On High Power Factor Sine Pulse Type Power Supply For Atmospheric Pressure Plasma Cleaning System with 3-Phase PFC Boost Converter)

  • 한희민;김민영;서광덕;김준석
    • 전력전자학회논문지
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    • 제14권1호
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    • pp.72-81
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    • 2009
  • 본 논문에서는 대기압 플라즈마 발생용 정현파펄스형 교류 전원 장치에 대한 연구를 진행하였다. 정현파펄스형 전원장치는 기존의 LC공진을 이용한 교류 전원장치보다 높은 dv/dt를 갖게 되므로 안정적인 플라즈마 공급이 가능하며 펄스형에 비해 고조파 노이즈가 적고, 정전류 턴온-영전압 턴오프 형태로 동작하므로 매우 높은 효율을 갖는다. 또한 플라즈마 점화 기능을 강화하고 안정적인 전압제어를 위해 3상 부스트형 컨버터를 입력단에 사용하여 입력 역률이 매우 높은 시스템을 구성할 수 있다. 실험실 수준의 10kW부하시설을 사용하여 본 연구의 결과를 입증하였다.

대기오염 물질 저감을 위한 저온 플라즈마 반응공정의 특성 (Characteristics of Non-Thermal Plasma Process for Air Pollution Control)

  • 송영훈;신동남;신완호;김관태;최연석;최영석;이원남;김석준
    • 한국대기환경학회지
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    • 제16권3호
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    • pp.247-256
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    • 2000
  • Basic characteristics of non-thermal plasma process to remove C2H4 and NO have been experimentally investigated with a packed-bed type reactor and an ac power supply. The performance of the non-thermal plasma generated by ac power supply was compared with that of a wire-plate type reactor equipped with a pulsed power supply. The result shows that the non-thermal plasma can be effectively generated with an AC power supply that can be easily fabricated with conventional techniques. In order to understand the basic reaction mechanisms of the non-thermal plasma process, parametric tests for different carrier gases(air and nitrogen) and for different reaction pathways have been performed. The test results show that O3 generated by non-thermal plasma plays an dominant role to oxidize C2H4 and NO over N and O radicals when these pollutant gases are carried by dry air under room temperature condition. Experimental observations, however, indicate that N and O radicals can significantly affect on the removal process of the pollutant gases under certain conditions.

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이터 초전도자석 전원공급장치 현장 설치현황 및 시운전 계획 (KO AC/DC Converter System Installation Status and Commissioning Plan at ITER Site)

  • 송인호;오종석
    • 전력전자학회논문지
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    • 제27권5호
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    • pp.397-401
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    • 2022
  • The construction of the ITER tokamak machine is ongoing at a 77% process rate to achieve the first plasma in 2025. The 18 sets of power supply systems comprising 400 MVA thyristor AC/DC converters for the superconducting magnets supplied by Korea (KO) are being installed with other systems, such as PF converters (China), DC busbars (Russia), and cooling water systems (India), in two buildings (Europe). The system interfaces have been defined during the design stage, and the systems have been manufactured. However, during the on-site installation work, several installation and integration issues emerged due to the manufacturing tolerance and design mistakes. To continue the installation and testing, the engineers of each system resolved the interface issues, planned the commissioning, and integrated the test plan. This paper describes the on-site installation status and issues and the commissioning plan of KO AC/DC converters.

PDP TV의 sustain/reset 구동전원 공급을 위한 1단방식의 역률보상형 AC-to-DC 컨버터 (Single-stage Power Factor Corrected AC-to-DC Converter for sustain/reset Driving Power Supply of PDP TV)

  • 강필순;박진현
    • 한국정보통신학회논문지
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    • 제12권2호
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    • pp.282-289
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    • 2008
  • PDP TV의 전력 효율을 향상시키기 위해서는 PDP의 구동과정에서 발생하게 되는 불필요한 전력소모와 AC 입력으로부터 원하는 DC를 얻기 위한 과정 중에 발생하는 전력 소모를 최소화하여야 한다. 일반적인 PDP 구동을 위한 입력 전원단은 2단 구조의 역률 보상형 컨버터를 채용하고 있으며, PDP 구동시 전력소모가 가장 큰 서스테인 드라이버와 리셋 회로의 구동전원을 공급하기 위한 별도의 DC-to-DC 컨버터를 필요로 한다. 그러나 이러한 회로의 구현은 저가의 PDP를 요구하는 시장 상황에 유연하게 대처하는데 많은 어려움을 준다. 따라서 본 논문에서는 최소의 전력 변환단계를 가지도록 서스테인과 리셋 회로의 전원 공급이 가능한 1단방식의 역률보상형 AC-to-DC 컨버터를 제안한다. 제안하는 시스템은 1단방식의 입력전원부 구성을 통해 전력 변환단을 최소화하여 전력 변환 중에 발생하는 손실을 최소화하며, PDP 서스테인/리셋 드라이버의 구동전압을 직접 공급하는 형태로 구성하여 시스템 부피의 감소, 원가 절감을 이룰 수 있다.

플라즈마 가스 개질 응용을 위한 3상 아크 플라즈마 토치 시스템 특성 실험 (Basic Performance Test of a Three Phase AC Arc Plasma Torch System for Plasma Gas Reforming)

  • 이동현;다리안;박해원;이남기;백상윤;양시영;서준호
    • 한국수소및신에너지학회논문집
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    • 제34권1호
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    • pp.8-16
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    • 2023
  • In this work, we report basic performance test results of a lab-scale three phase alternative current (AC) arc plasma torch system for plasma gas reforming applications. The suggested system primarily consists of three graphite electrodes inclined at 12.5° to the central axis, a 𝞥 150 mm cylindrical gas path and a three phase-60 Hz AC power supply. At air flow rate of 50 Lpm and arc currents of 100-175 A, test results revealed that plasma resistances were decreasing from 1.08 Ω to 0.53 Ω with the increase of plasma power from 9.3 kW to 13.8 kW, causing the decrease of power factor and increase of the line voltages. However, the injected air can be heated quickly up to the temperatures of >1,200℃ when injecting AC arc plasma powers of >10 kW.

3상 교류 부채꼴 방전을 이용한 메탄으로부터 수소 생산 (Production of Hydrogen from Methane Using a 3 Phase AC Glidarc Discharge)

  • 김성천;전영남
    • 한국수소및신에너지학회논문집
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    • 제18권2호
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    • pp.132-139
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    • 2007
  • Popular techniques for producing synthesis gas by converting methane include steam reforming and catalyst reforming. However, these are high temperature and high pressure processes limited by equipment, cost and difficulty of operation. Low temperature plasma is projected to be a technique that can be used to produce high concentration hydrogen from methane. It is suitable for miniaturization and for application in other technologies. In this research, the effect of changing each of the following variables was studied using an AC Glidarc system that was conceived by the research team: the gas components ratio, the gas flow rate, the catalyst reactor temperature and voltage. Glidarc plasma reformer was consisted of 3 electrodes and an AC power source. And air was added for the partial oxidation reaction of methane. The result showed that as the gas flow rate, the catalyst reactor temperature and the electric power increased, the methane conversion rate and the hydrogen concentration also increased. With $O_2/C$ ratio of 0.45, input flow rate of 4.9 l/min and power supply of 1 kW as the reference condition, the methane conversion rate, the high hydrogen selectivity and the reformer energy density were 69.2%, 36.2% and 35.2% respectively.

RF Generator Design for High-quality Power at Light Load

  • Hee Sung Shin;Shin Ui Lee;Kyung Hyun Lim;Euihoon Chung
    • 반도체디스플레이기술학회지
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    • 제23권2호
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    • pp.100-106
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    • 2024
  • To generate the plasma required in dry cleaning processes, the plasma chamber must be supplied with a high-quality AC voltage with a voltage of more than 1 kV and a frequency of 400 kHz. In the existing research, many methods to supply high power have been studied, but how to improve the quality of the power for high-quality plasma has been relatively little studied. In this paper, we propose a study to improve the quality of RF power circuit for high-quality plasma generation in dry cleaning method. Existing methods in the environment of full-bridge-based RF power circuits must perform PWM duty control in the light load region. This causes distortions in the waveform, resulting in poor power quality, which directly leads to poor plasma quality. To solve these problems, a half-bridge switching method is proposed and the improvement in waveform quality is verified. To verify the feasibility of the design and control algorithm proposed in this paper, an RF power circuit prototype is fabricated and the proposed design and control method is verified through simulation and actual experiments under dummy load.

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GlidArc 플라즈마를 이용한 메탄의 개질 특성 및 수소 생산에 관한 연구 (Study on Characteristic of Methane Reforming and Production of Hydrogen using GlidArc Plasma)

  • 김성천;전영남
    • 대한기계학회논문집B
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    • 제31권11호
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    • pp.942-948
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    • 2007
  • Popular techniques for producing hydrogen by converting methane include steam reforming and catalyst reforming. However, these are high temperature and high pressure processes limited by equipment, cost and difficulty of operation. Low temperature plasma is projected to be a technique that can be used to produce high concentration hydrogen from methane. It is suitable for miniaturization and fur application in other technologies. In this research, the effect of changing each of the following variables was studied using an AC GlidArc system that was conceived by the research team: the gas components ratio, the gas flow rate, the catalyst reactor temperature and voltage. Results were obtained for methane and hydrogen yields and intermediate products. The system used in this research consisted of 3 electrodes and an AC power source. In this study, air was added fur the partial oxidation reaction of methane. The result showed that as the gas flow rate, the catalyst reactor temperature and the electric power increased, the methane conversion rate and the hydrogen concentration also increased. With $O_2/C$ ratio of 0.45, input flow rate of 4.9 l/min and power supply of 1 kW as the reference condition, the methane conversion rate, the high hydrogen selectivity and the reformer energy density were 69.2%, 32.6% and 35.2% respectively.

PDP TV의 전원공급장치와 서스테인 드라이버의 통합회로 구성 (Circuit Composition of Integrating Power Supply with Sustainer of PDP TV)

  • 강필순;박진현
    • 한국정보통신학회:학술대회논문집
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    • 한국해양정보통신학회 2007년도 추계종합학술대회
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    • pp.242-245
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    • 2007
  • PDP TV의 전력 효율을 향상시키기 위해서는 PDP의 구동과정에서 발생하게 되는 불필요한 전력소모와 AC 입력으로부터 원하는 DC를 얻기 위한 과정 중에 발생하는 전력 소모를 최소화하여야 한다. 일반적인 PDP 구동을 위한 입력 전원단은 2단 구조의 역률 보상형 컨버터를 채용하고 있으며, PDP 구동시 전력소모가 가장 큰 서스테인 드라이버와 독립적으로 구성된다. 그러나 이러한 회로의 구현은 저가의 PDP를 요그하는 시장 상황에 유연하게 대처하는데 많은 어려움을 준다. 따라서 본 눈문에서는 최소의 전력 변환 단계를 가지는 PDP용 전원공급장치와 서스테인 구동 드라이버를 결합한 회로를 제안한다. 제안하는 시스템은 1단방식의 입력전원부 구성을 통해 전력 변환단을 최소화하여 전력 변환 중에 발생하는 손실을 최소화하며, PDP 서스테인 드라이버의 구동전압을 직접 공급하는 형태로 구성하여 시스템의 부피의 감소, 원가 절감을 이룰 수 있다.

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