Abstract
This paper presents quasi-resonant type high power factor ac power supply for atmospheric pressure plasma cleaning system adopting three phase PFC boost converter and it's control method. The presented ac power supply consists of single phase H-bridge inverter, step-up transformer for generating high voltage and three phase PFC boost converter for high power factor on source utility. Unlikely to the traditional LC resonant converter, the propose one has an inductor inside only. A single resonant takes place through the inside inductor and the capacitor from the plasma load modeled into two series capacitor and one resistance. The quasi-resonant can be achieved by cutting the switching signal when the load current decrease to zero. To obtain power control ability, the propose converter controlled by two control schemes. One is the changing output pulse period scheme in the manner of PFM(Pulse Frequency Modulation) control. On the other, to provide more higher power to load, the DC rail voltage is directly controlled by the 3-phase PFC boost converter. The significant merits of the proposed converter are the uniform power providing capability for high quality plasma generation and low reactive power in AC and DC side. The proposed work is verified through digital simulation and experimental implementation.
본 논문에서는 대기압 플라즈마 발생용 정현파펄스형 교류 전원 장치에 대한 연구를 진행하였다. 정현파펄스형 전원장치는 기존의 LC공진을 이용한 교류 전원장치보다 높은 dv/dt를 갖게 되므로 안정적인 플라즈마 공급이 가능하며 펄스형에 비해 고조파 노이즈가 적고, 정전류 턴온-영전압 턴오프 형태로 동작하므로 매우 높은 효율을 갖는다. 또한 플라즈마 점화 기능을 강화하고 안정적인 전압제어를 위해 3상 부스트형 컨버터를 입력단에 사용하여 입력 역률이 매우 높은 시스템을 구성할 수 있다. 실험실 수준의 10kW부하시설을 사용하여 본 연구의 결과를 입증하였다.
