• Journal of Institute of Control, Robotics and Systems
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• v.14 no.4
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• pp.385-391
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• 2008

To effectively cope with a complexity of kinematic metrology due to workspace enlargement of the planar stage, the linear induction motor is suggested as its new driving source. Especially, the linear induction motor under uniform plate type of secondary doesn't inherently have a periodical force ripple which is generally shown in the brushless DC motor. But, it presents a poor transient characteristic at zero or low speed zone owing to time delay of flux settling, resulting in slow response. To improve the servo property of linear induction motor and apply successfully it to the precision stage, this paper discusses a modified vector control methodology. The controller has a novel input form, fixed d-axis current, q-axis current and forward-fed DC current, to control thrust force and normal force of the linear induction motor independently. Influence of the newly introduced input and the feasibility of controller are validated experimentally.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.244-247
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• 2002

The performance of the precision micro-positioning 4-dof stage is presented. The compact design utilizes the monolithic mechanism to achieve the translation in the Z axis and rotation in the $\theta$ z, $\theta$ x and $\theta$ y axes with high stiffness and high damping. Hysteresis, nonlinearity, and drift of the piezoelectric effects are improved by incorporating the sensors in a feedback control. Experiments demonstrate that the micro-positioning stage is capable of 2nm resolution over the travel range of 25$\mu\textrm$ m in the Z axis, 0.0l7 $\mu\textrm$ rad resolution over the 170$\mu\textrm$ rad in the $\theta$ z and 0.011 $\mu\textrm$ rad resolution over the $\mu\textrm$ rad in the $\theta$ x and $\theta$ y axes. The cross-axis interferences among the axes are at a noise range. This stage is available for positioning error compensation of the XY stage with large stroke.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.563-564
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• 2010

• Current Optics and Photonics
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• v.5 no.4
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• pp.402-408
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• 2021

An off-axis system refers to an optical system in which the optical axis and normal vector at the vertex of each surface do not match. The most important specification in an optical system is its focal length. Among the various methods for measuring the focal length, the most suitable method for the off-axis system is the method that adopts magnification. However, head-mounted display (HMD) optics must be measured while considering the virtual image distance, which is not infinity owing to product characteristics. For the virtual image distance, a camera with a focusing function was used. By measuring HMD optics via this magnification method, the error generated in this measurement was 0.68% of the HMD's focal length, which is within the 1%-3% range of the conventionally permitted design error for the focal length allowed at the optical design stage. Therefore, it can be verified that the measurement accuracy of the method proposed in this study is sufficiently feasible in practice.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.5 s.170
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• pp.103-112
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• 2005

This paper presents one-axis high precision scanning system and illustrates the design of modified $X-Y-{\theta}$ stage as a tracker using VCM and commercialized air bearings for it. The scanning system for 100nm resolution is composed of the 3-axis stage and one axis long stroke linear motor stage as a follower. In this study a previous proposed and presented structure of VCM for the fine stage is modified. The tracker has 3 DOF($X-Y-{\theta}$ motions by four VCM actuators which are located on the same plane. So 4 actuating forces are suggested and designed to create least pitch and roll motions. This article will show about the design especially about optimal design. The design focus of this fine stage is to have high acceleration to accomplish high throughput. The optimal design of maximizing acceleration is performed in restrained size. The most sensitive constraint of this optimal design is heat dissipation of coil. There are 5 design variables. Because the relationship between design variables and system parameters are quite complicated, it is very difficult to set design variables manually. Due to it, computer based optimal design procedure using MATLAB is used. Then, this paper also describes the procedures of selecting design variables for the optimal design and a mathematical formulation of the optimization problem. Based on the solution of the optimization problem, the final design of the stage is also presented. The results can be verified by MAXWELL. The designed stage has the acceleration of about 5 $m/s^{2}$ with 40kg total mass including wafer chuck and interferometer mirror. And the temperature of coil is increased $50^{\circ}C$. In addition, the tracker is controlled by high precision controller system with HP interferometer for it and linear scaler for the follower. At that time, the scanning system has high precision resolution about 5nm and scanning resolution about 40nm in 25mm/s constant speed

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.11a
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• pp.379-380
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• 2010

• Transactions of Materials Processing
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• v.19 no.4
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• pp.253-262
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• 2010

For multi-stage deep drawing process including ironing operation and biaxial forming in this study, tool developments are achieved, and the developed tool sets are applied to experimental investigations. In process and tool designs, a contact condition between intermediate blank and lower die is considered as the sequential one. In this study, the material used is cold-rolled thin sheet (SPCE) with the initial thickness of 0.4mm. From the experimental approaches, several failures such as tearing, localized thickening and thinning, are observed. To solve these failures, the contact surface on the lower die is modified. As the experimental results by applying the modified lower die, it is investigated that the failures are not occurred, and the excessive deformation behavior due to the thinning and thickening effects are decreased. Furthermore, the thickness distributions on the major axis and the minor axis of each intermediate blank are investigated to be already satisfied the target (ironing) thickness, respectively. By this systematic approach, it is confirmed that the experimental results show good agreements with the designed and required configuration of each deformed and final products.

• Asian-Australasian Journal of Animal Sciences
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• v.29 no.1
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• pp.149-156
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• 2016

In this experiment, we proposed and implemented a disease forecasting system using a received signal strength indication ZigBee-based wireless network with a 3-axis acceleration sensor to detect illness at an early stage by monitoring movement of experimentally infected weaned piglets. Twenty seven piglets were divided into control, Salmonella enteritidis (SE) infection, and Escherichia coli (EC) infection group, and their movements were monitored for five days using wireless sensor nodes on their backs. Data generated showed the 3-axis movement of piglets (X-axis: left and right direction, Y-axis: anteroposterior direction, and Z-axis: up and down direction) at five different time periods. Piglets in both infected groups had lower weight gain and feed intake, as well as higher feed conversion ratios than the control group (p<0.05). Infection with SE and EC resulted in reduced body temperature of the piglets at day 2, 4, and 5 (p<0.05). The early morning X-axis movement did not differ between groups; however, the Y-axis movement was higher in the EC group (day 1 and 2), and the Z-axis movement was higher in the EC (day 1) and SE group (day 4) during different experimental periods (p<0.05). The morning X and Y-axis movement did not differ between treatment groups. However, the Z-axis movement was higher in both infected groups at day 1 and lower at day 4 compared to the control (p<0.05). The midday X-axis movement was significantly lower in both infected groups (day 4 and 5) compared to the control (p<0.05), whereas the Y-axis movement did not differ. The Z-axis movement was highest in the SE group at day 1 and 2 and lower at day 4 and 5 (p<0.05). Evening X-axis movement was highest in the control group throughout the experimental period. During day 1 and 2, the Z-axis movement was higher in both of the infected groups; whereas it was lower in the SE group during day 3 and 4 (p<0.05). During day 1 and 2, the night X-axis movement was lower and the Z-axis movement was higher in the infected piglets (p<0.05). Overall, the movement of infected piglets was altered, and the acceleration sensor could be successfully employed for monitoring pig activity.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.539-542
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• 1997

We present a micro-positioning stage that has minimized geometrical error and can drive in the 4-axis. This stage divided into two parts: $Z\theta_x$ $\theta_y$, motion stage and$\theta_z$ motion stage. These stages are constructed in flexure hinges, piezoelectric actuators and displacement scnsors. The dynamic model for each stage is obtained and their FE (finite element) models are made. Using the Lagrange's equation, the motion of equation is found. Through the parametric analysis and FE analysis, sensitiv~ty of the design parameters is executed. Finally, fundamental frequencies, maximum stress, and displacement sensitivity for each stage are obtained. We expect that this micro-positioning stage be a useful micro-alignment device for various applications.

• Proceedings of the KSME Conference
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• 2001.11b
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• pp.42-47
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• 2001

The heat (mass) transfer characteristics on the blade surface of a first-stage turbine rotor cascade for power generation has been investigated by employing the naphthalene sublimation technique. A four-axis profile measurement system is successfully developed for the measurements of the local heat (mass) transfer coefficient on the curved blade surface. The experiment is carried out at the free-stream Reynolds number and turbulence intensity of $2.09\times10^5$ and 1.2%. The results on the blade surfaces show that the local heat (mass) transfer on the suction surface is strongly influenced by the endwall vortices, but that on the pressure surface shows a nearly two-dimensional nature. The pressure surface has a more uniform distribution of heat load than the suction one.