Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2002.05a
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- Pages.244-247
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- 2002
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- 2005-8446(pISSN)
Experiment of the Precision micro-positioning stage
초정밀 마이크로 위치결정 스테이지의 제작 및 평가
- Han, C. S. (KIMM) ;
- Paek, S. (Choong-Nam Univ.) ;
- No, M. K. (Choong-Nam Univ.) ;
- Lee, C. H. (KIMM)
- Published : 2002.05.01
Abstract
The performance of the precision micro-positioning 4-dof stage is presented. The compact design utilizes the monolithic mechanism to achieve the translation in the Z axis and rotation in the