• Journal of the Optical Society of Korea
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• 제18권5호
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• pp.531-537
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• 2014

Through-silicon vias (TSVs) are fine, deep holes fabricated for connecting vertically stacked wafers during three-dimensional packaging of semiconductors. Measurement of the TSV geometry is very important because TSVs that are not manufactured as designed can cause many problems, and measuring the critical dimension (CD) of TSVs becomes more and more important, along with depth measurement. Applying white-light scanning interferometry to TSV measurement, especially the bottom CD measurement, is difficult due to the attenuation of light around the edge of the bottom of the hole when using a low numerical aperture. In this paper we propose and demonstrate four bottom CD measurement methods for TSVs: the cross section method, profile analysis method, tomographic image analysis method, and the two-dimensional Gaussian fitting method. To verify and demonstrate these methods, a practical TSV sample with a high aspect ratio of 11.2 is prepared and tested. The results from the proposed measurement methods using white-light scanning interferometry are compared to results from scanning electron microscope (SEM) measurements. The accuracy is highest for the cross section method, with an error of 3.5%, while a relative repeatability of 3.2% is achieved by the two-dimensional Gaussian fitting method.

• 한국지반신소재학회논문집
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• 제16권1호
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• pp.63-72
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• 2017

본 연구는 Shield TBM공법을 이용한 터널 굴착시 지표침하에 영향을 주는 요소들에 대한 영향정도를 3차원 수치해석을 통해 검토하였다. 막장압, Skinplate 주면압, 굴진장, 지반모델, 요소망 크기, 통과지반에 대한 다양한 조건을 변화시켜가며 수치해석을 수행하였다. 또한 실제 시공된 Shield TBM을 변위제어방법과 응력제어방법으로 모델링하여 현장 계측값과 비교 분석하였다. Skinplate 주면압과 지반모델이 가장 큰 영향요소이며, 통과지층에 따라 적절한 Skinplate 주면압을 입력시 현장 계측값과 유사한 결과를 얻을 수 있었다.

• 자원환경지질
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• 제33권1호
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• pp.41-50
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• 2000

Geo-radar survey which has the advantage of high-resolution and relatively fast survey has been widely used for engineering and environmental problems. Three-dimensional effects have to be considered in the interpretation of geo-radar for high-resolution. However, there exists a trouble on the analysis of the three dimensional effects. To solve this problem an efficient three dimension numerical modeling algorithm is needed. Numerical radar modeling in three dimensional case requires large memory and long calculating time. In this paper, a finite difference method time domain solution to Maxwell's equations for simulating electromagnetic wave propagation in three dimensional media was developed to make economic algorithm which requires smaller memory and shorter calculating time. And in using boundary condition Liao absorption boundary. The numerical result of cross-hole radar survey for tunnel is compared with real data. The two results are well matched. To prove application to three dimensional analysis, the results with variation of tunnel's incident angle to survey cross-section and the result when the tunnel is parallel to the cross-section were examined. This algorithm is useful in various geo-radar survey and can give basic data to develop dat processing and inversion program.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2010년 춘계학술대회논문집
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• pp.315-319
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• 2010

The near wake of square section cylinders with different corner radii is studied by numerical method to investigate the influence of corner radius. Eight models, R/D=0, 0.05, 0.1, 0.15, 0.2, 0.3, 0.4, 0.5 (R is the corner radius and D is the characteristic dimension of the body) at Re=500 were studied. The numerical results of St, CD and CL at R/D=0 and R/D=0.5 were compared with experiments to prove the feasibility and also investigate the trend of flow phenomena by the various radius corners. Results indicate that, as R/D ratio is increased, the Strouha lnumber is increased, the minimum pressure point on the cylinder surface moved own stream. The calculated results shows that between R/D=0.15 to R/D=0.3 have CD and CL.

• Geomechanics and Engineering
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• 제23권3호
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• pp.217-225
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• 2020

In this paper, the thermoelastic interactions in a two-dimension porous body are studied. This problem is solved by using the Green and Lindsay (GL) generalized thermoelasticity model under fractional time derivative. The derived approaches are estimated. with numeral results which are applied to the porous mediums in simplifying geometrical. The bounding plane surface of the present half-space continuum is subjected to a pulse heat flux. We use the Laplace-Fourier transforms methods with the eigenvalues approach to solve the problem. The numerical solutions for the field functions are obtained numerically using the numerical Laplace inversion technique. The effects of the fractional parameter and the thermal relaxation times on the temperature field, the displacement field, the change in volume fraction field of voids distribution and the stress fields have been calculated and displayed graphically and the obtained results are discussed.

• 대한기계학회논문집B
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• 제33권4호
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• pp.225-234
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• 2009

The present study has been preformed to investigate the effect of obstacles around a cooling tower with air-guide to prevent recirculation. The external region as well as the cooling tower are included in the computational domain to analyze the flow phenomena around a cooling tower accurately. Three-dimensional analysis is performed using the finite volume method with non-orthogonal and unstructured grid system. The standard turbulence model is used to consider the turbulence effect. In order to investigate the recirculation phenomena, flow and temperature fields are calculated with the distance between cooling tower and obstacle, the allocated geometrical type and the air-guide. The moisture fraction rates decrease with increment of the distance between cooling tower and obstacle. The effect of air-guide to reduce the mean recirculation rate is obviously observed.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회B
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• pp.2401-2405
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• 2008

In the present study, a three-dimensional least square/level set based two-phase flow code was developed for the simulation of three-dimensional sloshing problems using finite element discretization. The present method can be utilized for the analysis of a free surface flow problem in a complex geometry due to the feature of FEM. Since the finite element method is employed for the spatial discretization of governing equations, an unstructured mesh can be naturally adopted for the level set simulation of a free surface flow without an additional load for the code development except that solution methods of the hyperbolic type redistancing and advection equations of the level set function should be devised in order to give a bounded solution on the unstructured mesh. From the numerical experiments of the present study, it is shown that the proposed method is both robust and accurate for the simulation of three-dimensional sloshing problems.

• 한국철도학회논문집
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• 제15권1호
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• pp.1-8
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• 2012

윤축 동역학 해석은 철도차량 동역학 해석의 정밀도를 결정하는 핵심 요소이다. 본 연구에서는 정밀한 3차원 차륜-레일 접촉 해석을 윤축의 강체 운동 방정식에 적용하는 방법으로 3차원 윤축 동역학 해석을 수행하였다. 곡선 주행시 플랜지 접촉에 의해 차륜-레일 2점 접촉이 발생할 때 윤축의 동역학 해석이 가능한 수치해석 절차를 개발하였다. 윤축의 구속조건식과 강체 동역학 방정식을 Runge-Kutta 방법을 이용하여 수치적분을 수행하였다. 제안된 윤축 동역학 해석 결과는 VI-RAIL을 이용한 해석결과와 비교 분석하여 타당성을 검증하였다.

• 터널과지하공간
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• 제23권1호
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• pp.54-65
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• 2013

선형절삭시험(Linear Cutting Machine)은 TBM(Tunnel Boring Machine)에서의 디스크 커터 설계와 굴진성능 예측을 위한 가장 신뢰성 있는 시험 중의 하나로서, 실대형 암석시료를 대상으로 실제의 커터 하중을 예측할 수 있는 장점을 갖고 있지만, 시료의 채취 및 운반이 용이하지 않고, 1회 시험에 많은 비용이 소요되는 단점을 갖고 있다. 최근 선형절삭시험이 갖는 이러한 경제적 시간적 제약점들을 극복할 수 있는 현실성 있는 수치모델의 개발에 관한 연구가 활발히 진행되고 있다. 본 연구에서는 3차원 입자결합모델을 이용하여 디스크 커터의 절삭에 의한 부산 응회암의 파쇄양상과 최적 커터간격을 도출하였다. 본 해석에서 분석된 비에너지는 $14.3MJ/m^3$ 일 때 최소값을 나타냈다. 이때의 최적의 s/p 비는 약 16 으로 분석되었으며, 부산응회암의 선형절삭시험 및 유한요소법에 의한 수치해석 연구결과와 유사한 경향을 나타냈다.

• Communications for Statistical Applications and Methods
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• 제23권3호
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• pp.259-268
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• 2016

High-dimensional survival data with large numbers of predictors has become more common. The analysis of such data can be facilitated if the dimensions of predictors are adequately reduced. Recent studies show that a method called sliced inverse regression (SIR) is an effective dimension reduction tool in high-dimensional survival regression. However, it faces incapability in implementation due to a double categorization procedure. This problem can be overcome in the right-censoring type by transforming the observed survival time and censoring status into a single variable. This provides more flexibility in the categorization, so the applicability of SIR can be enhanced. Numerical studies show that the proposed transforming approach is equally good to (or even better) than the usual SIR application in both balanced and highly-unbalanced censoring status. The real data example also confirms its practical usefulness, so the proposed approach should be an effective and valuable addition to usual statistical practitioners.