• Title/Summary/Keyword: 355 nm

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A study on the laser ablation of the copper metal foil by 355nm pulse laser (355nm 펄스 레이저를 이용한 구리 박막의 레이저 어블레이션에 대한 연구)

  • Oh J.Y;Shin B.S.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2006.05a
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    • pp.667-668
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    • 2006

  • Usually nanosecond pulsing laser ablation of metal is under thermal effect. Many studies of the theoretical analysis and modeling to predict a result of laser ablation of metal are suggested on the basis of the photothermal mechanism. In this paper, we investigate the etching depth and laser fluence of laser ablation of copper films. We proposed the simplified SSB Model(Srinivasan-Smrtic-Babudp model) to study the photothermal effect of nanosecond pulsing laser ablation of copper thin metal. The experimental results were obtained by using the 355nm DPSS $Nd:YVO_4$ laser.

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Development of Raman Laser Radar System for Aerosol and Water Vapor Measurements (에어로졸, 수증기 측정 라만 레이저 레이다 시스템 개발)

  • Park, Chan-Bong;Lee, Young-Woo
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2012.05a
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    • pp.158-161
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    • 2012

  • Raman Laser Radar system for the measurements of aerosol and water vapor concentration is developed. As a transmitting system, Nd:YAG laser with 3rd harmonic Generator and beam expander are used. The wavelength of transmitting laser is 355 nm. The receiving system is consists of 500 mm telescope, 3-channel Raman spectrometer, PMT, and signal processing module. The wavelengths of received signals are 355 nm. 387 nm, and 408 nm 이다. The measurable altitude of this system is about 3~4 km with spatial resolution of 100~200 m.

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Micromachining & Optical Properties of Li$_2$O-A1$_2$O$_3$-SiO$_2$ Glass System by Laser Treatment (레이저에 의한 Li$_2$O-A1$_2$O$_3$-SiO$_2$계 유리의 미세가공 및 광학적 특성)

  • 강원호
    • Journal of the Microelectronics and Packaging Society
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    • v.8 no.4
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    • pp.43-45
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    • 2001

  • For photosensitive and micro-structuring in $Li_2O-A1_2O_3-SiO_2$glasses by laser treatment, Nd:YAG laser in 355 nm and 1064 nm wavelength was irradiated to the glass to investigate fracture characterization and optical changes. The fractured glass surfaces irradiated by 1064 nm laser was observed by Scanning Electron Microscope(SEM) and optical microscope, and optical changes caused by 355 nm later was identified from absorption spectra. In this study, it could be expected that the laser treatment technology will be utilized for 3-dimensional micro-structure, internal waveguide, optical memory by optical absorption changes in glass matrix.

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Three-dimensional micro photomachining of polymer using DPSSL (Diode Pumped Solid State Laser) with 355 nm wavelength (355nm 파장의 DPSSL을 이용한 폴리머의 3차원 미세 형상 광가공기술)

  • 장원석;신보성;김재구;황경현
    • Korean Journal of Optics and Photonics
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    • v.14 no.3
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    • pp.312-320
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    • 2003

  • The basic mechanistic aspects of the interaction and practical considerations related to polymer ablation were briefly reviewed. Photochemical and photothermal effects, which highly depend on laser wavelength have close correlation with each other. In this study, multi-scanning laser ablation processing of polymer with a DPSS (Diode Pumped Solid State) 3rd harmonic Nd:YVO$_4$ laser (355 nm) was developed to fabricate a three-dimensional micro shape. Polymer fabrication using DPSSL has some advantages compared with the conventional polymer ablation process using KrF and ArF laser with 248 nm and 193 nm wavelength. These advantages include pumping efficiency and low maintenance cost. And this method also makes it possible to fabricate 2D patterns or 3D shapes rapidly and cheaply because CAD/CAM software and precision stages are used without complex projection mask techniques. Photomachinability of polymer is highly influenced by laser wavelength and by the polymer's own chemical structure. So the optical characteristics of polymers for a 355 nm laser source is investigated experimentally and theoretically. The photophysical and photochemical parameters such as laser fluence, focusing position, and ambient gas were considered to reduce the plume effect which re-deposits debris on the surface of substrate. These phenomena affect the surface roughness and even induce delamination around the ablation site. Thus, the process parameters were tuned to optimize for gaining precision surface shape and quality. This maskless direct photomachining technology using DPSSL could be expected to manufacture tile prototype of micro devices and molds for the laser-LIGA process.

  • https://doi.org/10.3807/KJOP.2003.14.3.312 인용 PDF KSCI