Three-dimensional micro photomachining of polymer using DPSSL (Diode Pumped Solid State Laser) with 355 nm wavelength |
장원석
(한국기계연구원 나노공정그룹)
신보성 (한국기계연구원 나노공정그룹) 김재구 (한국기계연구원 나노공정그룹) 황경현 (한국기계연구원 나노공정그룹) |
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폴리머와 UV레이저의 열적, 광화학적 반응특성을 고려한 직접식 마이크로 3차원 광가공기술
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