• 제목/요약/키워드: 3차원 정밀측정(3-Dimensional precision measurement)

검색결과 44건 처리시간 0.029초

선형배율보정을 통한 DFF 기반의 삼차원 형상 측정법 (A Measurement Method of Three-Dimensional Surface Morphology Based on Depth-from-Focus through Linear Magnification Calibration)

  • 김경범;신영수
    • 한국정밀공학회지
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    • 제22권9호
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    • pp.115-122
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    • 2005
  • Errors resulting from magnification variations of a optical system are largely generated in three-dimensional shape measurements based on depth-from-focus. In the case of measuring the surface morphology of tiny objects based on DFF, images are acquired with a very small interval so that magnification changes can be minimized. However, the magnification variations are actually existed in the acquired images and so focus measures are wrongly or ambiguously extracted. In this paper, a methodology with linear magnification calibrations, based on DFF, is proposed to make more accurate measurement in surface morphology with high depth discontinuity, compared with previous ones. Several experiments show that the proposed method outperforms existing ones without magnification calibrations.

물체표면의 3차원 정밀형상측정을 위한 공초점 현미경에 관한 연구 (A Study on Confocal Microscope for A Precise 3-Dimensional Surface Measurement)

  • 송대호;안중근;강영준;채희창
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1997년도 추계학술대회 논문집
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    • pp.233-236
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    • 1997
  • In modem industry, the accuracy and the surface-finish requirements for machined parts have been becoming ever more stringent. Optical method in measurements is playing an important role in vibration measurement, crack and defect detection and surface topography with the advent of opto-mechatronics. In this study, the principle of the general confocal microscope is introduced for surface measurement, and the advanced confocal microscope that has better measuring speed than the traditional confocal microscope is developed. A study on improving the resolution of the advanced confocal microscope is followed. Finally, Software for data acquisition and analysis of various parameters in surface geometrical features has been developed.

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미소광부품의 3차원 미세 패턴 측정 기술 개발 (Development of 3-dimensional Pattern measuring technique for Micro-Optic components)

  • 박희재;김종원;이준식;이정호
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2002년도 추계학술대회 논문집
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    • pp.128-131
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    • 2002
  • Three Dimensional measuring system using optical interference is greatly needed for semiconductor surface or optical surface. The application of this system are : MEMS product, semiconductor surfaces, optical components, precise machined surface, etc. In this paper, Interferometry based measurement system is introduced, which is nondestructive and noncontact inspection system. This system have relatively many advantage, compared with AFM/STM, SEM, Stylus, etc. The developed system can measure the surface topography with high precision and resolution, and with few seconds. And the associated software algorithm is also developed for the ultra precision 3D measuring surface. Various samples that is measured using this system is showed in the latter of this paper.

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위상이동 그림자 무아레법을 이용한 3차원 물체의 형상측정 (Measurement of three dimensional object shape by means of the phase-shifting shadow moire)

  • 유원재;노경완;강영준
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1997년도 춘계학술대회 논문집
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    • pp.96-100
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    • 1997
  • The shadow moire is one of the optical techniques which is able to give contour lines of an object with respect to a master grating plane. The moire patterns are issued from the superposition of a master grating and its shadow projected on the surface of an object. In case of the classical shadow moire method, the sensitivity was a few tenths millimeters. generally, it is difficult to use a phase shift method in shadow moire because it is impossible to obtain uniform phase shifts on the whole field. But in this study we use the fact that if the depth of object is much less than the distance between the observer and the master grating, and the object is displaced perpendicularly to the grating plane, phase shifts are almost uniform. Finally we obtained a better resolution by using a phase shift procedure and applied the phase shifting shadow moire to three dimensional shape measurement.

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광링식 3차원 형상 측정법에 관한 연구 (Study of 3-dimensional measurement of object shape by optical ring method)

  • 박정환;강영준
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1995년도 춘계학술대회 논문집
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    • pp.408-413
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    • 1995
  • Nowadays, manufacturing system is trending toward integrated circumstance by helping of CAD/CAM/CAT. To use this system effectively, it is necessary to get exact 3 dimensional surface data of an object. We have been using contact method to measure 3 dimensional object profile. But his method has demerit of leaving scrach or small distortion on the object. To improve this, a non-contact measuring method using optical system is adopted. In this paper, We propose optical ring method. Withthis system, We could measure displacement of the object in the range of 45mm having 150mm having 150 .mu. m resolution with no scratch or distortion.

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2차원 프로브에 의한 NC공작기계의 운동정밀도 측정 -제 1보 원호보간운동 정밀도 측정- (Measurement of motion accuracy by two-dimensional probe on NC machine tools -1st report, Measurement of the circular motion accuracy-)

  • 전언찬;소산전중덕;제정신
    • 한국정밀공학회지
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    • 제13권3호
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    • pp.56-62
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    • 1996
  • This paper presented a new measuring system to improve circular motion accuracy by using two-dimensonal probe and master ring for NC machine tools. This measuring system reduced the circular motion error conspicuously by eliminating the influence of the acceleration/deceleration range and compensating the friction force whose influences were significant while measuring the motion. Experimental results show that this system had enough accuracy to measure a circular motion for NC machine tools, compared with the circular test method and the r .theta. method.

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공작기계의 오차요소 측정을 통한 3차원 위치정밀도 향상 (The enhancement of 3-dimensional positioning accuracy by measuring error factors for CNC machine tools)

  • 손진욱;서석환;정세용;이응석;위현곤
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1994년도 추계학술대회 논문집
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    • pp.260-265
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    • 1994
  • Efforts have been devoted to developing rapid and accurate methods for measuring the errors of machine tools. The method os measurement and calibration of machine tool errors should be general and efficient. The objective of this study is to show in detail the full sequence from the measurement of errors factors to the verification of the positioning accuracy after compensation for the volumetric error. In this paper, we described the steps in measuring the volumetric error parameters, a general error model composed of error parameters, temperature, and the desired position. The validity of the error calibration methods proposed in this paper was tested using a vertical 3-axis CNC machine with a laser interferometer and a ball bar.

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퓨필랩 모바일 동공 추적 장치를 위한 3차원 캘리브레이션 및 성능 평가 방법 (3-Dimensional Calibration and Performance Evaluation Method for Pupil-labs Mobile Pupil Tracking Device)

  • 문지훈;신동원;호요성
    • 스마트미디어저널
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    • 제7권2호
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    • pp.15-22
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    • 2018
  • 동공 추적 기술은 스마트 장치와 연계하여 사용자에게 편의를 제공할 수 있는 효율적인 정보 제공 수단으로 사용될 수 있다. 본 논문에서는 Pupil-labs에서 제작한 모바일 동공 추적 장치를 사용하여 사용자의 응시점 거리를 측정하고, 정확도와 정밀도를 분석하는 실험 수행결과를 보인다. 이를 기반으로 동공 추적 장치가 측정하는 동공의 응시점 위치와 대상 타겟과의 오차를 비교한다. 모바일 동공 추적 장치도 한 종류의 카메라이기 때문에 사용하기 전에는 반드시 캘리브레이션 작업을 수행해야 한다. 일반적으로 사용하는 2차원 캘리브레이션 방법뿐만 아니라, 3차원 캘리브레이션 수행 방법에 대해 설명한다. 3차원 캘리브레이션은 2차원 캘리브레이션 결과보다 높은 정확도를 갖기 위해임의의 평면을 설정하여 다양한 3차원 공간상에서 캘리브레이션을 수행하는 과정을 의미한다. 3차원 캘리브레이션의 효율성을 보이기 위해 실험결과에 대한 분석 결과를 설명한다. 또한 전반적인 장치의 사용 방법과 장치를 통해 얻을 수 있는 다양한 정보를 소개한다.

3차원 미세표면현상 측정을 위한 시료면의 자세제어에 관한 연구 (Correction of Specimen Orientation in Three-Dimensional Measurement of Surface Roughnes with Small Waviness)

  • 조남규
    • 한국정밀공학회지
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    • 제11권5호
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    • pp.5-11
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    • 1994
  • 현대산업사회의 발달에 따라 제품의 고기능화, 고성능화, 고부가가치화의 경향이 현저하여지고 그에 따른 기계 및 전자분야의 눈부신 발전은 고정도 부품의 제작을 위한 초정밀 가공기술 및 초정밀 측정기술의 발전에 더욱 박차를 가하여 왔다. 그 중에서 정밀측정기술은, 설계정보로 주어진 Criterion에 대한 적부 판정이라는 종래의 계측개념에서 탈피하여, 제품의 종합적인 가치평가이외에도 창조과정의 중요한 역할을 담당하는 주요기술로서 개념이 자리를 굳히고 있다. 즉 물리량의 검출에 의한 적부검사 및 가동에의 Feedback 정보제공이라는 단순한 역할에서, 고도의 정보처리기술의 도입에 의한 적절한 요구사항의 처리에 의하여 기술전략, 가공 및 조립, 보수 및 관리, 설계 및 개발, 판매전략 등에 그 정보가 적극적으로 활용 되게 되었다.

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재귀반사 특성을 이용한 경면물체의 3차원 형상 측정 (Measurement of the 3-Dimensional Shapes of Specular Objects by Using Double Pass Retroreflection)

  • 박원식;유영기;조형석
    • 한국정밀공학회지
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    • 제13권11호
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    • pp.64-72
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    • 1996
  • This paper is aimed to develop an optical method for measuring 3-dimensional shapes of specular objects having curved surfaces. The existing methods measuring the shapes of specular objects have several common disadvantages: they may not work properly if the surface is highly specular like mirror surface or if the reflectance property is not uniform over the surface. And, they often require the a priori knowledege about the surface reflectance. To overcome these disadvantages, the measurement using double pass retroreflection method is proposed in this paper. For this measurement principle, an experimental measuring system is designed and prepared which is composed of a galvanometer scanner, a beam splitter, a laser source, a CCD camera, and a reflector made of retroreflective material. To verify the effectiveness of the measurement system a series of experiments are performaed for various specular objects. The results observed from the experiments show that the developed optical sensing system can be an effective mean of measuring the 3-D shapes of specular objects.

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