A Study on Confocal Microscope for A Precise 3-Dimensional Surface Measurement

물체표면의 3차원 정밀형상측정을 위한 공초점 현미경에 관한 연구

In modem industry, the accuracy and the surface-finish requirements for machined parts have been becoming ever more stringent. Optical method in measurements is playing an important role in vibration measurement, crack and defect detection and surface topography with the advent of opto-mechatronics. In this study, the principle of the general confocal microscope is introduced for surface measurement, and the advanced confocal microscope that has better measuring speed than the traditional confocal microscope is developed. A study on improving the resolution of the advanced confocal microscope is followed. Finally, Software for data acquisition and analysis of various parameters in surface geometrical features has been developed.