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A Measurement Method of Three-Dimensional Surface Morphology Based on Depth-from-Focus through Linear Magnification Calibration  

Kim, Gyung-Bum (충주대학교 기계설계학과)
Shin, Young-Su (충주대학교 대학원 기계설계학과)
Publication Information
Journal of the Korean Society for Precision Engineering / v.22, no.9, 2005 , pp. 115-122 More about this Journal
Abstract
Errors resulting from magnification variations of a optical system are largely generated in three-dimensional shape measurements based on depth-from-focus. In the case of measuring the surface morphology of tiny objects based on DFF, images are acquired with a very small interval so that magnification changes can be minimized. However, the magnification variations are actually existed in the acquired images and so focus measures are wrongly or ambiguously extracted. In this paper, a methodology with linear magnification calibrations, based on DFF, is proposed to make more accurate measurement in surface morphology with high depth discontinuity, compared with previous ones. Several experiments show that the proposed method outperforms existing ones without magnification calibrations.
Keywords
DFF (depth from focus); Linear magnification calibration; Magnification variation; Focus measure; Three-Dimensional surface measurement;
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Times Cited By KSCI : 6  (Citation Analysis)
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