• Title/Summary/Keyword: 2.5D Packaging

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Characterization of Sol-gel Coated Pb(ZrTi)O3 Thin film for Piezoelectric Vibration MEMS Energy Harvester (압전 MEMS 진동에너지 수집소자를 위한 졸겔 공법기반의 Pb(ZrTi)O3 박막의 특성 분석 및 평가)

  • Park, Jong-C.;Park, Jae-Y.
    • Proceedings of the KIEE Conference
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    • 2009.07a
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    • pp.1240_1241
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    • 2009
  • In this paper, sol-gel-spin coated $Pb(ZrTi)O_3$ thin film with $ZrO_2$ buffer-layer and $PbTiO_3$ seed-layer was investigated for vibration MEMS energy harvester to scavenge power from ambient vibration via d33 piezoelectric mode. Piezoelectric thin film deposition techniques on insulating layer is the important key for $d_{33}$ mode of piezoelectric vibration energy harvester. $ZrO_2$ buff-layer was utilized as an insulating layer. $PbTIO_3$ seed-layer was applied as an inter-layer between PZT and $ZrO_2$ layer to improve the crystalline of PZT thin film. The fabricated PZT thin film had a remanent polarization of 5.3uC/$cm^2$ and the coercive field of 60kV/cm. The fabricated energy harvester using PZT thin film with PTO seed-layer generated 1.1uW of electrical power to $2.2M{\Omega}$ of load with $4.4V_{pvp}$ from vibration of 0.39g at 528Hz.

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Application of multi dimensional NMR experiments to VBS RNAs of Yeast Saccaromyces cerevisiae virus

  • Chaejoon Cheong;Cheong, Hae-Kap;Yoo, Jun-Seok
    • Journal of the Korean Magnetic Resonance Society
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    • v.5 no.1
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    • pp.29-36
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    • 2001
  • The structures of two VBS (viral binding site) RNAs, SL1 and SL2, of Yeast Saccharomyces cerevisiae vims have been studied by 2D and 3D NMR experiments. VBSs play a crucial role in viral particle binding to the plus strand and packaging of the RNA. The secondary structures of the two VBS RNAs share a common feature of the stem-internal loop-stem-hairpin loop structure although the size of the internal loops of SL1 and SL2 differs. 2D experiments were sufficient for fill assignments of SL1. However, isotope labeling of the sample and multidimensional experiments were required for 28-nucleotide-long SL2 due to the spectral overlap. Several 3D HCCH experiments have accomplished full assignment of SL2 RNA.

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Corrosion Characteristics of Gold-Coated Silver Wire for Semiconductor Packaging (반도체 패키징용 금-코팅된 은 와이어의 부식특성)

  • Hong, Won Sik;Kim, Mi-Song;Kim, Sang Yeop;Jeon, Sung Min;Moon, Jeong Tak;Kim, Youngsik
    • Corrosion Science and Technology
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    • v.20 no.5
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    • pp.289-294
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    • 2021
  • In this study, after measuring polarization characteristics of 97.3 wt% Ag, Au-Coated 97.3 wt% Ag (ACA) and 100 wt% Au wires in 1 wt% H2SO4 and 1 wt% HCl electrolytes at 25 ℃, corrosion rate and corrosion characteristics were comparatively analyzed. Comparing corrosion potential (ECORR) values in sulfuric acid solution, ACA wire had more than six times higher ECORR value than Au wire. Thus, it seems possible to use a broad applied voltage range of bonding wire for semiconductor packaging which ACA wire could be substituted for the Au wire. However, since the ECORR value of ACA wire was three times lower than that of the Au wire in a hydrochloric acid solution, it was judged that the use range of the applied voltage and current of the bonding wire should be considered. In hydrochloric acid solution, 97.3 wt% Ag wire showed the highest corrosion rate, while ACA and Au showed similar corrosion rates. Additionally, in the case of sulfuric acid solution, all three types showed lower corrosion rates than those under the hydrochloric acid solution environment. The corrosion rate was higher in the order of 97.3 wt% Ag > ACA > 100 wt% Au wires.

Effects of Solder Particle Size on Rheology and Printing Properties of Solder Paste (미세피치 접합용 솔더 페이스트의 솔더 분말 크기에 따른 레올로지 및 인쇄 특성 평가)

  • Jun, So-Yeon;Lee, Tae-Young;Park, So-Jeong;Lee, Jonghun;Yoo, Sehoon
    • Journal of the Microelectronics and Packaging Society
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    • v.29 no.2
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    • pp.91-97
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    • 2022
  • The wettability and rheological properties of solder paste with the size of the solder powder were evaluated. To formulate the solder paste, three types of solder powder were used: T4 (20~28 ㎛), T5 (15~25 ㎛), and T6 (5~15 ㎛). The viscosities of the T4, T5, and T6 solder pastes at 10 RPM were 155, 263, and 418 Pa·s, respectively. After 7 days, the viscosity of the T4 solder paste slightly increased by 2.6% and that of T5 was increased by 20.6%. The viscosity of the T6 solder paste after 7 days could not be measured due to high viscosity. The viscosity variation with solder particle size also affected on the printability of the solder. In the case of the T4 solder paste, printability, slump, bridging, and soldering properties were excellent. On the other hand, T5 showed slight dewetting and solder ball defects. Especially, T6, which the smallest powder size, showed poor printability and dewetting at the edge of solder.

Effects of Organic Acids Mix and Modified Atmosphere Packaging on the Storage Quality of Sliced Bacon

  • Muhlisin, Muhlisin;Kang, Sun-Moon;Choi, Won-Hee;Lee, Keun-Taik;Cheong, Sung-Hee;Lee, Sung-Ki
    • Food Science of Animal Resources
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    • v.31 no.5
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    • pp.710-718
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    • 2011
  • The effects of organic acids mix (0.4%) and modified atmosphere packaging (MAP) on the storage quality of sliced bacon were investigated. Pork bellies were treated with or without organic acids at the curing stage. The organic acids mix comprised 35% sodium acetate, 25% salt, 15% calcium lactate, 11% trisodium citrate, 7% ascorbate, and 7% citric acid. The cured pork bellies were smoked and packaged with 50% $CO_2$ + 50% $N_2$ (50% $CO_2$-MAP) and 100% $N_2$ (100% $N_2$-MAP), and stored at $5^{\circ}C$ for 14 d. The 50% $CO_2$-MAP showed a higher pH value (p<0.05) up to 10 d, a lower protein deterioration (p<0.05) as measured by volatile basic nitrogen (VBN) from 6 to 14 d, and a higher color value of lightness (CIE $L^*$) compared to 100% $N_2$-MAP. The development of lipid oxidation measured by thiobarbituric acid reactive substance (TBARS) values seemed to be effectively controlled throughout the storage period in both 50% $CO_2$-MAP and 100% $N_2$-MAP regardless of the application of organic acids. The 50% $CO_2$-MAP inhibited the growth of aerobic and anaerobic bacteria (p<0.05) both in non-added and bacon added with organic acids mix. The 50% $CO_2$-MAP alone seemed to be effective in delaying the growth of bacteria since the use of organic acids mix gave no additional effects. The addition of organic acids mix lowered the pH value (p<0.05), effectively retarded the protein deterioration (p<0.05), and showed a higher color value of lightness (CIE $L^*$) value (p<0.05) and lower color value of redness (CIE $a^*$) value (p<0.05). In conclusion, 50% $CO^2$-MAP showed better quality and self-life of sliced bacon during storage. However, the beneficial effect of organic acids mix was not noticed in the concentration used in this experiment.

Characterization and Enhancement of Package O2 Barrier against Oxidative Deterioration of Powdered Infant Formula

  • Jo, Min Gyeong;An, Duck Soon;Lee, Dong Sun
    • KOREAN JOURNAL OF PACKAGING SCIENCE & TECHNOLOGY
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    • v.24 no.1
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    • pp.13-16
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    • 2018
  • Powdered infant formula is susceptible to oxidation in the presence of oxygen. Even though the product is usually packaged in nitrogen atmosphere, the oxygen ingress through the package layer may occur in case of flexible pouches and affects the oxidation of the product. $O_2$ barrier of the package is thus important variable to protect the product from oxidative deterioration. $O_2$ barrier property was investigated for aluminum-laminated small pillow packs of $3.5{\times}17.5cm$. Storage temperature and combination of primary and secondary packages were evaluated as variables affecting the barrier for conditions of empty pouch flushed with nitrogen. Apparent oxygen transmission rate of the primary package exposed to air was $2.32{\times}10^{-3}mL\;(STP)\;atm^{-1}\;d^{-1}$ at $30^{\circ}C$ and its temperature dependence could be explained by activation energy of $28.5kJ\;mol^{-1}$ in Arrhenius relationship. The additional secondary package of nylon/PE film containing 20 primary packages was ineffective in modulating package $O_2$ transmission and was only marginally helpful when combined with oxygen scavenger. The same was true in suppressing the product oxidation when the primary package was filled with 14 g of the formula.

Design and Fabrication of Low Temperature Processed $BaTiO_3$ Embedded Capacitor for Low Cost Organic System-on-Package (SOP) Applications (저가형 유기 SOP 적용을 위한 저온 공정의 $BaTiO_3$ 임베디드 커페시터 설계 및 제작)

  • Lee, Seung-J.;Park, Jae-Y.;Ko, Yeong-J.
    • Proceedings of the KIEE Conference
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    • 2006.07c
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    • pp.1587-1588
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    • 2006
  • Tn this paper, PCB (Printed Circuit Board) embedded $BaTiO_3$ MIM capacitors were designed, fabricated, and characterized for low cost organic SOP applications by using 3-D EM simulator and low temperature processes. Size of electrodes and thickness of high dielectric films are optimized for improving the performance characteristics of the proposed embedded MIM capacitors at high frequency regime. The selected thicknesses of the $BaTiO_3$ film are $12{\mu}m$, $16{\mu}m$, and $20{\mu}m$. The fabricated MIM capacitor with dielectric constant of 30 and thickness of $12{\mu}m$ has capacitance density of $21.5p\;F/mm^2$ at 100MHz, maximum quality factor of 37.4 at 300 MHz, a quality factor of 30.9 at 1GHz, self resonant frequency of 5.4 GHz, respectively. The measured capacitances and quality factors are well matched with 3-D EM simulated ones. These embedded capacitors are promising for SOP based advanced electronic systems with various functionality, low cost, small size and volume.

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Fabrication process of embedded passive components in MCM-D (MCM-D 기판 내장형 수동소자 제조공정)

  • 주철원;이영민;이상복;현석봉;박성수;송민규
    • Journal of the Microelectronics and Packaging Society
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    • v.6 no.4
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    • pp.1-7
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    • 1999
  • We developed Fabrication process of embedded passive components in MCM-D substrate. The proposed MCM-D substrate is based on Cu/photosensitive BCB multilayer. The substrate used is Si wafer and Ti/cu metallization is used to form the interconnect layer. Interconnect layers are formed with 1000$\AA$ Ti/3000$\AA$ Cu by sputtering method and 3$\mu\textrm{m}$ Cu by electrical plating method. In order to form the vias in photosensitive BCB layer, the process of BCB and plasma etch using $C_2F_6$ gas were evaluated. The MCM-D substrate is composed of 5 dielectric layers and 4 interconnect layers. Embedded resistors are made with NiCr and implemented on the $2^{nd}$ dielectric layer. The sheet resistance of NiCr is controlled to be about 21 $\Omega$/sq at the thickness of 600$\AA$. The multi-turn sprial inductors are designed in coplanar fashion on the $4^{th}$ interconnect layer with an underpass from the center to outside using the lower $3^{rd}$ interconnect layer. Capacitors are designed and realized between $1^{st}$ interconnect layer and $2^{nd}$ interconnect layer. An important issue in capacitor is the accurate determination of the dielectric thickness. We use the 900$\AA$ thickness of PECVD silicon nitride film as dielectric. Capacitance per unit area is about 88nF/$\textrm {cm}^2$at the thickness of 900$\AA$. The advantage of this integration process is the compatibility with the conventional semiconductor process due to low temperature PECVD silicon nitride process and thermal evaporation NiCr process.

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Cu-Filling Behavior in TSV with Positions in Wafer Level (Wafer 레벨에서의 위치에 따른 TSV의 Cu 충전거동)

  • Lee, Soon-Jae;Jang, Young-Joo;Lee, Jun-Hyeong;Jung, Jae-Pil
    • Journal of the Microelectronics and Packaging Society
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    • v.21 no.4
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    • pp.91-96
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    • 2014
  • Through silicon via (TSV) technology is to form a via hole in a silicon chip, and to stack the chips vertically for three-dimensional (3D) electronics packaging technology. This can reduce current path, power consumption and response time. In this study, Cu-filling substrate size was changed from Si-chip to a 4" wafer to investigate the behavior of Cu filling in wafer level. The electrolyte for Cu filling consisted of $CuSO_4$ $5H_2O$, $H_2SO_4$ and small amount of additives. The anode was Pt, and cathode was changed from $0.5{\times}0.5cm^2$ to 4" wafer. As experimental results, in the case of $5{\times}5cm^2$ Si chip, suitable distance of electrodes was 4cm having 100% filling ratio. The distance of 0~0.5 cm from current supplying location showed 100% filling ratio, and distance of 4.5~5 cm showed 95%. It was confirmed good TSV filling was achieved by plating for 2.5 hrs.

Study on the Defect Mechanism of Immersion Gold Layer (Immersion gold층의 결함 메카니즘 연구)

  • Lee, Dong-Jun;Choi, Jin-Won;Cho, Seung-Hyun
    • Journal of the Microelectronics and Packaging Society
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    • v.15 no.3
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    • pp.35-40
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    • 2008
  • Investigation on immersion gold layers was carried out using TEM analysis for the purpose of understanding the defect of immersion gold layer. The immersion gold layers prepared with three different types of baths were observed. The results showed that the defect structure of immersion gold layer is strongly dependent on the types of gold baths. Spherical defects of average 10 nm size were located along the grain boundaries for the specimen formed at KAu$(CN)_2$ bath containing no reducing agent. In the case of the specimen processed at KAu$(CN)_2$ bath containing a reducing agent, the spherical defects of 5-10 nm size were distributed randomly in grains as well as at grain boundaries. However, such defects disappeared almost completely when $Na_{3}Au(SO_3)_2$ bath was used to fabricate an immersion gold.

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