Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2009.07a
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- Pages.1240_1241
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- 2009
Characterization of Sol-gel Coated Pb(ZrTi)O3 Thin film for Piezoelectric Vibration MEMS Energy Harvester
압전 MEMS 진동에너지 수집소자를 위한 졸겔 공법기반의 Pb(ZrTi)O3 박막의 특성 분석 및 평가
- Park, Jong-C. (Micro/Nano Devices & Packaging Lab. Department of Electronic Engineering, Kwangwoon University) ;
- Park, Jae-Y. (Micro/Nano Devices & Packaging Lab. Department of Electronic Engineering, Kwangwoon University)
- Published : 2009.07.14
Abstract
In this paper, sol-gel-spin coated
Keywords