• 제목/요약/키워드: 2-step Annealing

검색결과 183건 처리시간 0.02초

플라즈마 용사법에 의한 $Al_2$O$_3$ 피복층의 열처리효과에 관한 연구 (The Heat Treatment Characterization of Plasma Sprayed Alumina Coatings)

  • 오익현;김한산;김수식
    • 한국표면공학회지
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    • 제27권3호
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    • pp.134-142
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    • 1994
  • $Al_2O_3$coatings on mild steel substrate by plasma spray process were produced to evaluate microstructural characterization and mechanical properties. As-coated $Al_2O_3$coating samplessd were subjected to two heat treat-ment conditions : ⅰ) annealing under vacuum circumstance, ⅱ) hot press treated condition. The two heat treat-ed coatings were investigated in terms of microhardness, adhesion strength, wear resistance, porosity forma-tion, and microstructures. In the case of the coatings which were subject to preparation step ⅰ, the porosity in the coating was decreased with the increase of temperature ($700^{\circ}C$-$1100^{\circ}C$), and the wear resistance, microhardnesss and adhesion strength were increased with the increase of temperature. On the other hand, in the case of the coatings which were subject to preparation step ⅱ, wear resistance and adhesion strength were improved with the increase of temperature and pressure. Experimental measurements of coatings which were produced by both preparation conditions were enhanced compare to those of as-coated coatings.

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THIN FILM TECHNOLOGIES RELATED TO THE HIGH T$_{c}$ SUPERCONDUCTORS

  • Ri, Eui-Jae
    • 한국표면공학회지
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    • 제29권5호
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    • pp.415-423
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    • 1996
  • Thin film technologies for fabricating SQUIDs involve etching and deposition procedures with the proper substrate materials and $YBa_2Cu_3O_{7-d}$ (YBCO) as the high $T_c$ superconductor. YBCO were prepared on various substrates of MgO, $SrTiO_3$, and $LaAlO_3$ by using off-axis magnetron sputtering methods and annealing in-situ. The parameters of film fabrication processes had been optimized to yield good quality films in terms of the critical temperature $T_c$ and the critical current density $J_c$. The optimized processes yielded $T_C$>90K along with $J_c$>$10_6A$$extrm{cm}^2$ at 77K and>$2\times10_7A/Cm^2$ at 5K. We fabricated step-edge type dc-SQUIDs and directly coupled magnetometers, producing step edges on MgO(100) substrates by etching with Ar-ion beam, depositing YBCO material on them, then patterning them by using ion-milling technique. Circuitizing washer-shape SQUIDs to possess a pair of step-edge junctions of 2-5$\mu$ line width with a high angle>$50^{\circ}C$ , we examined their I-V characteristics thoroughly and Shapiro steps clearly as we irradiate microwaves of 8-20 GHz frequency.

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실리콘 기판상에 제작된 박막형 Pt-RTD의 특성 (The Characteristic of Pt-RTD Fabricated on Si Substrate)

  • 홍석우;문경민;노상수;정귀상
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1999년도 하계학술대회 논문집 D
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    • pp.1806-1808
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    • 1999
  • The electrical and physical characteristics of MgO and Pt thin-films on Si substrate, deposited by r.f magnetron sputtering. It were analyzed with annealing condition($1000^{\circ}C$ for 120 min) by four point probe, a-step, SEM and XRD. Until $1000^{\circ}C$ of annealing temperature, MgO medium layer had the properties of improving Pt adhesion to $SiO_2$ and insulation without chemical reaction to Pt thin-films and the resistivity of Pt thin-films was improved. In the analysis of properties of Pt-RTD, TCR value had $3927ppm/^{\circ}C$ and liner in the temperature range of room temperature ${\sim}400^{\circ}C$.

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3D Nanotube Capacitor 구현을 위한 BLT Nanotube 제작 (Fabrication of BLT Nanotubes for 3D Nanotube Capacitor)

  • 서보익;;김상우;홍석경;양비룡
    • 한국세라믹학회지
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    • 제43권4호
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    • pp.220-223
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    • 2006
  • BLT nanotubes were synthesized by using simple and convenient method template-wetting process. Porous alumina membranes were prepared by 2 step anodic oxidation as the template. To improve wetting properties and make low surface energy, BLT solution was mixed with polymer. Polymer was removed completely during annealing. After completely etching the template in 30 wt% KOH solution, we demonstrate that BLT nanotubes with a diameter of 200 nm can be fabricated. Grain growth process of BLT nanotubes during baking, and furnace annealing was examined by FE-SEM and XRD.

Effect of $NH_3$ on the Synthesis of Carbon Nanotubes Using Thermal Chemical Vapor Deposition

  • Cho, Hyun-Jin;Jang, In-Goo;Yoon, So-Jung;Hong, Jin-Pyo;Lee, Nae-Sung
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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    • pp.1219-1224
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    • 2006
  • This study investigates the effect of $NH_3$ gas upon the growth of carbon nanotubes (CNTs) using thermal chemical vapor deposition. It is considered that the CNT synthesis occurs mainly through two steps, clustering of catalyst particles and subsequent growth of CNTs. We thus introduced $NH_3$ during either an annealing or growth step. When $NH_3$ was fed only during annealing, CNTs grew longer and more highly crystalline with diameters unchanged. An addition of $NH_3$ during growth, however, resulted in shorter CNTs with lower crystallinity while increased their diameters. Vertically aligned, highly populated CNT samples showed poor field emission characteristics, leading us to apply post-treatments onto the CNT surface. The CNTs were treated by adhesive tapes or etched back by dc plasma of $N_2$ to reduce the population density and the radius of curvatures of CNTs. We discuss the morphological changes of CNTs and their field emission properties upon surface treatments.

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엑시머 레이저를 이용하여 결정화한 PECVD 및 LPCVD 비정질 실리콘 박막의 특성 분석 (An Analysis of Characteristics of PECVD and LPCVD a-Si Films Crystallized by Excimer Laser)

  • 장근호;이성규;전명철;한민구
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1994년도 하계학술대회 논문집 C
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    • pp.1239-1242
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    • 1994
  • We have characterized XeCl excimer-laser-induced crystallization of thin amorphous silicon films deposited by PECVD (${\alpha}-Si:H$) and LPCVD(${\alpha}-Si$). The electrical and optical properties and surface roughness of crystallized thin films have been measured. The dc conductivities, crystallinity and surface roughness of the films increased as the laser energy density and shot density were increased. Also, we have investigated the effects of 2-step annealing employing SPC and ELA. The properties of 2-step annealed films were better than those of films annealed by ELA only.

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$SiH_2$$CI_2$ 환원에 의해 형성된 WSix 박막 특성 (Characteristics of Tungsten Silicide Film Formed by Dichlorosilane Reduction)

  • 최동규;고철기
    • 전자공학회논문지A
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    • 제29A권9호
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    • pp.15-19
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    • 1992
  • Tungsten silicied (WSix) has been widely used for interconnection line to improve the speed and reliability of devices. It is known that WSix formed by silane reduction has poor step coverage and poor adhesion. In this research, WSix by dichlorosilane reduction showed excellent adhesion in cellophane adhesive tape test, and improved step coverage by two times. The crystal structure of the as-deposited WSix film by silane reduction was transformed from the hexagonal to the tetragonal structure during annealing treatment, while that by dichlorosilane reduction kept the stable tetragonal structure. The fluorine concentration in the WSix film by dichlorosilane was lower than that by silane.

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나노상 $SnO_2$ 가스센서에서 센서검지특성에 미치는 결정구조의 영향 (Effect of Crystal Structures on the Sensing Properties of Nanophase $SnO_2$ Gas Sensor)

  • 안재평;김선호;박종구;허무영
    • 한국분말재료학회지
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    • 제8권2호
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    • pp.98-103
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    • 2001
  • Metallic tin powder with diameter less than 50 nm was synthesized by inert gas condensation method and subsequently oxidized to tin oxide ($SnO_2$) along the two heat-treatment routes. The $SnO_2$ powder of single phase with a tetragonal structure was obtained by the heat-treatment route with intermediate annealing step-wise oxidation, whereas the $SnO_2$ powder with mixture of orthorhombic and tetragonal phases was obtained by the heat-treatment route without intermediate annealing (direct oxidation). $SnO_2$ gas sensors fabricated from the nano-phase $SnO_2$ powders were investigated by structural observations as well as measurement of electrical resistance. The $SnO_2$ gas sensors fabricated from the mixed-phase powder exhibited much lower sensitivity against $H_2$ gas than those fabricated from the powder of tetragonal phase. Reduced sensitivity of gas sensors with the new orthorhombic phase was attributed to detrimental effects of phase boundaries between orthorhombic and tetragonal phases and many twin boundaries on the charge mobility.

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박막형 $SnO_2$가스 센서의 특성에 관한 연구 (A study on characteristics of thin film $SnO_2$ gas sensor)

  • 김상연;송준태
    • E2M - 전기 전자와 첨단 소재
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    • 제8권3호
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    • pp.278-284
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    • 1995
  • Thin fihn SnO$_{2}$ Gas Sensor was fabricated by electron-beam evaporation system and the target made by general firing method for the purpose of detecting gas components in air, especially methane gas. SnO$_{2}$ thin film was prepared on the polished alumina substrate which Pt interdigital electrode was precoated. The effects of annealing temperature and substrate temperature on the structural properties of SnO$_{2}$ thin film on glass were investigated using the X-ray diffraction. The good crystalline structure is formed when substrate temperature is 150[.deg. C] and annealing condition is 550[.deg. C], 1[hour]. And the sensing properties at various thickness of the SnO$_{2}$ thin film and the effects of PdCI$_{2}$ addition were also investigated. The good result is showed when the thickness is below 1000[.angs.] and the quantity of PdCI$_{2}$ addition is 4[wt%]. The thickness of SnO$_{2}$ thin film was measured by .alpha.-step and Elliopsometer.

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콤플렉스 시스템의 신뢰도 최적화를 위한 발견적 합성해법의 개발 (A Hybrid-Heuristic for Reliability Optimization in Complex Systems)

  • 김재환
    • 해양환경안전학회지
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    • 제5권2호
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    • pp.87-97
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    • 1999
  • This study is concerned with developing a hybrid heuristic algorithm for solving the redundancy optimization problem which is very important in system safety, This study develops a HH(Hybrid Heuristic) method combined with two strategies to alleviate the risks of being trapped at a local optimum. One of them is to construct the populations of the initial solutions randomly. The other is the additional search with SA(Simulated Annealing) method in final step. Computational results indicate that HH performs consistently better than the KY method proposed in Kim[8]. Therefore, the proposed HH is believed to an attractive to other heuristic methods.

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