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http://dx.doi.org/10.4191/KCERS.2006.43.4.220

Fabrication of BLT Nanotubes for 3D Nanotube Capacitor  

Seo, Bo-Ik (Department of Materials Science and Engineering, Kumoh National Institute of Technology)
Shaislamov Ulugbek (Department of Materials Science and Engineering, Kumoh National Institute of Technology)
Kim, Sang-Woo (Department of Materials Science and Engineering, Kumoh National Institute of Technology)
Hong, Seok-Kyung (Hynix Semiconductor Inc., Memory R&D Division, New Device Team)
Yang, Bee-Lyong (Department of Materials Science and Engineering, Kumoh National Institute of Technology)
Publication Information
Journal of the Korean Ceramic Society / v.43, no.4, 2006 , pp. 220-223 More about this Journal
Abstract
BLT nanotubes were synthesized by using simple and convenient method template-wetting process. Porous alumina membranes were prepared by 2 step anodic oxidation as the template. To improve wetting properties and make low surface energy, BLT solution was mixed with polymer. Polymer was removed completely during annealing. After completely etching the template in 30 wt% KOH solution, we demonstrate that BLT nanotubes with a diameter of 200 nm can be fabricated. Grain growth process of BLT nanotubes during baking, and furnace annealing was examined by FE-SEM and XRD.
Keywords
BLT; AAO; Nanotube; Template; Polymer;
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