Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1999.07d
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- Pages.1806-1808
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- 1999
The Characteristic of Pt-RTD Fabricated on Si Substrate
실리콘 기판상에 제작된 박막형 Pt-RTD의 특성
- Hong, Seok-Woo (School of Information and Communication Eng. Dongseo Univ.) ;
- Moon, Kyung-Min (School of Information and Communication Eng. Dongseo Univ.) ;
- Noh, Sang-Soo (Deayng Electric Co.) ;
- Chung, Gwiy-Sang (School of Information and Communication Eng. Dongseo Univ.)
- Published : 1999.07.19
Abstract
The electrical and physical characteristics of MgO and Pt thin-films on Si substrate, deposited by r.f magnetron sputtering. It were analyzed with annealing condition(
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