• 광학세계
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• 통권144호
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• pp.16-24
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• 2013

펨토초는 1000조 분의 1초를 말한다. $10^{-15}$를 의미하는 단위명이 펨토(Femto)이기 때문에 붙여진 이름이다. 눈을 한 번 깜박이는 시간이 약 10분의 1초, 총알이 물체를 통과하는 데 걸리는 시간이 약 100만 분의 5초인 점을 감안하면 펨토초는 상상하기도 힘들 정도로 빠른 시간인 셈이다. 이런 펨토초 동안 벌어지는 물리, 화학, 생물학적 현상을 연구하는 학문이 펨토과학이며 주로 펨토초 레이저를 이용해 관찰한다. 현재 전 세계적으로 펨토초의 극히 짧은 시간에 1000조 와트(페타와트)의 고출력 레이저를 발생시킬 수 있는 광양자빔 연구시설 구축 사업이 활발하게 진행되고 있다. 국내에서는 광주과학기술원(GIST) 고등광기술연구소가 '극초단 광양자빔 연구시설 설치 운영사업(사업책임자: 이종민 교수)'을 통해 국가 대형 레이저 연구시설인 '페타와트 극초단 초강력 레이저 연구시설(PULSER)'을 최근 구축 완료했다. 이번호에서는 21세기를 이끌 신성장동력 중 하나로 각광 받고 있는 펨토과학기술의 국내 연구 현황과 페타와트 극초단 초강력 레이저 연구시설(PULSER)에 대해 자세히 소개하고자 한다.

• 한국정밀공학회지
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• 제26권6호
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• pp.36-40
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• 2009

Development of maskless lithography techniques can provide a potential solution for the photomask cost issue. Furthermore, it could open a market for small scale manufacturing applications. Since femtosecond lasers have been found suitable for processing of a wide range of materials with sub-micrometer resolution, it is attractive to use this technique for maskless lithography. As a femtosecond laser has recently been developed, both of high power and high photon density are easily obtained. The high photon density results in photopolymerization of photoresist whose absorption spectrum is shorter than that of the femtosecond laser. The maskless lithography using the two-photon absorption (TPA) makes micro structures. In this paper, we present a femtosecond laser direct write lithography for submicron PR patterning, which show great potential for future application.

• 한국정밀공학회지
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• 제23권9호
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• pp.102-110
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• 2006

We discuss two possibilities of using femtosecond pulse lasers as a new interferometric light source for enhanced precision surface-profile metrology. First, a train of ultra-fast laser pulses yields repeated low temporal coherence, which allows unequal-path scanning interferometry, which is not feasible with white light. Second, the high spatial coherence of femtosecond pulse lasers enables large-sized optics to be tested in nonsymmetric configurations with relatively small-sized reference surfaces. These two advantages are verified experimentally using Fizeau and Twyman-Green type scanning interferometers.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.669-670
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• 2006

Two-photon absorption coefficient of a series of dyes in polymer thin films was determined by measuring the femtosecond laser ablation threshold. The threshold value of polymeric thin films decreased gradually when the dopant increased. The two-photon absorption coefficient of the dye molecules dispersed in the polymer film was estimated by using the theoretical relationship between the ablation threshold of the blended polymeric thin films and the dye concentration. The relative values of two-photon absorption cross-section are in good agreement with those measured in solution. On the other hand, the absolute values are smaller than the latter.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.671-672
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• 2006

We have investigated the behavior of the ultrafast laser ablation of chromium films (200nm) on the silicon and pyrex-glass(corning 7740) substrate with respect to the laser fluence and the number of laser pulses. In addition, several experiments about ITO thin film were carried out with femto-second Ti:Sapphire laser (150fs). Finally, we introduce the ablation characteristic in accordance with materials of thin film and substrate.

• 한국레이저가공학회지
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• 제14권2호
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• pp.13-16
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• 2011

We fabricated the Fresnel zone plate using femtosecond laser lithography-assisted micro-machining, which is a combined process of nonlinear lithography and wet etching. We investigated the focusing properties by launching a 632.8nm wavelength He-Ne laser beam into the zone plate. The spot size of the primary focal point was $27{\mu}m$ and the intensity of focal point was 0.565W/$cm^2$.

• 한국정밀공학회지
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• 제27권2호
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• pp.29-33
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• 2010

We have investigated fs-laser ablation as well as optoperforation threshold of PDMS (Polydimethylsiloxane) thin lid cover on ${\mu}$-channel with changing the flow medium from water to hemoglobin. The ablation threshold is found to be independent of both PDMS thin film thickness and flow medium, but the optoperforation threshold is dependent on the films thickness. The observation that the ablation process is well described with simple two-temperature model supposed that the cover lid PDMS of $\mu$-channel be processed with minimized thermal effects by fs-laser with low laser fluence.

• 한국레이저가공학회지
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• 제15권2호
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• pp.1-5
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• 2012

Gelatin is used as a model for soft biological tissues in studying laser interaction with the soft tissues. In this work, we analyze the interaction between gelatin and excimer and Ti:Sapphire femtosecond laser under various conditions, especially by varying the laser, laser fluence and pulse number. The results show that swelling of the surface and ablation depth can be controlled by adjusting the process parameters.

• 한국광학회:학술대회논문집
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• 한국광학회 2001년도 제12회 정기총회 및 01년도 동계학술발표회
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• pp.242-243
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• 2001

고출력 펨토초 레이저 기술은 커렌즈 모드록킹 기술, Ti：sapphire 이득매질의 개발, chirped pulse amplification (CPA) 등의 도움으로 1980년대 후반부터 급속히 발전해 왔다. 생성된 펨토초 펄스의 시간적 특성을 정확히 알아내기 위한 방법들도 많이 연구되어 주파수 분해 괌게이팅(FROG)이나 주파수위상 간섭계(SPIDER) 등의 방법들이 기존의 자체상관계를 대체하게 되었다. 극초단 레이저 펄스는 넓은 스펙트럼을 갖고 첨두출력이 높기 때문에 매질이나 광학계를 지나면서 군지연분산, 자체위상변조 등의 효과에 의한 시간적 위상변화가 쉽게 생긴다. (중략)

• 한국정밀공학회지
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• 제27권6호
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• pp.7-16
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• 2010

Physical fundamentals of ultrashort femtosecond lasers are addressed along with emerging applications for precision manufacturing and metrology. Femtosecond lasers emit short pulses whose temporal width is in the range of less than a picosecond to a few femtoseconds, thereby enabling extremely high peak-power machining with less thermal damages. Besides, the broad spectral bandwidth of femtosecond lasers constructed in the form of frequency comb permits absolute distance measurements leading to ultraprecision positioning control and dimensional metrology.