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Unequal-path Low-coherence Interferometry Using Femtosecond Pulse Lasers for Surface-profile Metrology  

Oh, Jeong-Seok (한국기계연구원 지능기계연구센터)
Kim, Seung-Woo (한국과학기술원 기계공학과)
Publication Information
Journal of the Korean Society for Precision Engineering / v.23, no.9, 2006 , pp. 102-110 More about this Journal
Abstract
We discuss two possibilities of using femtosecond pulse lasers as a new interferometric light source for enhanced precision surface-profile metrology. First, a train of ultra-fast laser pulses yields repeated low temporal coherence, which allows unequal-path scanning interferometry, which is not feasible with white light. Second, the high spatial coherence of femtosecond pulse lasers enables large-sized optics to be tested in nonsymmetric configurations with relatively small-sized reference surfaces. These two advantages are verified experimentally using Fizeau and Twyman-Green type scanning interferometers.
Keywords
Femtosecond laser; Low-coherence interferometry; Scanning interferometry; Envelope peak; Fringe peak;
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Times Cited By KSCI : 1  (Citation Analysis)
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