• Title/Summary/Keyword: 펨토초레이저

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Time-resolved transient reflective image on silicon surface after single-shot fs-laser pulse irradiation (단일 펨토초 레이저펄스를 이용한 실리콘 표면에서의 시분해 반사율 측정 연구)

  • Moon, Heh-Young;Sidhu, Mehra Singh;Lee, Hyun-Kyu;Jeoung, Sae-Chae
    • Laser Solutions
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    • v.14 no.4
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    • pp.21-27
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    • 2011
  • In this work, we have studied on time-resolved transient reflective image of single crystalline Si surface after single-shot fs-laser irradiation with varying the laser fluence under two different laser spot sizes. The temporal profiles of transient reflectivity changes as well as its maximum values at the early delay time were found to be strongly dependent on both the laser beam spot size and laser fluence. We have interpreted the dependence of transient reflectivity changes on the laser spot size in terms of a relaxation of the generated free carriers to the bulk silicon, which should be interacted with the plasma.

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Absolute Distance Measurement using Synthetic Wavelength of Femto-second Laser (펨토초 레이저의 합성파를 이용한 절대거리 측정)

  • Kim Yun-Seok;Jin Jong-Han;Joo Ki-Nam;Kim Seung-Woo
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.569-572
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    • 2005
  • Technological feasibility of using recently-available femtosecond ultra short pulse lasers for advanced precision length metrology is investigated with emphasis on absolute distance measurements with $10{\mu}m$ ??resolution over extensive ranges. The idea of using femtosecond lasers for the measurement of absolute distances is based on the fact that a short pulse train is a mode-locked combination of discrete monochromatic light components spanning a wide spectral bandwidth. The synthetic wavelength is created from the repetition frequency, $f_r$ of the femtosecond laser and for more precise resolution, higher-order harmonics of the repetition frequency may be selected as the synthetic wavelength by using appropriate electronic filters.

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Porous Bio-degradable Nano-fiber Machining by Femtosecond Laser (다공성 친바이오 나노섬유 극초단 레이저 가공특성 연구)

  • Choi, Hae-Woon
    • Journal of the Korean Society for Precision Engineering
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    • v.29 no.3
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    • pp.339-345
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    • 2012
  • Electrospun meshed poly-caprolactone PCL was patterned by femtosecond laser with linear grooves. As parametric variables, focus spot size, pulse energy, and scanning speed were varied to determine the affects on groove size and the characteristics of the electrospun fiber at the edges of these grooves. The femtosecond laser was seen to be an effective means for flexibly structuring the surface of ES PCL scaffolds and the width of the ablated grooves was well controlled by laser energy and focus spot size. The ablation threshold was measured to be $14.9J/cm^2$ which is a little higher than other polymers. These affects were attributed to optical multiple reflections inside nano-fibers. By the laser-induced plasma at higher pulse energies, some melting of fibers was observed.

Femtosecond Laser Lithography for Maskless PR Patterning (펨토초 레이저를 이용한 미세 PR 패터닝)

  • Sohn, Ik-Bu;Ko, Myeong-Jin;Kim, Young Seop;Noh, Young-Chul
    • Journal of the Korean Society for Precision Engineering
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    • v.26 no.6
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    • pp.36-40
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    • 2009
  • Development of maskless lithography techniques can provide a potential solution for the photomask cost issue. Furthermore, it could open a market for small scale manufacturing applications. Since femtosecond lasers have been found suitable for processing of a wide range of materials with sub-micrometer resolution, it is attractive to use this technique for maskless lithography. As a femtosecond laser has recently been developed, both of high power and high photon density are easily obtained. The high photon density results in photopolymerization of photoresist whose absorption spectrum is shorter than that of the femtosecond laser. The maskless lithography using the two-photon absorption (TPA) makes micro structures. In this paper, we present a femtosecond laser direct write lithography for submicron PR patterning, which show great potential for future application.

Unequal-path Low-coherence Interferometry Using Femtosecond Pulse Lasers for Surface-profile Metrology (펨토초 레이저를 이용한 형상 측정용 비동일 광경로 저결 맞음 간섭계)

  • Oh, Jeong-Seok;Kim, Seung-Woo
    • Journal of the Korean Society for Precision Engineering
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    • v.23 no.9 s.186
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    • pp.102-110
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    • 2006
  • We discuss two possibilities of using femtosecond pulse lasers as a new interferometric light source for enhanced precision surface-profile metrology. First, a train of ultra-fast laser pulses yields repeated low temporal coherence, which allows unequal-path scanning interferometry, which is not feasible with white light. Second, the high spatial coherence of femtosecond pulse lasers enables large-sized optics to be tested in nonsymmetric configurations with relatively small-sized reference surfaces. These two advantages are verified experimentally using Fizeau and Twyman-Green type scanning interferometers.

Investigation on Femtosecond Laser Processing of Polymeric Thin Films (펨토초 레이저를 이용한 폴리머 박막 재료 초미세 공정에 관한 연구)

  • Jeoung S.C.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2006.05a
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    • pp.669-670
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    • 2006
  • Two-photon absorption coefficient of a series of dyes in polymer thin films was determined by measuring the femtosecond laser ablation threshold. The threshold value of polymeric thin films decreased gradually when the dopant increased. The two-photon absorption coefficient of the dye molecules dispersed in the polymer film was estimated by using the theoretical relationship between the ablation threshold of the blended polymeric thin films and the dye concentration. The relative values of two-photon absorption cross-section are in good agreement with those measured in solution. On the other hand, the absolute values are smaller than the latter.

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fs-laser Ablation and Optoperforation Threshold for PDMS Thin Film on $\mu$-channel (미세 유체 상 PDMS 고분자 필름의 펨토초 레이저 어블레이션 및 천공 임계치 연구)

  • Woo, Suk-Yi;Sidhu, M.S.;Yoon, Tae-Oh;Jeoung, Sae-Chae;Park, Il-Hong
    • Journal of the Korean Society for Precision Engineering
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    • v.27 no.2
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    • pp.29-33
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    • 2010
  • We have investigated fs-laser ablation as well as optoperforation threshold of PDMS (Polydimethylsiloxane) thin lid cover on ${\mu}$-channel with changing the flow medium from water to hemoglobin. The ablation threshold is found to be independent of both PDMS thin film thickness and flow medium, but the optoperforation threshold is dependent on the films thickness. The observation that the ablation process is well described with simple two-temperature model supposed that the cover lid PDMS of $\mu$-channel be processed with minimized thermal effects by fs-laser with low laser fluence.

Frequency Stabilization of Femtosecond Lasers for Dimensional Metrology (거리 및 형상 측정을 위한 펨토초 레이저의 주파수 안정화)

  • Kim Young-Jin;Jin Jong-Han;Kim Seung-Woo
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.10a
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    • pp.188-191
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    • 2005
  • A common feature in various methods of optical interferometry for absolute distance measurements is the use of multiple monochromatic light components either in sequence or in parallel at the same time. Two or multiple wavelength synthesis has been studied though its performance is vulnerable to the frequency instability of the light source. Recently continuous frequency modulation is considered a promising method with availability of wide band tunable diode lasers, which also have frequency instability errors. We can lock frequencies of these third-party light sources to the modes of the femtosecond laser which is stabilized to the precision of the standard radio frequency. To this end, we have stabilized all the modes of the femtosecond laser to the atomic frequency standard by using powerful tools of frequency-domain laser stabilization.

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Unequal-path Low-coherence Interferometry Using Femtosecond Pulse Lasers (펨토초 레이저를 이용한 비동일 광경로 저결맞음 간섭계)

  • Oh J.S.;Kim S.W.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.10a
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    • pp.204-207
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    • 2005
  • We discuss two possibilities of using femtosecond pulse lasers as a new interferometric light source fer enhanced precision surface profile metrology. First, a train of ultra-fast laser pulses yields repeated low temporal coherence, which allows performing unequal-path scanning interferometry that is not feasible with white light. Second, high spatial coherence of femtosecond pulse lasers enables to test large size optics in non-symmetric configurations with relatively small size reference surfaces. These two advantages are verified experimentally using Fizeau and Twyman-Green type scanning interferometers.

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