• Title/Summary/Keyword: 투과광

Search Result 1,175, Processing Time 0.031 seconds

성막직전 기판 열처리가 롤투롤 스퍼터를 이용하여 성장시킨 터치 패널용 ITO 투명 전극의 특성 미치는 효과 연구

  • Kim, Dong-Ju;Kim, Bong-Seok;Kim, Han-Gi
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2010.02a
    • /
    • pp.416-416
    • /
    • 2010
  • 본 연구에서는 저가격, 대면적화를 위한 롤투롤 스퍼터를 설계&개발하고, 성막직전 PET 기판의 열처리 유무를 통한 ITO 박막을 성막 시킨 저항막 방식의 터치 패널용 투명 전극에 대하여 전기적, 광학적, 구조적, 표면적 특성을 분석하였다. 롤투롤 스퍼터는 degassing챔버와 스퍼터 챔버가 한 시스템에 구성되었고, Degassing 챔버는 좌우측의 Rewinder/Unwinder 롤러에 의해 감고 풀어지는 PET기판의 수분 및 가스를 중앙부에 위치한 히터를 통해 제거하며, 수분 제거 후 스퍼터 챔버로 옮겨진 1250 mm폭의 PET기판을 Unwinder/Rewinder 롤러에 장착하며, Unwinder 롤러로부터 풀려진 PET 기판은 guide 롤러를 거쳐 cooling drum과의 물리적 접촉에 의해 PET 기판의 냉각이 일어나게 된다. ITO 캐소드 전에 장착된 할로겐 히터 상부로 기판이 지나가면서 열처리가 진행되고 열처리 후 두 개의 ITO 캐소드 상부를 지나면서 연속적으로 ITO 박막이 PET 기판에 성막 되게 된다. ITO 박막의 주요 성막 변수인 DC Power, Ar/$O_2$ 가스 유량비, 기판의 속도는 최적으로 고정하고, 성막 직전 기판의 열처리에 유무에 따른 ITO박막의 필름을 각각 고온 챔버에서 $140^{\circ}C{\times}90min$ 동안 열처리를 통한 내열성 테스트를 진행하여 ITO 필름의 특성 향상을 비교 분석하였다. 분석을 위해 전기적 특성은 four-point probe로 측정했고, 투과도는 Nippon Denshoku사(社)의 COH-300A를 이용해 가시광(550nm)에서 분석했고, FE-SEM으로 ITO박막 의 표면 상태를 분석하였다. 또한 Bending Tester(Z-100)를 이용하여 기계적 안정성을 분석하였다. 성막직전 PET 기판의 열처리를 하지 않은 ITO박막은 고온의 챔버 에서 $140^{\circ}C{\times}90min$ 동안 내열성 테스트 후 면저항이 511($\omega/\Box$)에서 630($\omega/\Box$)으로 높아졌으나, 성막직전 열처리를 통한 ITO 박막인 경우에는 465($\omega/\Box$)에서 448($\omega/\Box$)로 안정화 되었고, 투과율은 성막직전 열처리를 통해 1%향상되어 89%를 보였고, 유연성 또한 보다 우수한 특성을 보였다. 표면 조도는 평균 0.416 nm의 낮은 값을 보였다. 이는 PET 기판의 degassing 공정 중 충분히 제거되지 않은 가스나 불순물을 성막직전 열처리 공정으로 충분히 제거하여 깨끗한 PET 기판 상에 ITO 박막을 성막시키고, 열처리시 기판에 주어진 열에너지에 의해 보다 밀도가 높은 ITO 박막이 성장했기 때문으로 사료 된다.

  • PDF

Zinc tin oxide 비정질 산화물 반도체 박막에 대한 Ga 도핑 영향

  • Kim, Hye-Ri;Kim, Dong-Ho;Lee, Geon-Hwan;Song, Pung-Geun
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2010.02a
    • /
    • pp.198-198
    • /
    • 2010
  • 산화물 반도체는 넓은 밴드갭을 가지고 있어 가시광에서 투명하며 높은 이동도로 디스플레이 구동 회로 집적에 유리하다. 또한 가격 및 공정 측면에서도 기존의 Si 기판 소자에 비해 여러 장점을 가지고 있어 차세대 디스플레이의 핵심 기술로 산화물반도체에 대한 관심이 높아지고 있다. 본 연구는 RF 동시 스퍼터링법을 이용하여 Zn-Sn-O 박막을 제조하고, 그 전기적, 광학적, 구조적 특성에 대해 조사하였다. 일정한 증착 온도($100^{\circ}C$)에서 ZnO와 $SnO_2$ 타켓의 인가 파워를 조절하여 Sn/(Zn+Sn) 성분비가 약 40~85%인 Zn-Sn-O 박막을 제조하였다. Sn 함량이 증가할수록 박막의 비저항은 약 $2{\times}10^{-1}$ (Sn 45%)에서 약 $2\;{\times}\;10^{-2}\;{\Omega}{\cdot}cm$ (Sn 67%)까지 감소하다가 다시 증가하는 경향을 보였다. 이 때 캐리어 농도는 $3\;{\times}\;10^{18}$에서 $4\;{\times}\;10^{19}\;cm^{-3}$으로 증가하였으며, 이동도는 11에서 $8\;cm^2/V{\cdot}s$로 약간 감소하였다. XRD분석결과, 제조된 모든 Zn-Sn-O 박막은 비정질 구조를 가짐을 확인하였다. 투과율은 박막 내 Sn함량 증가에 따라 감소하나 모든 시편이 약 70%이상의 투과도를 나타내었다. Zn-Sn-O 박막의 Ga 도핑 영향을 확인하기 위해 ZnO 타켓 대신 갈륨이 5.7 wt.% 도핑된 GZO 타켓을 사용하여 동일한 공정조건에서 박막을 제조하였다. Ga이 첨가된 Zn-Sn-O 박막은 구조적 특성과 광학적 특성에서는 큰 차이를 보이지 않았으나, 전기적 특성의 뚜렷한 변화가 관찰되었다. Sn 함량이 45%인 Zn-Sn-O 박막의 경우, 캐리어 농도가 $3.1\;{\times}\;10^{18}$에서 Ga 도핑 효과로 인해 $1.7\;{\times}\;10^{17}\;cm^{-3}$으로 크게 감소하고 이동도는 11에서 $20\;cm^2/V{\cdot}s$로 증가하였다. 따라서 본 연구는 Zn-Sn-O 비정질 박막에 Ga을 도핑함으로써 산화물 반도체재료로서 요구되는 물성을 만족시킬 수 있다는 가능성을 제시하였다.

  • PDF

A Detection Method of Fake Fingerprint in Optical Fingerprint Sensor (광학식 지문센서에서의 위조 지문 검출 방법)

  • Lee, Ji-Sun;Kim, Jae-Hwan;Chae, Jin-Seok;Lee, Byoung-Soo
    • Journal of Korea Multimedia Society
    • /
    • v.11 no.4
    • /
    • pp.492-503
    • /
    • 2008
  • With the recent development and increasing importance of personal identification systems, biometric technologies with less risk of loss or unauthorized use are being popularized rapidly. In particular, because of their high identification rate and convenience, fingerprint identification systems are being used much more commonly than other biometric systems such as iris recognition, face recognition and vein pattern recognition. However, a fingerprint identification system has the problem that artificially forged finger-prints can be used as input data. Thus, in order to solve this problem, the present study proposed a method for detecting forged fingerprints by measuring the degree of attenuation when the light from an optical fingerprint sensor passes through the finger and analyzing changes in the transmission of light over stages at fixed intervals. In order to prove improvement in the performance of the proposed system, we conducted an experiment that compared the system with an existing multi-sensor recognition system that measures also the temperature of fingerprint. According to the results of the experiment, the proposed system improved the forged fingerprint detection rate by around 32.6% and this suggests the possibility of solving the security problem in fingerprint identification systems.

  • PDF

A Study on the Property Change of the Transparent Film for Vehicle Cover according to Weathering Test (차량 덮개용 투명 필름 내후 시험에 따른 물성변화 연구)

  • Kim, Ji-Hoon;Kim, Byung-Soon
    • Journal of the Korea Academia-Industrial cooperation Society
    • /
    • v.20 no.8
    • /
    • pp.174-180
    • /
    • 2019
  • In this study, we evaluated and analyzed the properties of polymeric transparent films used in military vehicle covers according to weathering test. Two types of polymer films (Film A and Film B) that are mostly used for military vehicle covers were selected. The weathering treatment condition and tester are described in KS K 0706, and the following weathering times were tested: 0hour, 40hours, 160hours and 320 hours. The tensile strength, elongation and thermal decomposition behavior and optical characteristics were analyzed. The tensile strength tended to decrease - increase - decrease with increasing weathering treatment time in both transparent films. The thermal decomposition temperature gradually decreased. Regarding the optical property, the light transmittance decreased and the haze tended to increase. However, film A showed almost similar optical characteristics after 160-hour weathering treatment.

The Study on Improvement of Thermal Stress Breakage in Infrared Transmissive Glass for Aircraft Searchlight (항공기용 탐조등 적외선 투과 유리의 열응력 파손 현상 개선 연구)

  • Seo, Young-Jin;Jeong, Sang-Gyu
    • Journal of the Korea Academia-Industrial cooperation Society
    • /
    • v.19 no.11
    • /
    • pp.332-337
    • /
    • 2018
  • Aircraft searchlights are used in search or rescue missions when performing night missions, and provide infrared light to keep operations in concealment. During aircraft operation, the infrared ray transmission filter glass for generating infrared rays can break, resulting in problems such as loss of concealment ability and maintenance. In this paper, we describe the procedure for testing the operating conditions of the searchlight when the defect occurs and finding the cause of the defect. We also summarize various methods to improve the cause and process of making the improved filter prototype. In addition, we also describe the results of verifying the performance requirements of the searchlight. As a result of the test and verification, the damage of the filter was improved and the improved filter was applied to the aircraft.

Facile Synthesis of Gold Nanoparticles Using Tyrosine-Rich Peptide and Its Applications to Catalytic Reduction of 4-Nitrophenol (타이로신이 풍부한 펩타이드를 사용한 금 나노입자의 손쉬운 합성과 4-니트로페놀의 촉매 환원 응용)

  • Hur, Yun-Mi;Min, Kyoung-Ik
    • Applied Chemistry for Engineering
    • /
    • v.32 no.1
    • /
    • pp.15-19
    • /
    • 2021
  • In this study, we studied a facile method for the synthesis of stable and nearly spherical gold nanoparticles using a tyrosine-rich peptide, Tyr-Tyr-Gly-Tyr-Tyr (YYGYY), as both the reducing and capping agent. The peptide coated spherical and polycrystalline gold nanoparticles with diameters from 3 to 15 nm were successfully synthesized by varying the concentration of the peptide and metal precursor under UV irradiation. The nanoparticles were then characterized by transmission electron microscopy (TEM), UV-Vis spectroscopy, scanning transmission electron microscopy-energy dispersive X-ray spectroscopy (STEM-EDS), Fourier transform infrared spectroscopy (FT-IR), and X-ray diffraction (XRD). Furthermore, the catalytic activity of gold nanoparticles was confirmed by the reduction of 4-nitrophenol to 4-aminophenol, in which the catalytic reaction rate constant was 7.3 × 10-3 s-1.

Study of Lettuce Growth Characteristic on Selective Light Transmitting Filter Film Covered Greenhouse (선택적 광 투과에 따른 상추 생육특성)

  • Kang, D.H.;Hong, S.J.;Lee, J.W.;Kim, D.E.
    • Journal of Practical Agriculture & Fisheries Research
    • /
    • v.22 no.1
    • /
    • pp.55-63
    • /
    • 2020
  • This study aimed to investigate responses of plant growth and photosynthesis to different kinds of covering materials with selective light transmit for red leaf lettuce (Lactuca sativa L.). Experimental pot design was attached UV blocking filter, red filter, blue filter, and green filter. The kinds of covering materials showed significant results for plant growth especially control, UV blocking filter, and red filter. The photosynthetic rate and anthocyanin content of red leaf lettuce were higher in control and UV blocking filter than others. The quality of red leaf lettuce was low in red, green, and blue film treatments because of too low anthocyanin content.

Measurement of the Thickness and Refractive Index of a Thin Film Using a Double-slit Experiment (이중 슬릿 회절 실험을 이용한 박막의 두께와 굴절률 측정)

  • Kim, Hee Sung;Prak, Soobong;Kim, Deok Woo;Kim, Byoung Joo;Cha, Myoungsik
    • Korean Journal of Optics and Photonics
    • /
    • v.33 no.4
    • /
    • pp.159-166
    • /
    • 2022
  • We measured the thickness and refractive index of a thin film using a double-slit diffraction experiment. The amount of phase step in the transmitted light generated by the thin film on the transparent substrate was measured by analyzing the diffraction pattern from the double slits. Experiments were conducted not only in air but also in distilled water, to determine thickness and refractive index simultaneously. To verify the validity of this method, we compared our values for thickness and refractive index to those measured using the well-established waveguide-coupling method. The suggested method is expected to be applied as a new method to simultaneously measure the thickness and refractive index of thin films, along with existing methods.

Fabrication and Optical Properties of (3-mercaptopropyl) Trimethoxysilane (MPTMS)-assisted Silver Nanofilm on Various Substrates (다양한 투명 기판의 3-MPTMS 처리에 의한 은 나노 박막의 광 특성 변화 연구)

  • Hyunsung Choi;Seungjun Oh;Doyeon Kil;Taewon Goo;Young-Mi Bahk
    • Korean Journal of Optics and Photonics
    • /
    • v.34 no.6
    • /
    • pp.283-288
    • /
    • 2023
  • We investigate the optical and electrical properties of silver nanofilms deposited on transparent substrates such as quartz, sapphire, and slide glass treated with (3-mercaptopropyl) trimethoxysilane (MPTMS). The effect of MPTMS treatment on physical properties is studied through scanning electron microscope (SEM) images, UV-visible transmission, and current-voltage measurements. The SEM images show morphology change of the silver nanofilm, and the UV-visible transmission spectra reveal that the localized surface-plasmon resonance effect is reduced due to the morphology change. These results imply that the uniformity of silver nanofilm is improved by MPTMS treatment for various transparent substrates, resulting in a 100-fold decrease in the electrical resistance of the silver nanofilm.

An Ultra-thin IR Cut-off Filter Based on Nanostructures (나노구조 기반 초박형 적외선 차단 필터)

  • Hyundo Yang;Jong-Kwon Lee
    • Korean Journal of Optics and Photonics
    • /
    • v.35 no.1
    • /
    • pp.24-29
    • /
    • 2024
  • We propose a hyperbolic metastructure based on a nanopatterned metal (Ag)-dielectric (PDMS) multilayer and report on its performance in an infrared (IR) cut-off filter for imaging devices. By optimizing the size of the square-shaped Ag nanopattern and the thickness of PDMS surrounding the Ag nanopattern, the proposed IR cut-off filter blocks 99% of light in the 0.70-1.01 ㎛ wavelength band while maintaining a high transmittance of over 94% in the visible region. Here, the cut-off wavelength band starts at a region above the epsilon-near-zero wavelength of the hyperbolic metastructure and ends at the point where plasmonic absorption appears strongly. It is observed that transmittance in the wavelength region longer than the IR cut-off band increases again due to plasmonic coupling among horizontally adjacent Ag nanopatterns. This metastructure can improve the performance of IR-blocking filters as well as allow it to be manufactured ultra-thin, which is applicable to various planar optical elements and integrated optical components.