surface acoustic wave oscillator hymidity sensor using hexafluoropropene plasma thin film (헥사플루오르프로펜 플라즈마박막을 이용한 표면탄성파발진기 습도센서)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 1992.05a
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- pp.144-146
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- 1992