• 설비공학논문집
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• 제16권5호
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• pp.475-481
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• 2004

This paper presents a force model of the clean tube system, which was developed as a means of transferring air-floated wafers inside a closed tube filled with super clean air. The recovering force from the holes for floating wafers is modeled as a linear spring and thus the wafers motion is modeled as a mass-spring-damper system. The propelling forces are modeled as linear along with the wafer location. The paper also proposes a control method to emit and stop a wafer at the center of a control unit. It reveals the minimum value of the propelling force to leave from the control unit. In order to stop the wafer, it utilizes the exact time when the wafer arrives at the position to activate the propelling force. Experiments with the clean tube system built for the 12 inch wafer shows the validity of the proposed model and the algorithm.

• 기계저널
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• 제41권6호
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• pp.58-62
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• 2001

• 한국정밀공학회지
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• 제21권3호
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• pp.66-73
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• 2004

This paper presents wafer motion modeling of transfer unit in clean tube system, which was developed as a means for transferring the air-floated wafers inside the closed tube filled with the super clean airs. When the wafer is transferred in x direction with an initial velocity the motion along x direction can be modeled as a simple decaying motion due to viscous friction of the fluid. But, the motion in y direction is modeled as a mass-spring-damper system where the recovering force by air jets issued from the perforated is modeled as a linear spring. Experiments with a clean tube system built fur 12 wafer show the validity of the presented force and motion models.

• 설비공학논문집
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• 제16권9호
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• pp.820-827
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• 2004

The propulsion force acting on a wafer in an air levitation system was measured accurately and then, the corresponding force coefficient was determined. The theoretical propulsion force on the wafer bottom surface were obtained by CFD simulations and from these results the propulsion force coefficient was deduced. The transportation velocity of a wafer was estimated by using both experimental and numerical force coefficients, for various air velocity of nozzle injection. When the numerical results are compared to the experimental data, the numerical results agree well Quantitatively.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 추계학술대회 논문집
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• pp.605-606
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• 2006

• 대한화학회지
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• 제51권5호
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• pp.412-417
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• 2007

DNA를 고정한 탄소나노튜브 페이스트 전극으로 옥시테트라싸이클린 항생제의 분석조건을 연구하였다. 사각 파형 벗김 전압전류법과 순환 전압 전류법을 사용하여 최적조건에서 1-10 ngL?1의 정량 가능 범위에 도달하였다. 벗김법 0.1 mgL?1 농도에서 15번 반복 측정하여 0.068%의 상대표준편차였으며, 벗김법 최적 분석 조건에서 0.4 ngL?1의 검출 한계를 얻었다. 개발된 결과를 양식어류의 세포에서 응용하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.459-462
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• 2003

This paper presents a force model of the clean tube system, which was developed as a means for transferring the air-floated wafers inside the closed tube filled with the super clean air. The recovering force from the holes for floating wafers is modeled as a linear spring and thus the wafer motion is modeled as a mass-spring-damper system. The propelling forces are modeled as linear along with the wafer location. The paper also proposes the control method to emit and stop a wafer at the center of a control unit. It shows the minimum value of the propelling force to leave from the control unit. In order to stop the wafer, it utilizes the exact time when a wafer arrives at the position to activate the propelling force. Experiments with the clean tube system built for 12 inch wafer shows the validity of the proposed model and the algorithm.

• 제어로봇시스템학회논문지
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• 제12권11호
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• pp.1095-1101
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• 2006

The clean tube system was developed as a means of transferring air-floated wafers inside a closed tube filled with super clean air. This paper presents a wafer position sensing method in the clean tube system, where the photo proximity sensors are used. The first presented method uses the two positions sensed lately in order to compute the wafer center position. The next method uses the latest sensed position and the next latest position compensated with the information of the wafer velocity. The third method uses the kalman filter, which enable us to use all the previous sensing information. The simulation results are compared to show results of the presented method. In addition, the paper presents a control method to stop the wafer at the center of the unit in the clean tube system. The experimental clean tube system worked successfully with the applying the both presented methods of sensing and control.