• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.16 no.5
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• pp.475-481
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• 2004

This paper presents a force model of the clean tube system, which was developed as a means of transferring air-floated wafers inside a closed tube filled with super clean air. The recovering force from the holes for floating wafers is modeled as a linear spring and thus the wafers motion is modeled as a mass-spring-damper system. The propelling forces are modeled as linear along with the wafer location. The paper also proposes a control method to emit and stop a wafer at the center of a control unit. It reveals the minimum value of the propelling force to leave from the control unit. In order to stop the wafer, it utilizes the exact time when the wafer arrives at the position to activate the propelling force. Experiments with the clean tube system built for the 12 inch wafer shows the validity of the proposed model and the algorithm.

• Journal of the KSME
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• v.41 no.6
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• pp.58-62
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• 2001

• Journal of the Korean Society for Precision Engineering
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• v.21 no.3
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• pp.66-73
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• 2004

This paper presents wafer motion modeling of transfer unit in clean tube system, which was developed as a means for transferring the air-floated wafers inside the closed tube filled with the super clean airs. When the wafer is transferred in x direction with an initial velocity the motion along x direction can be modeled as a simple decaying motion due to viscous friction of the fluid. But, the motion in y direction is modeled as a mass-spring-damper system where the recovering force by air jets issued from the perforated is modeled as a linear spring. Experiments with a clean tube system built fur 12 wafer show the validity of the presented force and motion models.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.16 no.9
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• pp.820-827
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• 2004

The propulsion force acting on a wafer in an air levitation system was measured accurately and then, the corresponding force coefficient was determined. The theoretical propulsion force on the wafer bottom surface were obtained by CFD simulations and from these results the propulsion force coefficient was deduced. The transportation velocity of a wafer was estimated by using both experimental and numerical force coefficients, for various air velocity of nozzle injection. When the numerical results are compared to the experimental data, the numerical results agree well Quantitatively.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.605-606
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• 2006

• Journal of the Korean Chemical Society
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• v.51 no.5
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• pp.412-417
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• 2007

A simple prepared paste electrode (PE) of DNA immobilized on a carbon nanotube was utilized for monitoring the antibacterial agent oxytetracycline (OTC), using square-wave anodic stripping voltammetry (SWASV) and cyclic voltammetry (CV). Given these conditions, SWASV and CV working ranges were observed within 1-10 ngL-1 OTC. In the SWASV and CV for OTC concentrations of 0.1 mgL-1, the relative standard deviations (n=15) were 0.068 and 0.067, respectively. At the optimized condition, the detection limit was found to be 0.4 ngL-1 OTC. This method was applied to the hatchery fish tissue.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.459-462
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• 2003

This paper presents a force model of the clean tube system, which was developed as a means for transferring the air-floated wafers inside the closed tube filled with the super clean air. The recovering force from the holes for floating wafers is modeled as a linear spring and thus the wafer motion is modeled as a mass-spring-damper system. The propelling forces are modeled as linear along with the wafer location. The paper also proposes the control method to emit and stop a wafer at the center of a control unit. It shows the minimum value of the propelling force to leave from the control unit. In order to stop the wafer, it utilizes the exact time when a wafer arrives at the position to activate the propelling force. Experiments with the clean tube system built for 12 inch wafer shows the validity of the proposed model and the algorithm.

• Journal of Institute of Control, Robotics and Systems
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• v.12 no.11
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• pp.1095-1101
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• 2006

The clean tube system was developed as a means of transferring air-floated wafers inside a closed tube filled with super clean air. This paper presents a wafer position sensing method in the clean tube system, where the photo proximity sensors are used. The first presented method uses the two positions sensed lately in order to compute the wafer center position. The next method uses the latest sensed position and the next latest position compensated with the information of the wafer velocity. The third method uses the kalman filter, which enable us to use all the previous sensing information. The simulation results are compared to show results of the presented method. In addition, the paper presents a control method to stop the wafer at the center of the unit in the clean tube system. The experimental clean tube system worked successfully with the applying the both presented methods of sensing and control.