• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.37-41
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• 2002

Thermal characteristics of hydrostatic guideway is largely depended on the temperature of supplied oil. For improving the positioning accuracy of hydrostatic guideway, relationship between setting temperature of oil cooler and thermal characteristics is analyzed, and influence of thermal characteristics on positioning accuracy is also analyzed experimental1y in this paper. Laser scale which has 0.01 $\mu\textrm{m}$ of resolution is used as feed-back unit. From the experimental results, it is confirmed that positioning error and repeatability is minimize upto 0.21 $\mu\textrm{m}$ and 0.18 $\mu\textrm{m}$ when the temperature of supplied oil is setting equal to temperature of atmosphere, and also confirmed that thermal deformation, which occurs by the temperature deviation between table and rail or scale supporter, works as limit of repeatability in long time operation.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.8 no.3
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• pp.9-14
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• 1999

• Journal of the Korean Society for Precision Engineering
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• v.13 no.10
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• pp.88-93
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• 1996

The study was carried out development a pricision positioning apparatus, consisting of DG servo motor and piezoelectric actuatior. This system is composed of fine and coarse apparatus, measurement system and control system. Peezoelectric actuator is designed for fine positioning. Coarse positioning using lead screw is droved by DC servo motor. Control system output a signal from laser interfermeter and capacitive sensor to amplifer of DC servo motor and piezoelectric actuator after digital signal processing (DSP). Resolution of this apparatus measure with laser interferometer and microsense

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.05a
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• pp.613-614
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• 2012

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.05a
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• pp.621-622
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• 2012

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.131-132
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• 2006

This paper presents a micro-positioning platform based on the unique parallel mechanism recently developed by the authors. The platform has a meso-scale rectangular shape whose size is $20{\times}23m$. The stroke is 5 mm for both the x- and y-axis and 100 degrees for the ${\alpha}$-axis(the rotational axis along the x-axis). The platform is actuated by the three sets of two-stage linear actuators: a linear motor for rough positioning and a piezo actuator for fine positioning. The platform is already assembled. Experimental results of the positioning measurements and control performance are presented.

• Journal of the Korean Society for Precision Engineering
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• v.30 no.12
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• pp.1313-1320
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• 2013

An ultraprecision multi-axis machine tool has been designed and developed in our laboratory. The machine tool has four moving axes which are composed of three linear axes and one rotational axis. It has a gantry type structure and the Z-axis is on the X-axis and the C-axis, on which a workpiece is located, is inside the Y-axis. This paper shows control performance improving method and procedure for the ultra-precision positioning control of a hydrostatic bearing guided linear axis. Through improvements of electrical and mechanical components for the control system such as control electronics and oil pumping systems, the control disturbing noise is decreased. Also by the frequency domain analysis of control system those problem-making system components are identified and modified with analytical methods. The controller is analyzed and designed from frequency domain data and system information. In the experimental control results the nanometer order control result is successfully presented.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.539-542
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• 1997

We present a micro-positioning stage that has minimized geometrical error and can drive in the 4-axis. This stage divided into two parts: $Z\theta_x$ $\theta_y$, motion stage and$\theta_z$ motion stage. These stages are constructed in flexure hinges, piezoelectric actuators and displacement scnsors. The dynamic model for each stage is obtained and their FE (finite element) models are made. Using the Lagrange's equation, the motion of equation is found. Through the parametric analysis and FE analysis, sensitiv~ty of the design parameters is executed. Finally, fundamental frequencies, maximum stress, and displacement sensitivity for each stage are obtained. We expect that this micro-positioning stage be a useful micro-alignment device for various applications.

• Proceedings of the KIEE Conference
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• 2007.10a
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• pp.221-222
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• 2007

본 논문에서는 초정밀 위치 결정 시스템에서 보다 정확한 제어를 위한 새로운 제어기를 설계한다. 외란을 고려한 시스템의 경우, 환경이 달라질 때마다 측정 노이즈를 정확하게 알아내기란 쉽지 않다. 따라서 측정 장치의 정확성을 나타낼 수 있도록 칼만 필터추정기와 퍼지 이론을 이용하여 정확한 측정 오차값을 구한다. 이때, 파라미터 불확실성과 의란에 강인한 제어를 위해 슬라이딩 모드 제어기와 LQ 최적 제어기가 적용된다. 최종적으로, 제안된 제어기와 시간 최적 제어기의 성능비교를 통하여 보다 강인하고 안정된 성능개선을 증명한다.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.9 no.6
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• pp.164-169
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• 2000

Recently, High accuracy and precision are required in various industrial field especially, semiconductor manufacturing apparatus, Ultra precision positioning apparatus, Information field and so on. Positioning technology is a very important one among them. As such technology has been rapidly developed, this field needs the positioning accuracy as high as submicron. It is expected that the accuracy of 10nm and 1nm is required in precision work and ultra precision work field, respectively by the beginning of 2000s. High speed and low vibration are also needed. This work deals with the design method and control system of Ultra precision positioning apparatus. Control performance and stability analysis were performed in advance by modeling and designing the controller with Simulink.