Thermal Characteristics of Hydrostatic Guideway in Ultra Precision Positioning

초정밀위치결정을 위한 유정압안내면의 온도특성 분석

Thermal characteristics of hydrostatic guideway is largely depended on the temperature of supplied oil. For improving the positioning accuracy of hydrostatic guideway, relationship between setting temperature of oil cooler and thermal characteristics is analyzed, and influence of thermal characteristics on positioning accuracy is also analyzed experimental1y in this paper. Laser scale which has 0.01 $\mu\textrm{m}$ of resolution is used as feed-back unit. From the experimental results, it is confirmed that positioning error and repeatability is minimize upto 0.21 $\mu\textrm{m}$ and 0.18 $\mu\textrm{m}$ when the temperature of supplied oil is setting equal to temperature of atmosphere, and also confirmed that thermal deformation, which occurs by the temperature deviation between table and rail or scale supporter, works as limit of repeatability in long time operation.