• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.10a
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• pp.145-149
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• 2006

반도체의 고집적화와 LCD의 대형화로 인해 웨이퍼 및 LCD 검사용 스테이지의 성능 향상이 요구된다. 본 논문에서는 고속의 검사속도, 서브마이크론의 검사 정밀도, 그리고 대행정 구동을 위한 이중 서보 시스템을 제안하였다. 이중 서보 시스템은 선형모터로 구동되고 공기베어링으로 가이드 되는 조동 구동부와 보이스 코일 모터(VCM)로 구동되고 공기베어링으로 가이드 되는 미세 구동부로 구성된다. 검사 효율을 향상시키기 위한 고속 세틀링을 위한 제어기로서 시간 최적 제어 기법과 시간 지연 제어기를 결합한 모드 변경 제어기를 제안하고 이중 서보 시스템에 구현하여 성능을 평가하였다.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.25 no.1
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• pp.75-82
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• 2016

In this study, a cross-damped low vibration controller was developed to reduce vibration in ultra-precision dual stage driven by master/slave principle. In master-slave structure, the master stage leads the driving motion and the slave stage follows it so as to maintain a constant gap between two stages. In this structure, a small perturbation of master stage makes big oscillations in slave servoing stage, so a low damped master stage composed of voice coil motor makes a long vibration in settling area after driving motion profile. In this research, an effective feedback damping algorithm for increase the damping characteristics of the dual stage was developed. The designed velocity damping algorithm improves the system stability and reduces the settling time of the whole system. Simulation and experimental results show that the developed algorithm reduces settling time and improves the regulating performance.

• Proceedings of the KSR Conference
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• 2003.05a
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• pp.712-717
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• 2003

지능 재료를 이용한 디바이스는 자연계에 존재하는 생명체와 같이 내.외부 환경 변화에 대응하여 스스로 변하는 능동적 기능을 갖고 있기 때문에 시스템 성능의 극대화 및 유지비용의 최소화를 가져오게 된다. 이러한 지능재료 기술은 지난 10여년 전부터 연구되었는데 대표적인 웅용을 보면, 산업, 항공, 교통, 운송 분야의 능동 소음 및 반능동 진동제어; 복합 재료 손상위치 탐지시스템, 손상구조 건전성 평가시스템, 교량, 저장탱크, 건물, 유조선, 대형 구조물의 건전성 평가 시스템; 초정밀 직진 안내기구, 나노 스테이지, 절삭오차 보정용 엑츄에이터, 초음파 회전모터, 지능유압 서보밸브, 변형 거울 등의 모터/엑츄에이터; 자동차 엔진 성능제어, 흡배기구 압력측정, 가속도 센서, 자이로센서, 에어백 센서, 타이어 센서 등의 지능 MEMS/NEMS 센서; electronic article 정찰, 도서태그, 비접촉 항공 운송물 분류 및 보안시스템, 전자 운전자 식별시스템, 광섬유 건물 보안 시스템, 지능 신경망 형상 인식 시스템 등의 보안 시스템; 지능항공기 구조물, 인공위성안테나, 헬리콥터 회전익 등의 형상제어가 있다. 본 논문에서는 지능재료 기술을 정리하고 차세대 철도차량 기술에 지금까지 적용한 예를 소개하며 향후 적용할 수 있는 분야들을 가능성 및 실용성 면에서 소개하고자 한다.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.13 no.6
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• pp.15-22
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• 2014

With a conventional positioning apparatus, it is very difficult simultaneously to achieve desired driving ranges and precision levels at the sub-micrometer level. Generally, a lead screw and friction drive have been used as servo control systems. These have large driving ranges, and high-speed positioning is feasible. In this study, we present a global servo system controlled by a laser interferometer acting as a displacement measurement sensor for achieving positioning accuracy at the sub-micrometer level.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.12 no.3
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• pp.52-57
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• 2003

In this paper, stability of ultra precision cutting unit is analyzed and this unit is the kernel unit in ultra precision processing machine. According to alteration of shape and material about hinge, stability investigation is performed Through this stability investigation, trial and error is reduced in design and manufacture, at the same time, we are accumulated foundation data for unit control.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.10a
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• pp.198-202
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• 2002

In this paper, stability of ultra precisio unit is analyzed, this unit is the kernel unit precision processing machine. According alteration of shape and material about stability investigation is performed. Through this stability investigation, trial is reduced in design and manufacture, at the time, we are accumulated foundation data for control.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.7
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• pp.233-240
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• 2003

Recently, the world are preparing for new revolution, called as If (Information Technology), NT (Nano-Technology), and BT (Bio-Technology). NT can be applied to various fields such as semiconductor-micro technology. Ultra precision processing is required for NT in the field of mechanical engineering. Recently, together with radical advancement of electronic and photonics industry, necessity of ultra precision processing is on the increase for the manufacture of various kernel parts. Therefore, in this paper, stability of ultra precision cutting unit is investigated, this unit is the kernel unit in ultra precision processing machine. According to alteration of shape and material about hinge, stability investigation is performed. In this paper, hinge shapes of micro stage in UPCU(Ultra Precision Cutting Unit) are designed as two types, where, hinge shapes are composed of round and rectangularity. Elasticity and strength are analyzed about micro stage, according to hinge shapes, by FE analysis. Micro stage in ultra precision processing machine has to keep hinge shape under cutting condition with 3-component force (cutting component, axial component, radial component) and to reduce modification against cutting force. Then we investigated its elasticity and its strength against these conditions. Material of micro stage is generally used to duralumin with small thermal deformation. But, stability of micro stage is investigated, according to elasticity and strength due to various materials, by FE analysis. Where, Used materials are composed of aluminum of low strength and cooper of medium strength and spring steel of high strength. Through this stability investigation, trial and error is reduced in design and manufacture, at the same time, we are accumulated foundation data for unit control.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.8
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• pp.906-912
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• 2012

This paper presents the new method for a six-degree-of-freedom (DOF) motion measurement and those dynamic characterizations in an ultraprecision linear stage using angle sensor-implemented grating interferometry. It consists of a diffractive optical element, a corner cube, four separate two-dimensional position sensitive detectors, four photodiodes and auxiliary optics components. From the previous study, it was confirmed that the proposed optical system could measure a six-DOF motion error in a linear stage. In this article, six-DOF motion dynamic characteristics of the stage were investigated through the step response and with respect to the conditions with a different speed of a slide table. As a result, the natural frequency and damping ratio according to a six-DOF direction was obtained. Also, it was seen that the speed of slide table had an significant effect on a six-DOF displacement motion, especially, X, which was considered as the effect of friction mechanism and local elastic mechanical deformation in a slide guide.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.244-247
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• 2002

The performance of the precision micro-positioning 4-dof stage is presented. The compact design utilizes the monolithic mechanism to achieve the translation in the Z axis and rotation in the $\theta$ z, $\theta$ x and $\theta$ y axes with high stiffness and high damping. Hysteresis, nonlinearity, and drift of the piezoelectric effects are improved by incorporating the sensors in a feedback control. Experiments demonstrate that the micro-positioning stage is capable of 2nm resolution over the travel range of 25$\mu\textrm$ m in the Z axis, 0.0l7 $\mu\textrm$ rad resolution over the 170$\mu\textrm$ rad in the $\theta$ z and 0.011 $\mu\textrm$ rad resolution over the $\mu\textrm$ rad in the $\theta$ x and $\theta$ y axes. The cross-axis interferences among the axes are at a noise range. This stage is available for positioning error compensation of the XY stage with large stroke.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.993-998
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• 2002

Ultra precision processing technology is the field which is seriously protected its technology by advanced nations. Because of this reason, this technology is very difficult to supply for domestic companies, also domestic companies are revealed the limit of technology development by itself. And then, those are depend on the technology development of advanced nation, domestic companies are not conquer application step with already developed parts. Of course, some cases of its research are succeed. those are included element technology, system technology and so on, for development of ultra precision processing system. To conquer technology holding ultra precision processing accuracy of no level, active research are needed. In this paper, stability of ultra precision cutting unit is analyzed, this unit is the kernel unit in ultra precision processing machine. According to alteration of shape and material about hinge, stability investigation is performed Through this stability investigation, trial and error is reduced in design and manufacture, at the same time, we are accumulated foundation data for un it control.