Browse > Article
http://dx.doi.org/10.7735/ksmte.2016.25.1.75

Development of Low-Vibration Controller for Ultra-Precision Dual Stage  

Kang, Seok Il (Department of Mechanical System Design Eng., Seoul National University of Science & Technology)
Kim, Jung-Han (Department of Mechanical System Design Eng., Seoul National University of Science & Technology)
Publication Information
Journal of the Korean Society of Manufacturing Technology Engineers / v.25, no.1, 2016 , pp. 75-82 More about this Journal
Abstract
In this study, a cross-damped low vibration controller was developed to reduce vibration in ultra-precision dual stage driven by master/slave principle. In master-slave structure, the master stage leads the driving motion and the slave stage follows it so as to maintain a constant gap between two stages. In this structure, a small perturbation of master stage makes big oscillations in slave servoing stage, so a low damped master stage composed of voice coil motor makes a long vibration in settling area after driving motion profile. In this research, an effective feedback damping algorithm for increase the damping characteristics of the dual stage was developed. The designed velocity damping algorithm improves the system stability and reduces the settling time of the whole system. Simulation and experimental results show that the developed algorithm reduces settling time and improves the regulating performance.
Keywords
Dual stage; Low vibration; Velocity loop; Damping control; Master-slave;
Citations & Related Records
연도 인용수 순위
  • Reference
1 Yang, H. M., Chung, B. M., Ko, T. J., Lee, C., Park, J. K., 2009, Machining Characteristics of Milling Machine Using Dual-stage, Proceeding of the Spring Conference on the Korean Society of Manufacturing Technology Engineers, 20-25.
2 Lee, C., 2008, A Study on Improving Cutting Precision of the Micro Milling Machine by using the Dual-stage Feed Drive, A Thesis for a Master, Youngnam University, Republic of Korea.
3 Staroselsky, S., Stelson, K. A., 1988, Two-stage Actuation for Improved Accuracy of Contouring, American Control Conference, 127-132.
4 Butler, H., 2011, Position Control in Equipment (Applications of Control), IEEE Control Systems Magazine, 31:5 28-47.
5 Chen, X., Zhang S., Bao, X., Zhao, H. 2008, Master and Slave Control of a Dual-stage for Precision Positioning, Nano/Micro Engineered and Molecular Systems 3rd IEEE International Conference, 583-587.
6 Hou, B. J., Gao, J. S., Zhou, Y. F., 2012, The Development of an Ultra-precision Dual-stage Based on a Master-slave Control System, International conference on CDCIEM, 727-730.
7 Schroeck, S. J., Messner, W. C., McNab, R. J., 2001, On Compensator Design for Linear Time-invariant Dual-input Single-output Systems, IEEE/ASME Transactions on Mechatronics, 6:1 50-57.   DOI
8 Elfizy, A. T., Bone, G. M., Elbestawi, M. A., 2005, Design and Control of a Dual-stage Feed Drive, International Journal of Machine Tools and Manufacture, 45:2 153-165.   DOI
9 Kwon, S. J., Chung, W. K., Youm, Y. I., 2001, On the Coarse/Fine Dual-Stage Manipulators with Robust Perturbation Compensator, IEEE International Conference on Robotics and Automation, 1 121-126.