• 기계와재료
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• v.23 no.2
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• pp.48-53
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• 2011

나노 기술을 바이오 분야에 접목하면 기존의 샘플 재취 및 분석시간, 분석 환경 등의 한계를 극복하여 현장진단, 실시간 진단 등이 가능한 고기능 바이오센서 개발이 가능해진다. 나노와이어 기반 바이오센서는 합성과정에서 전자 특성을 쉽게 제어할 수 있고, 용액내에서 바이오 및 화학물질을 감지하는 성능이 탁월하여 빠른 응답시간, 고감도, 고선택성 등의 동작특성이 향상될 수 있고, 집적화된 센서소자구현이 가능하다. 나노 바이오센서는 의료 분야뿐만 아니라 환경, 시설유지, 에너지관리, 공업프로세스 등 다양한 응용분야를 가지고 있다, 본 논문에서는 여러 나노 구조체 중에서도 전기화학 증착방법을 이용한 나노와이어의 기술적 특징과 합성방법, 전기적 센싱 시스템에 대해서 알아보고, 앞으로 개선되어야 할 사항들에 대해서 살펴보았다.

• JOURNAL OF ELECTRICAL WORLD
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• s.323
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• pp.69-75
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• 2003

불투명한 경제정세의 와중에서도 전기에너지를 지탱하는 근간이 되는 파워 일렉트로닉스 분야는 확실히 그 기술개발을 향상시켜 오고 있다. 특히 파워디바이스는, 지구환경과 생활환경을 보다 쾌적하게 하기 위하여 인버터 장치 등의 각종 전력절약기기와 풍력$\cdot$태양광$\cdot$연료전지 등 클린에너지의 전력제어장치에 없어서는 안되는 반도체디바이스로 성장했다. 파워디바이스 중에서도 IGBT(Insulated Gate Bipolar Transistor)의 기술혁신은 요 20년 사이에 비약적인 성과를 거두었다. 1980년대에 제품화된 IGBT는, 반도체메모리의 초미세가공기술을 도입하면서 $5{\mu}m$에서 서브미크론의 디자인툴로 발전하여, 2000년대에 들어 칩의 전류밀도는 약 2배, 포화전압은 약 $65\%$까지 개량되었다. 이와 같은 IGBT의 변천은, 전력손실을 대폭적으로 저감시켜 에너지절약기기의 전력변환효율 향상에 공헌하고 있다. 파워디바이스의 기술진보에서 또 한 가지 잊지 말아야 할 것은 주변회로의 집적화(集積化)에 의한 고성능$\cdot$고기능화이다. 최근의 인버터용 파워디바이스로 가장 많이 사용되고 있는 파워모듈은, IGBT등의 파워칩과 그 주변회로와의 컬래버레이션에 의한 제품이다. 다시 말하면 구동회로, 전류$\cdot$전압$\cdot$온도센서 및 그것들의 보호회로가 IC(집적회로)에 편입되어 고기능$\cdot$소형화를 촉진시키고 있다. 구동회로는 LVIC (저전압집적회로)에서 HVIC(고전압집적회로)로 발전하여 전류$\cdot$온도 등의 각종 센서도 동일 칩에 설계할 수 있게 되었다. 또 센싱이나 보호기능뿐만이 아니라 출력전류의 제어를 위한 연산기능과 di/dt의 제어기능이 내장되도록 되어 있어 보다. 고성능의 인텔리전트 파워모듈(IPM)이라고 불리우는 새로운 개념의 파워디바이스가 실현되었다. 또한 패키지 기술도 내부배선 인덕턴스의 저감과 트랜스퍼 몰드패키지의 개발로, 소형화뿐만이 아니라 파워칩의 성능$\cdot$기능을 충분히 발휘할 수 있도록 개발이 적극적으로 추진되고 있다.

• Journal of Sensor Science and Technology
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• v.30 no.3
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• pp.131-138
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• 2021

The optimization of the specifications of vertical silicon on insulator (SOI) slot optical waveguides suitable for integrated-optical biochemical sensors was performed through computational analysis of the confinement factor of the guided mode distributed in the slot in addition to analytical examination of the TE mode. The optimized specifications were confirmed based on sensitivity in terms of the change in the refractive index of the biochemical analyte. When the slot width, rail width, and height were set to 120 nm, 200 nm, and 320 nm, respectively, the confinement factor was evaluated to be about 56% and the sensitivity was at least 0.9 [RIU/nm].

• Journal of Sensor Science and Technology
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• v.31 no.2
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• pp.107-114
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• 2022

The effects of ring radius and coupling spacing on the free spectral range (FSR), full width at half maximum (FWHM), quality factor, and sensitivity of single-channel and add-drop channel slot ring resonators were systematically investigated using FIMMPROP and PICWAVE numerical software. The single-channel ring resonator exhibited better characteristics, namely, a wider FSR and narrower FWHM compared with the add-drop structure; thus, it was evaluated to be more suitable for biochemical sensors. The FSR, FWHM, quality factor, and sensitivity for a single channel ring resonator with a radius of 59.4 ㎛ and coupling gap of 0.5 ㎛ were 2.4 nm, 0.087 nm, 17677, and 550 [nm/RIU], respectively.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.11
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• pp.1164-1169
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• 2012

This paper presents a study of an integrated infrared (IR) photo sensor for display application. We fabricated hydrogenated amorphous silicon thin film transistor (a-Si:H TFT) and hydrogenated amorphous silicon germanium thin film transistor (a-SiGe:H TFT) which were bottom gate structure. We investigated the dependence of a-SiGe:H TFT characteristics on incident wavelengths. We proposed photo sensor which responded to wavelengths of IR region. Proposed pixel circuit of photo sensor was consists of switch TFT and photo TFT, and one capacitor. We developed integrated photo sensor circuit and investigated the performance of the proposed sensor circuit according to the input wavelengths. The developed photo sensor circuit with a-SiGe:H TFT was suitable for IR.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.49 no.7
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• pp.1-9
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• 2012

In this paper, resistance temperature detector (RTD) integrated into the LED package is proposed in order to solve the temperature dependence of LED's optical properties. To measure the package temperature in real time, the RTD type temperature sensor having excellent accuracy and linearity between temperature change and resistance change was adopted. A stable metallic film is required for long term reliability and stability of the RTD type temperature sensor. Therefore, deposition and annealing condition for the film were determined. Based on the determined condition, the RTD type temperature sensor with the sensitivity of about $1.560{\Omega}/^{\circ}C$ was fabricated inside the LED package. In order to configurate the LED package system keeping the constant brightness regardless of the temperature, additional conversion circuit and control circuit boards were fabricated and added to the fabricated LED package. The proposed system was designed to compensate the light intensity caused by temperature change using the variable duty rate of driving current. As a result, the duty rate of PWM signal which is the output signal of the configurated system was changed with the temperature change, and the duty rate was similarly varied with the target duty rate. Consequently, it was focused the fabricated RTD can be used for compensating the optical properties of LED and the LED package which exhibits constant brightness regardless of the temperature change.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.48 no.12
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• pp.15-22
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• 2011

Integrated-optic symmetric/asymmetric Mach-Zehnder interferometers at $1.3{\mu}m$ wavelength were studied as sensing part for electric-field measurement system. The devices were simulated based on the BPM software and fabricated utilizing Ti-diffused $LiNbO_3$ channel optical waveguides and lumped-type electrodes. A half-wave voltage of $V_{\pi}$=6.6V and modulation depth of 100% and 75% for a symmetric structure were measured for 200Hz and 1kHz electrical signal bandwidth, respectively. By the way, almost half-maximum power transmission was observed for asymmetric interferometers with ${\pi}$/2 intrinsic phase difference. Expected experimental measurements were observed for 1kHz electrical signal bandwidth.

• Journal of the Institute of Electronics and Information Engineers
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• v.49 no.10
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• pp.128-134
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• 2012

The performance evaluation and fabrication of integrated-optic electric-field sensor utilizing $Ti:LiNbO_3$ asymmetric Mach-Zehnder intensity modulator with a push-pull lumped electrode and a plate-type probe antenna to measure an electric field strength is described. The modulator has a small device size of $46{\times}7{\times}1\;mm$ and operates at a wavelength $1.3{\mu}m$. The devices are simulated based on the BPM software and fabricated utilizing Ti-diffused $LiNbO_3$ channel optical waveguides. The minimum detectable electric field is 1.02 V/m and 6.91 V/m, corresponding to a dynamic range of ~35 dB and ~10 dB at the frequencies of 500 KHz and 5 MHz, respectively.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.12 no.1
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• pp.165-172
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• 2012

Integrated-optic asymmetric Mach-Zehnder interferometer at $1.3{\mu}m$ wavelength and segmented electrode structure were designed and fabricated as a sensing part for the electric-field measurement system. The device was simulated based on the BPM software and fabricated utilizing Ti-diffused $LiNbO_3$ channel optical waveguides and lumped-type electrodes. Almost half-maximum power transmission was observed for asymmetric interferometers with ${\pi}/2$ intrinsic phase difference. Expected experimental measurements were observed for 1KHz electrical signal bandwidth.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.23 no.5
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• pp.145-150
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• 2023

Non-uniform optical taper waveguides have been widely used as devices for high-efficiency mode coupling, as they are integrated with single-mode optical fibers or photonic crystal waveguides. In this paper, we present a new platform for chemical sensing and bio-sensing using optical taper waveguides with these characteristics. The principle of operation is based on the coupling efficiency and interference properties of optical directional coupler (DC) and multi-mode interference coupler (MMIC). First, the curvature characteristics of taper sections of DC and MMIC is explained, and the design specifications of optimized taper waveguide to increase waveguide sensitivity is selected. Next, the sensor response to the change in refractive index of sensing analyte is numerically analyzed. Numerical results show that as the length of couplers increases, the effective index per change in refractive index unit (RIU) of analyte increases, and that sensitivity can be tuned using taper DC and MMIC design techniques.