Browse > Article
http://dx.doi.org/10.46670/JSST.2021.30.3.131

Optimization of vertical SOI slot optical waveguide with confinement factor and sensitivity for integrated-optical biochemical sensors  

Jung, Hongsik (Dept. of Electronic & Electrical Fusion Engineering, College of Science and Technology, Hongik Unversity)
Publication Information
Journal of Sensor Science and Technology / v.30, no.3, 2021 , pp. 131-138 More about this Journal
Abstract
The optimization of the specifications of vertical silicon on insulator (SOI) slot optical waveguides suitable for integrated-optical biochemical sensors was performed through computational analysis of the confinement factor of the guided mode distributed in the slot in addition to analytical examination of the TE mode. The optimized specifications were confirmed based on sensitivity in terms of the change in the refractive index of the biochemical analyte. When the slot width, rail width, and height were set to 120 nm, 200 nm, and 320 nm, respectively, the confinement factor was evaluated to be about 56% and the sensitivity was at least 0.9 [RIU/nm].
Keywords
Slot optical waveguide; Integrated optical biochemical sensor; Label-free; Confinement factor; Sensitivity; Mode matching numerical analysis;
Citations & Related Records
연도 인용수 순위
  • Reference
1 C. Koos, P. Vorreau, T. Vallaitis, P. Dumon, W. Bogaerts, R. Baets, B. Esembeson, I. Biaggio, T. Michinobu, F. Diederich, W. Freude, and J. Leuthold, "All-optical high-speed signal processing with silicon-organic hybrid slot waveguides", Nat. Photonics., Vol. 3, No. 4, pp. 216-219, 2009.   DOI
2 Q. Liu, X. Tu, K. W. Kim, J. S. Kee, Y. Shin, K. Han, Y. J. Yoon, G. Q. Lo, and M. K. Park, "Highly sensitive Mach-Zehnder interferometer biosensor based on silicon nitride slot waveguide", Sens. Act. B: Chem., Vol. 188, pp. 681-683, 2013.   DOI
3 X. Fan, L. White, S. Shopova, H. Zhu, J. Suter, and Y. Sun, "Sensitive optical biosensors for unlabeled targets: A review", Anal. Chim. Acta,, Vol. 620, No. 1-2, pp. 8-26, 2008.   DOI
4 R. Chandrasekar, Z. J. Lapin, A. S. Nichols, R. M. Braun, and A. W. Fountain, "Photonic integrated circuits for Department of Defense-relevant chemical and biological sensing applications: state-of the-art and future outlooks", Opt. Eng., Vol. 58, No. 2, pp. 020901(1)-020901(12) 2019.
5 E. Luan, H. Shoman, D. M. Ratner, K. C. Cheung, and L. Chrostowski, "Silicon Photonics Biosensors Using Label-Free Detection", Sensors, Vol. 18, pp. 3519(1)-3519(42), 2018.   DOI
6 F. Brosinger, H. Freimuth, M. Lacher, W. Ehrfeld, E. Gedig, A. Katerkamp, F. Spener, and K. A. Cammann, "Label-free affinity sensor with compensation of unspecific protein interaction by a highly sensitive integrated optical Mach-Zehnder interferometer on silicon", Sens. Actuators B, Vol. 44, No. 1-3, pp. 350-355, 1997.   DOI
7 K. Worhoff, R. G. Heideman, A. Leinse, and M. Hoekman, "TriPlex: a versatile dielectric photonic platform", Adv. Opt. Tech., Vol. 4, No. 2, pp. 189-207, 2015.
8 T. Dar, J. Holma, B. M. Azizur Rahman, and M. Rajarajan, "Label-free slot- waveguide biosensor for the detection of DNA hybridization", Appl. Opt., Vol. 51, No. 34, pp. 8195-8202, 2012.   DOI
9 D. L. Blumental, R. Heidman, D. Geuzberoek, A. Leinse, and C. Roeloffzen, "Silicon Nitride in Silicon Photonics", Proc. IEEE., Vol. 106, pp. 2209-2231, 2018.   DOI
10 K. Zinoviev, A. B. Gonzalez-Guerrero, C. Dominguez, and L. M. Lechuga, "Integrated Bimodal Waveguide Interferometric Biosensor for Label-Free Analysis", J. Lightwave Technol., Vol. 29, No. 13, pp. 1926-1930, 2011.   DOI
11 V. R. Almeida, Q. Xu, C. A. Barrios, and M. Lipson, M. "Guiding and confining light in void nanostructure", Opt. Lett., Vol. 29, No. 11, pp. 2395-2398, 2004.
12 T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, "High-Q optical resonator in silicon-on-insulator-based slot waveguides", Appl. Phys. Lett., Vol. 86, No. 8, pp. 081101(1)-081101(3), 2005.   DOI
13 N. N. Feng, J. Michel, and L. C. Kimerling, "Optical Field Concentration in Low-Index Waveguides", IEEE J. Quant. Elec., Vol. 42, No. 9, pp. 883-888, 2006.   DOI
14 P. Steglich, "Silicon-on-Insulator Slot Waveguides: Theory and Applications in Electro-Optics and Optical sensing", IntechOpen, Chapt.10, pp. 188-210, 2018.
15 C. A. Barrios, "Optical Slot-Waveguide Based Biochemical Sensors", Sensors, Vol. 9, pp. 4751-4765, 2009.   DOI
16 M. Roussey, L. Ahmadi, S. Pelisset, M. Hayrinen, A. Bera, V. Kontturi, J. Laukkanen, I. Vartiainen, S. Honkanen, and M. Kuittinen, "Strip-loaded horizontal slot waveguide", Opt. Lett., Vol. 42, No. 2, pp. 211-214, 2017.   DOI
17 H. Zengzhi, Y. Zhang, C. Zeng, D. Li, M. S. Nisar, J. Yu, and J. Xia, "High Confinement Factor Ridge Slot Waveguide for Optical Sensing", IEEE Phot. Technol. Lett., Vol. 27, No. 22, pp. 2395-2398, 2015.   DOI
18 R. Singh and V. Priye, "Si3N4-SiO2 Based Curve Slot Waveguide for High Confinement Factor and Low Mode Effective Area along with Biosensing Application", Silicon, No. 1, 2021.
19 P. Munoz, G. Mico, L. A. Bru, D. Pastor, D. Perez, J. D. Domenech, J. Ferandez, R. Banos, B. Gargallo, R. Alemany, A. M. Sanchez, J. M. Cirere, R. Mas, and C. Dominguez, "Silicon Nitride Photonic Integration Platforms for Visible, Near-Infrared and Mid-Infrared Applications", Sensors, Vol. 17, No. 9, pp. 2088(1)-2088(25), 2017.   DOI
20 F. Prieto, B, Sepulveda, A. Calle, A. Llobera, C. Dominguez, A. Abad, A. Montoya, and L. M. Lechuga,", An integrated optical interferometric nanodevice based on silicon technology for biosensor applications," Nanotechnology, Vol. 14, pp. 907-912, 2003.   DOI
21 Photon Design Ltd., FIMMWAVE v6.6.0, Oxford, United Kingdom, 2018.
22 Y. Liu, M. Kong, and Y. Jiang, "Transverse magnetic modes in planar slot waveguides", J. Opti. Soci. B Am., Vol. 32, No. 10, pp. 2052-2060, 2015.   DOI
23 Y. Jiang, M. Kong, C. Liu, Y. Liu, and Y. Wang, "Transverse electric modes in planar slot waveguides", J. Modern Optics., Vol. 65, No. 1, pp. 111-118, 2018.   DOI
24 Y. Fan, S. Peng, and Y. Liu, "Transverse magnetic modes in hybrid nanoslot waveguides", Results Phys., Vol. 16, pp. 103017, 2020.   DOI
25 X. Li, Z. Zhang, S. Qin, T. Wang, F. Liu, M. Qiu, and Y, Su, "Sensitive label- free and compact biosensor based on concentric silicon-on-insulator microring resonators", Appl. Opt., Vol. 48, No. 25, pp. F90-F94, 2009.   DOI