센서학회지 (Journal of Sensor Science and Technology)

  • 제30권3호
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  • Pages.131-138
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  • 2021
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  • 1225-5475(pISSN)
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  • 2093-7563(eISSN)
한국센서학회 (The Korean Sensors Society)
권호 표지
DOI QR코드

DOI QR Code

구속계수와 감지도에 기반한 집적광학 바이오케미컬 센서에 적합한 수직 SOI 슬롯 광 도파로 최적화

Optimization of vertical SOI slot optical waveguide with confinement factor and sensitivity for integrated-optical biochemical sensors

  • 정홍식 (홍익대학교 전자전기융합공학과)
  • Jung, Hongsik (Dept. of Electronic & Electrical Fusion Engineering, College of Science and Technology, Hongik Unversity)
  • 투고 : 2021.04.20
  • 심사 : 2021.05.11
  • 발행 : 2021.05.31
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초록

The optimization of the specifications of vertical silicon on insulator (SOI) slot optical waveguides suitable for integrated-optical biochemical sensors was performed through computational analysis of the confinement factor of the guided mode distributed in the slot in addition to analytical examination of the TE mode. The optimized specifications were confirmed based on sensitivity in terms of the change in the refractive index of the biochemical analyte. When the slot width, rail width, and height were set to 120 nm, 200 nm, and 320 nm, respectively, the confinement factor was evaluated to be about 56% and the sensitivity was at least 0.9 [RIU/nm].

키워드

과제정보

이 논문은 한국연구재단 이공학개인기초연구 (2018-R1D1A1B07049908) 연구비 지원으로 수행되었습니다.

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