• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.374-374
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• 2014

의료용 X-ray는 과거 analog 방식과, 연구가 진행 중이며 현재 많이 사용되고 있는 digital 방식으로 나누어진다. 최근, 광도전체와 형광체 기반의 flat panel X-ray detector의 발전에 따른 상용화가 이루어지고 있으며, 많은 발전 가능성이 제기되고 있다. flat panel X-ray detector 검출방식은 direct method (직접 방식)와 indirect method (간접 방식)로 나누어진다. 본 연구는 일반적으로 상용화 되어있는 amorphous seleinum (비정질 셀레늄)의 큰 일함수에 의한 저 해상력이라는 단점을 보완하기 위해, 작은 일함수를 가지는 물질을 사용하여, 영상을 얻을 시에 높은 해상력으로 표현할 수 있도록 하고, 원자번호가 높은 물질을 사용하여 X-ray 흡수율을 높일 수 있도록 기존 direct method에 많이 사용되고 있는 amorphous seleinum 기반 digital X-ray detector가 아닌, 이러한 장점을 충족시킬 수 있는 PbI2 물질 층을 사용하여 시편을 제작 하였다. PbI2를 같은 두께로 올린 후, 물질 층 상부에 Au 전극 면적을 다른 size로 제작한 시편으로 X-ray에 노출 시켰다. 이는 상부 전극 size 차이에 따른 신호 차이를 측정하여 전기적 특성을 평가하기 위한 것이다. 전도성을 띠고 있는 ITO (Indium - Tin - Oxide) glass를 이용하여 screen printing 방법으로 제작하였다. PbI2층을 약 160~180 um두께, $3cm{\times}3cm$ size로 5개 제작하였으며, 상부 전극으로는 Au를 진공 증착 시켰다. 상부 전극 size는 각각 시편 5개에 $0.5cm{\times}0.5cm$, $1cm{\times}1cm$, $1.5cm{\times}1.5cm$, $2cm{\times}2cm$, $2.5cm{\times}2.5cm$로 PbI2 물질 층 중앙에 증착 시켰다. 이러한 설정으로 X-ray 노출 시 관찰할 수 있는 PbI2의 전기적인 특성을 평가할 수 있었다. 관전압을 40 kVp, 60 kVp, 80 kVp, 100 kVp, 120 kVp, 140 kVp로 설정하고, 관전류는 100 mA로 설정하였으며, Dark current, Sensitivity를 측정하였다. Dark current와 Sensitivity를 측정한 뒤, 그 값을 이용하여 SNR (신호 대 잡음 비)값을 구해보았다.실험 결과 단위면적당 signal과 SNR을 분석할 수 있었다. 80 kVp로 기준을 잡고 결과 값을 보면 $0.5cm{\times}0.5cm$ 시편에서 2.92 nC/cm2, $2.5cm{\times}2.5cm$ 시편에서 0.84 nC/cm2로 상부 전극 크기가 작을수록 더 좋은 신호를 측정할 수 있었다. 똑같은 기준에서 SNR을 계산 해 보았을 때, $0.5cm{\times}0.5cm$ 시편에서 6.46, $2.5cm{\times}2.5cm$ 시편에서 1.91로 SNR역시 상부 전극 크기가 작을수록 더 큰 값을 확인할 수 있었다. 이러한 결과는 edge-effect의 영향으로 인해 나온 결과라고 할 수 있다. 이러한 실험 결과, detector 제작 시, 같은 물질을 사용하여 더 높은 효율을 내기 위해서는 큰 size의 상부 전극 보다는 작은 size의 상부 전극을 증착 시키는 것이 전기적 특성을 더욱 효율적으로 평가할 수 있을 것이라고 사료된다.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.452-452
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• 2010

차세대 디스플레이로서 주목 받고 있는 유연성 정보표시 소자 개발에 대한 요구도가 날로 증대되고 있다. 유연성 정보표시 소자로서 플라스틱 기반 유연성 소자가 특히 주목 받고 있으나, 이의 실용화를 위해서는 플라스틱 기판에 적용 가능한 보호막 형성 기술 개발이 선행되어야 한다. 플라스틱 필름의 경우 높은 산소 및 수분 투과율 때문에 유연성 디스플레이의 응용에 걸림돌이 되고 있다. 플라스틱 기반 유연성 소자의 장수명화를 위해서는 수분과 산소의 투과를 방지하는 passivation layer 형성 기술이 필수적으로 요구된다. 본 연구에서는, polyethylene terephethalate (PET) 기판상에 증착된 $SiO_x$ 보호막의 합성에 있어서 중간층 유무에 따른 투습특성의 변화를 살펴보았다. 기화된 HMDSO (Hexamethyldisiloxane)와 Ar 및 $O_2$ 혼합기체를 이용하여 PECVD 방법으로 $SiO_x$ 박막을 합성하였다. 15 nm 두께의 $Al_2O_3$를 중간층으로 사용하여 중간층 유무에 따른 초기성장 거동 변화가 $SiO_x$ 박막의 투습 특성에 미치는 영향을 조사하였다. $SiO_x$ 박막 구조와 화학적 조성은 각각 FE-SEM과 FT-IR을 이용하여 분석하였으며, AFM을 이용하여 $SiO_x$ 박막 표면 미세 형상을 관찰하였다. 투습률은 MOCON사(社)의 Permatran-W 3/33 MA을 이용하여 측정하였다. 그리고 반복 굽힘 시험기를 이용하여 $SiO_x$ 보호막의 동적 투습 특성을 조사하였다. $Al_2O_3$ 중간층 유무에 따라 $SiO_x$ 박막의 투습률 (WVTR; water vapor transmission rate)은 ${\sim}10^{-1}g/m^2/day$(300 nm-thick $SiO_x$/PET)에서 ${\sim}5{\times}10^{-3}g/m^2/day$(300 nm-thick $SiO_x$/15 nm-thick $Al_2O_3$/PET)으로 변화하였다. 300 nm-thick $SiO_x$/15 nm-thick $Al_2O_3$/PET 시편의 경우 곡지름 50 mm에서 1,000회 반복 굽힘 후에도 투습률 변화를 보이지 않았다. 이와 같은 $SiO_x$ 박막의 투습 특성 변화는 $Al_2O_3$ 중간층 유무에 따른 초기 성장 거동의 변화로 해석된다. FE-SEM 및 AFM 표면 미세 구조 관찰을 통한 초기 성장 거동 변화 조사 결과, $Al_2O_3$ 중간층 없이 PET 기판위에 $SiO_x$ 박막 증착한 경우 3 차원 성장을 하는 반면, PET기판위에 $Al_2O_3$ 중간층 형성 후 $SiO_x$ 박막 증착하는 경우 2 차원 성장을 하게 됨을 관찰하였다. 따라서 본 연구를 통하여, 플라스틱 기반 유연성 표시 소자에 적용하기 위한 $SiO_x$ 보호막 합성 에 있어서 초기 성장 거동의 변화가 투습 특성에 민감한 영향을 미침을 알 수 있었다.

• Journal of the Microelectronics and Packaging Society
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• v.30 no.4
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• pp.8-16
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• 2023

The importance of next-generation packaging technologies is being emphasized as a solution as the miniaturization of devices reaches its limits. To address the bottleneck issue, there is an increasing need for 2.5D and 3D interconnect pitches. This aims to minimize signal delays while meeting requirements such as small size, low power consumption, and a high number of I/Os. Hybrid bonding technology is gaining attention as an alternative to conventional solder bumps due to their limitations such as miniaturization constraints and reliability issues in high-temperature processes. Recently, there has been active research conducted on SiCN to address and enhance the limitations of the Cu/SiO₂ structure. This paper introduces the advantages of Cu/SiCN over the Cu/SiO₂ structure, taking into account various deposition conditions including precursor, deposition temperature, and substrate temperature. Additionally, it provides insights into the core mechanisms of SiCN, such as the role of Dangling bonds and OH groups, and the effects of plasma surface treatment, which explain the differences from SiO₂. Through this discussion, we aim to ultimately present the achievable advantages of applying the Cu/SiCN hybrid bonding structure.

• Journal of the Microelectronics and Packaging Society
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• v.23 no.1
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• pp.17-22
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• 2016

Flexible organic light-emitting diode (OLED) devices consist of multi-stacked thin films or layers comprising organic and inorganic materials. Due to thermal coefficient mismatch of the multi-layer films, warpage of the flexible OLED is generated during high temperature process of each layer. This warpage will create the critical issues for next production process, consequently lowering the production yield and reliability of the flexible OLED. In this study, we investigate the warpage behavior of the flexible OLED for each bonding process step of the multi-layer films using the experimental and numerical analysis. It is found that the polarizer film and barrier film show significant impact on warpage of flexible OLED, while the impact of the OCA film on warpage is negligible. The material that has the most dominant impact on the warpage is a plastic cover. In order to minimize the warpage of the flexible OLED, we estimate the optimal material properties of the plastic cover using design of experiment. It is found that the warpage of the flexible OLED is reduced to less than 1 mm using a cover plastic of optimized properties which are the elastic modulus of 4.2 GPa and thermal expansion coefficient of $20ppm/^{\circ}C$.

• Applied Chemistry for Engineering
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• v.24 no.3
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• pp.219-226
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• 2013

Organic semiconductor-based soft electronics has potential advantages for next-generation electronics and displays, which request mobile convenience, flexibility, light-weight, large area, etc. Organic field-effect transistors (OFET) are core elements for soft electronic applications, such as e-paper, e-book, smart card, RFID tag, photovoltaics, portable computer, sensor, memory, etc. An optimal multi-layered structure of organic semiconductor, insulator, and electrodes is required to achieve high-performance OFET. Since most organic semiconductors are self-assembled structures with weak van der Waals forces during film formation, their crystalline structures and orientation are significantly affected by environmental conditions, specifically, substrate properties of surface energy and roughness, changing the corresponding OFET. Organo-compatible insulators and surface treatments can induce the crystal structure and orientation of solution- or vacuum-processable organic semiconductors preferential to the charge-carrier transport in OFET.

• Korean Journal of Food Science and Technology
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• v.32 no.2
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• pp.317-322
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• 2000

This study examined the effect of nitrogen$(N_2)$ gas packing and ${\gamma}-oryzanol$ treatment on the shelf life of Yukwa(Korean traditional snack). Yukwa were stored with $N_2$ gas packing(AN), $N_2$ gas packing with ${\gamma}-oryzanol$ treatment(ANA), and PE film packing with air(PE) for 20 days at $60^{\circ}C$. They were evaluated by POV, AV, conjugated diene, hexanal, color and sensory characteristics. The POV, AV and conjugated diene content increased abruptly in PE and AN, but increased slowly in ANA with prolonged storage. Higher sensory scores for Yukwa were found in ANA as compared to those in PE and AN. Hexanal content, yellowness and redness in AN were higher than those in ANA and PE. The moisture content, which is supposed to be related with browning of Yukwa, was 3 times higher in AN than that in PE. Oxygen content of each Yukwa pack, even in $N_2$ gas packing, increased remarkably as storage period increased because their highly porous, fragile and syrup-coated structure resulted in incomplete degassing before $N_2$ gas was flushed into package. Consequently, $N_2$ gas packing was inefficient, but $N_2$ gas packing combined with antioxidant(such as ${\gamma}-oryzanol$) treatment was effective for the extension of shelf life of Yukwa.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.23 no.1
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• pp.78-84
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• 2009

In this paper, ZnO:Al thin film was deposited on polyethylene terephthalate(PET) substrate by capacitively coupled r. f. magnetron sputtering method from a ZnO target mixed with 2wt[%] Al2O3 to investigate the possible application of ZnO:Al film as a transparent conducting electrode for film typed DSCs. The effect of substrate bias on the electrical properties and film structure were studied. The results showed that a positive bias applied to the substrate during sputtering contributed to an improvement of electrical properties of the film by attracting electrons in the plasma to bombard the growing films. These bombardments provided additional energy to the growing ZnO:Al film on the substrate, resulting in significant variations in film structure and electrical properties. Electrical resistivity of the film decreases significantly as the positive bias increases up to +30[V] However, as the positive bias increases over +30[V], the resistivity decreases. The transmittance varies little as the substrate bias is increased from 0 to +60[V], and as r. f. powers increases from 160[W] to 240[W]. The film with electrical resistivity as low as $1.8{\times}10^{-3}[{\Omega}-cm]$ and optical transmittance of about 87.8[%] were obtained for 1,012[nm] thick film deposited with a substrate bias of +30[V].

• Korean Journal of Optics and Photonics
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• v.21 no.1
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• pp.33-37
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• 2010

We performed time-domain terahertz (THz) spectroscopy to determine optical constants of highly conductive carbon nanotube (CNT) films. The CNT films have been fabricated on a flexible plastic substrate by using spin-coating or vacuum filtration. We found that the transmission of THz waves can be controlled by manipulating the thickness of the films and by post-treatments. From amplitude and phase information of the transmitted THz waves, we obtain optical constants such as refractive indices and dielectric constants of the CNT films. The frequency dependent dielectric constants show good metallic behaviors, relevant to the Drude free electron models with high plasma frequencies. It is also found that the dielectric constants are higher for the acid-treated films. Finally, the frequency dependent dielectric constants which are free from substrate effects have been demonstrated by using CNT films deposited on cellulose membranes.

• Applied Chemistry for Engineering
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• v.33 no.1
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• pp.50-57
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• 2022

Ti-In-Zn-O (TIZO)/Ag/TIZO multilayer transparent electrodes were prepared on glass substrates at room temperature using RF/DC magnetron sputtering. Obtained multilayer structure comprising TIZO/Ag/TIZO (10 nm/10 nm/40 nm) with the total thickness of 60 nm showed a transmittance of 86.5% at 650 nm and a sheet resistance of 8.1 Ω/□. The multilayer films were expected to be applicable for use in energy-saving smart window based on polymer-dispersed liquid crystal (PDLC) because of their transmittance properties to effectively block infrared rays (heat rays). We investigated the effects of the content ratio of prepolymer, the thickness of the PDLC coating layer, and the ultraviolet (UV) light intensity on electro-optical properties, and the surface morphology of polyester acrylate-based PDLC systems using new TIZO/Ag/TIZO transparent conducting electrodes. A PDLC cell with a thickness of 15 ㎛ PDLC layer photocured at an UV intensity of 1.5 mW/cm² exhibited good driving voltage, favorable on-state transmittance, and excellent off-haze. The LC droplets formed on the surface of the polymer matrix of the PDLC composite had a size range of 1 to 3 ㎛ capable of efficiently scattering incident light. Also, the PDLC-based smart window manufactured using TIZO/Ag/TIZO multi-layered transparent electrodes in this study exhibited a light brown, which will have an advantage in terms of aesthetics.

• Journal of the Korean institute of surface engineering
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• v.48 no.2
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• pp.50-55
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• 2015

$Al_2O_3$ thin films were deposited on the moth eye anti-reflective nanostructured polycarbonate films by atomic layer deposition (ALD) techniques. Without ALD-$Al_2O_3$ thin films, moth eye anti-reflective nanostructured films had a high optical transmittance of 95.47% at a wavelength of 550 nm and a very poor hardness of 0.1381 GPa. With increasing the thickness of $Al_2O_3$ thin films from 5 to 25 nm, the transmittance of moth eye anti-reflective nanostructured films was gradually decreased from 94.94 to 93.12%. On the other hand, the hardness of the films was greatly increased from 0.3498 to 0.7806 GPa with increasing the thickness of $Al_2O_3$ thin films. This result shows that ALD thin films can be applied to improve mechanical properties with an adequate optical transmittance of the conventional moth eye anti-reflection nanostructure films.