Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Effect of Atomic Layer Deposited Al2O3 Thin Films on the Mechanical Properties of Anti-reflective Moth Eye Nanostructured Films

원자층 증착법에 의한 Al2O3 박막 형성에 따른 모스아이 구조 반사방지 필름의 기계적 물성에 미치는 영향

  • Yun, Eun Young (School of Materials Science and Engineering, Pusan National University) ;
  • Lee, Woo-Jae (School of Materials Science and Engineering, Pusan National University) ;
  • Jang, Kyung Su (Nano Convergence Team, Seo Yeong Co. Ltd.) ;
  • Choi, Hyun-Jin (MEMS/NANO Component Production Center) ;
  • Choi, Woo-Chang (MEMS/NANO Component Production Center) ;
  • Kwon, Se Hun (School of Materials Science and Engineering, Pusan National University)
  • 윤은영 (부산대학교, 재료공학부) ;
  • 이우재 (부산대학교, 재료공학부) ;
  • 장경수 ((주)서영, 나노융합사업팀) ;
  • 최현진 (부산테크노파크, 멤스나노부품생산센터) ;
  • 최우창 (부산테크노파크, 멤스나노부품생산센터) ;
  • 권세훈 (부산대학교, 재료공학부)
  • Received : 2015.03.06
  • Accepted : 2015.04.22
  • Published : 2015.04.30
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Abstract

$Al_2O_3$ thin films were deposited on the moth eye anti-reflective nanostructured polycarbonate films by atomic layer deposition (ALD) techniques. Without ALD-$Al_2O_3$ thin films, moth eye anti-reflective nanostructured films had a high optical transmittance of 95.47% at a wavelength of 550 nm and a very poor hardness of 0.1381 GPa. With increasing the thickness of $Al_2O_3$ thin films from 5 to 25 nm, the transmittance of moth eye anti-reflective nanostructured films was gradually decreased from 94.94 to 93.12%. On the other hand, the hardness of the films was greatly increased from 0.3498 to 0.7806 GPa with increasing the thickness of $Al_2O_3$ thin films. This result shows that ALD thin films can be applied to improve mechanical properties with an adequate optical transmittance of the conventional moth eye anti-reflection nanostructure films.

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References

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