Effect of Atomic Layer Deposited Al2O3 Thin Films on the Mechanical Properties of Anti-reflective Moth Eye Nanostructured Films
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Yun, Eun Young
(School of Materials Science and Engineering, Pusan National University)
Lee, Woo-Jae (School of Materials Science and Engineering, Pusan National University) Jang, Kyung Su (Nano Convergence Team, Seo Yeong Co. Ltd.) Choi, Hyun-Jin (MEMS/NANO Component Production Center) Choi, Woo-Chang (MEMS/NANO Component Production Center) Kwon, Se Hun (School of Materials Science and Engineering, Pusan National University) |
1 | M. Onodera, H. Matsuda, H Mori, and T. Ito : SID. Int. Symp. Dig. Tec, 25 (1994) 823. |
2 | T. Kawamura, H. Kawamura, and K. Kobara : SID. Int. Symp. Dig. Tec, 91 (1991) 49. |
3 | L. C. Klein : "Sol-Gel Technology for Thin Films, Fibers, Preforms, Electronics, and Specialty Shapes", Noyes Publications, New Jersey, (1988) 49. |
4 | F. C. Stedile, and B. A. S. De Barros Jr : Thin Solid Films, 170 (1989) 285. DOI |
5 | Y. F. Huanng, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen : Nat. Nanotechnol, 2 (2007) 770. DOI ScienceOn |
6 | B. J. Bae, S. H. Hong, S. U. Kwak, and H. Lee : J. Kor. Inst. Surf. Eng. 42 (2009) 59. DOI ScienceOn |
7 | D. W. Yun, Y. S. Son, J. H. Kyung, H. C. Park, S. H. Lee, and B. I. Kim : KSPE Spring Conference, (2012) 95. |
8 | M. Heckele, W. Bacher, and K. Muller : Sens. Actuators. A-Phys, 83 (2000) 130. DOI |
9 | V. Miikkulainen, M. Leskela, M. Ritala, and R. L. Puurunen : J. Appl. Phys, 113 (2013) 021301. DOI |
10 | S. J. Wilson, and M. C. Hutley : J. Mod. Opt, 29 (1982) 993. |
11 | S. H. Hong, B. J. Bae, K. S. Han, E. J. Hong, H. Lee, and K. W. Choi : Electron. Mater. Lett, 5 (2009) 39. DOI |
12 | Z. Q. Huang : Ph. D. Thesis, National university of Singapore, (2010). |
13 | http://www.flexvuefilms.com/pdf/en/TouchScreen.pdf |
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