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http://dx.doi.org/10.5695/JKISE.2015.48.2.50

Effect of Atomic Layer Deposited Al2O3 Thin Films on the Mechanical Properties of Anti-reflective Moth Eye Nanostructured Films  

Yun, Eun Young (School of Materials Science and Engineering, Pusan National University)
Lee, Woo-Jae (School of Materials Science and Engineering, Pusan National University)
Jang, Kyung Su (Nano Convergence Team, Seo Yeong Co. Ltd.)
Choi, Hyun-Jin (MEMS/NANO Component Production Center)
Choi, Woo-Chang (MEMS/NANO Component Production Center)
Kwon, Se Hun (School of Materials Science and Engineering, Pusan National University)
Publication Information
Journal of the Korean institute of surface engineering / v.48, no.2, 2015 , pp. 50-55 More about this Journal
Abstract
$Al_2O_3$ thin films were deposited on the moth eye anti-reflective nanostructured polycarbonate films by atomic layer deposition (ALD) techniques. Without ALD-$Al_2O_3$ thin films, moth eye anti-reflective nanostructured films had a high optical transmittance of 95.47% at a wavelength of 550 nm and a very poor hardness of 0.1381 GPa. With increasing the thickness of $Al_2O_3$ thin films from 5 to 25 nm, the transmittance of moth eye anti-reflective nanostructured films was gradually decreased from 94.94 to 93.12%. On the other hand, the hardness of the films was greatly increased from 0.3498 to 0.7806 GPa with increasing the thickness of $Al_2O_3$ thin films. This result shows that ALD thin films can be applied to improve mechanical properties with an adequate optical transmittance of the conventional moth eye anti-reflection nanostructure films.
Keywords
Moth eye structure; Atomic layer deposition; $Al_2O_3$ thin films; Mechanical properties;
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