• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.686-689
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• 2005

A numerical simulation method is developed to analyze the dynamic response of a cantilever switch, which is driven by electrostatic force and a basic component of electro-mechanical coupled system. First, point-charges model on conductor is proposed as a lumped parameter of electrical part. Then, this model is easily incorporated into a multi-body dynamics analysis algorithm, the generalized recursive dynamics formula previously developed by our research group. The resulting motion of a coupled overall system is formulated as a differential algebraic equation form including electrical and mechanical variables together. The equation is simultaneously solved in every time step. To implement this approach into the useful dynamics analysis tool, we used multibody dynamics software (RecurDyn) based on the generalized recursive formula using relative coordinate. The developed numerical simulation tool is evaluated by applying to many different driving condition and switch configuration. The final analysis model will be added to RecurDyn as a basic module for dynamics analysis of electro-mechanical coupled system.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.27 no.8
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• pp.1259-1265
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• 2003

We present a new post-fabrication frequency tuning method for laterally driven electrostatic microresonators using a DC-biased electrostatic comb array of linearly varied finger-length. The electrostatic tuning force and the equivalent stiffness, adjusted by the DC-biased tuning-comb array, have been formulated as functions of geometry and DC tuning voltage. A set of frequency-turnable microresonators has been designed and fabricated by 4-mask surface-micromachining process. The resonant frequency of the microfabricated microresonator has been measured for a varying tuning voltage at the reduced pressure of 1 torr. The maximum 3.3% reduction of the resonant frequency is achieved at the tuning voltage increase of 20V.

• Proceedings of the KIPE Conference
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• 2010.11a
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• pp.177-178
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• 2010

본 논문은 Full-bridge 인버터 방식의 HID 램프용 2단 저주파수 구형파 전자식 안정기의 구조 및 HID램프가 일정한 출력으로 구동하기 위한 제어방법을 제안한다. 제안된 안정기의 스위치 ON-OFF는 인덕터 전류에 의해서 이루어지며, 마이크로컨트롤러 및 제어기로 전류값을 제어하여 램프의 출력을 일정하게 유지한다. 실험을 통해 HID램프용 전자식 안정기가 안정적으로 동작함을 확인하였다.

• Proceedings of the KIPE Conference
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• 2009.11a
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• pp.179-181
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• 2009

고압 방전 램프는 점등 후부터 정상상태에 이르기까지 방전관 내부의 온도 및 압력이 광범위하게 변화하는 복잡한 동작 특성으로 모델링이 어렵다. 이러한 특성은 램프를 구동하는 안정기의 설계에 어려움이 따른다. 램프의 구동에는 초기 점화 시 높은 점화용 전압 펄스를 필요로 한다. 점화 후에 정상상태에 다다르면 램프 전극의 소모를 줄이기 위해 교류로 구동되어야 한다. 하지만 램프를 교류로 구동하게 되면 음향 공진 현상이 발생할 수 있다. 음향 공진 현상은 램프 구동 전류의 맥동성분이 큰 경우에도 발생을 할 수 있으므로 구동 전류의 맥동 성분의 크기는 최소화 돼야 한다. 램프의 수명시간을 길게 하려면, 안정기는 램프를 정격전력으로 구동하여야 한다. 따라서 안정기에서는 정전력 제어가 필요하게 된다. 램프 전류의 극성이 변화할 때, 램프 전류는 spike전류와 중첩이 된다. 본 논문에서는 spike 전류를 저주파구형파 램프 전류의 포락범위 안에 유지하고, 고주파 스위칭시손실을 줄이기 위해 소프트 스위칭 기법을 이용한 회로 설계를 제안했다. 제안된 방법은 시뮬레이션 및 이론적 수식적 방법으로 검증 했다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.1089-1092
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• 1995

A planar vibratory gyroscope using electrostatic actuation and electromagnetic detection is proposed. The gyroscope has large sensitivity and can be fabricated by using surface micrimachining, bulk micromachining and conventional machining technology. In this paper, the gyroscope and the electromagnetic detecting system equations are derived to determine the output characteristics for the planar vibratory gyroscope using electrostatic acturation and electromagnetic detection. The maximum output is obtained when the driving frequencyequals to the detecting frequency. The resonant frequencies of the resonator are determined by the beam stiffness, i.e. the material constants and spring dimensions. The dimensions of the beams are determined using the analytic vibration modelling. The expected resonant frequencies are 200Hz both and the sensitivity is 62mV/deg/sec with 4000 electronic circuit amplifying coefficient for an AC drive voltage of 3V bias voltage of 15V and DC field current of 50 mA.

• Proceedings of the KIEE Conference
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• 2004.10a
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• pp.73-76
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• 2004

자동 부하 전환 개폐기는 일반적으로 주 전원의 전압 상태를 감시하여 주 전원의 정전이나, 저 전압 이 감지 될 때 주 전원을 개방시키고, 예비 전원으로 신속하게 전환 시킬 수 있는 구동 메커니즘이 필요하며, 주 전원이 정상 상태로 복구되면 다시 예비 전원에서 주 전원으로의 신속한 전환이 요구 되어진다. 본 논문에서 연구되는 자동 부하 전환 개폐기의 구동부는 1개의 구동력으로 2개 선로의 스위치를 동시에 조작하게 할 수 있는 링크 구조와 동작 원리를 간지고 있으며, 이 동작을 안정적이고 신뢰도 높게 조작하기 위해서 개폐기 구동부의 동특성을 구현할 수 있는 동적 모델로 검증하여 재작하였다. 보다 정확한 모델 수립을 위하여 기구 동작 시에 발생하는 부품들 사이의 충돌, 마찰, 유연성 등의 많은 동적특성들을 정밀하게 모사 할 수 있는 유연 다물체 동역학을 적용하였으며, 검증하였다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1198-1201
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• 2005

A new foxtail actuator driven by V-shape beam deflection using electrostatic force has been designed, fabricated and characterized for nano-resolution manipulators. The proposed foxtail mechanism was implemented using a pair of electrostatic actuators and a pair of holding actuators, which was analyzed based on the electromechanically coupled motion of voltage - displacement relation. The proposed actuator was fabricated onto Silicon-on-Insulator (SOI) wafer and its stepping characteristics were measured by micro optical interferometer consisting of integrated micromirror and optical fiber. The fabricated foxtail microactuator was successfully operated from 1nm to 76nm, and the magnitude of step displacement was controllable up from 26nm/cycles to 53nm/cycle by changing the voltage.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.25 no.3
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• pp.520-528
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• 2001

This paper investigates a resonant microaccelerometer that measures acceleration using a built-in micromechanical resonator, whose resonant frequency is changed by the acceleration-induced axial force. A set of design equations for the resonant microaccelerometer has been developed, including analytic formulae for resonant frequency, sensitivity, nonlinearity and maximum stress. On this basis, the sizes of the accelerometer are designed for the sensitivity of 10$^3$Hz/g in the detection range of 5g, while satisfying the conditions for the maximum nonlinearity of 5%, the minimum shock endurance of 100g and the size constraints placed by microfabrication process. A set of the resonant accelerometers has been fabricated by the combined use of bulk-micromachining and surface-micromachining techniques. From a static test of the cantilever beam resonant accelerometer, a frequency shift of 860Hz has been measured for the proof-mass deflection of 4.3${\pm}$0.5$\mu\textrm{m}$; thereby resulting in the detection sensitivity of 1.10${\times}$10$^3$Hz/g. Uncertainty analysis of the resonant frequency output has been performed to identify important issues involved in the design, fabrication and testing of the resonant accelerometer.