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http://dx.doi.org/10.3795/KSME-A.2003.27.8.1259

Tuning of a Laterally Driven Microresonator using Electrostatic Comb Step Array  

Lee, Ki-Bang (한국과학기술원 디지털나노구동연구단)
Seo, Young-Ho (한국과학기술원 디지털나노구동연구단)
Cho, Young-Ho (한국과학기술원 디지털나노구동연구단)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.27, no.8, 2003 , pp. 1259-1265 More about this Journal
Abstract
We present a new post-fabrication frequency tuning method for laterally driven electrostatic microresonators using a DC-biased electrostatic comb array of linearly varied finger-length. The electrostatic tuning force and the equivalent stiffness, adjusted by the DC-biased tuning-comb array, have been formulated as functions of geometry and DC tuning voltage. A set of frequency-turnable microresonators has been designed and fabricated by 4-mask surface-micromachining process. The resonant frequency of the microfabricated microresonator has been measured for a varying tuning voltage at the reduced pressure of 1 torr. The maximum 3.3% reduction of the resonant frequency is achieved at the tuning voltage increase of 20V.
Keywords
Frequency Tuning; Tunable Microresonator; Electrostatic Microactuator; Electrostatic Force; Stiffness Control;
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