• Journal of the Korean Society for Precision Engineering
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• v.22 no.2
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• pp.60-69
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• 2005

In electrostatic suspension system of thin plates like a silicon wafer or an aluminum disk for hard disk applications, the lateral restoring force exerted on a suspended object plays an important role since the lateral motion of the suspended object, owing to the inherently stable restoring forces, can be passively stabilized without any active control of it. This paper reports about the measurement apparatus of the lateral restoring force originating from a relative translation of the suspended object with respect to the electrodes-for-suspension. An approximate calculation of the lateral force in disk-shaped objects, the structure of the measurement apparatus, a measurement method, stabilization condition and the guideline in designing the measurement apparatus are described. Experimental results obtained by using a 3.5-inch aluminum disk as a suspended object are presented as well in order to assess the magnitude of lateral force and stiffness, and also verify the usefulness of the measurement apparatus.

• Ceramist
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• v.1 no.1
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• pp.28-36
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• 1998

세라믹 분발의 분산안정성은 입자의 입경 및 형상, 배열형태, 그리고 분산기구에 따라 크게 달라진다. 대체로 입경이 콜로이드 범위내에 존재하면 일반적인 정전반발력이나 입체반발력에 의하여 분산이 가능하지만, 콜로이드 범위를 넘는 조대한 입경을 가지는 분말에서는 진정한 분산안정성을 얻는 것은 불가능하다. 비록 콜로이드 범위에 속히는 입경을 가지더라도 Hamaker 상수가 매우 높거나 기하이방성을 가진 입자가 우선배향성을 가지는 경우에도 마찬가지의 결과를 보여 준다. 진정한 의미의 분산안정성을 얻을 수 없는 경우 입자 간 포텐셜 에너지의 절대값이 최소가 되도록 함과 더불어 고분자 흡착층이나 전기이중층의 두께를 조정하여 입지간 평형거리를 조정하여 후속공정에서의 균일성을 유지하는 것이 기능하다. 이와 같은 제한응집은 진정한 의미의 분산안정성을 얻을 수 없는 분말을 구성분말로 하는 단미는 물론 복합재료에서도 활용이 가능하다. 나노 크기의 입경을 가지는 분말에서는 반데르발스 인력은 상대적으로 작지만, 정전반발력도 동시에 작아지기 때문에 에너지 장벽의 높이가 충분하지 않은 경향을 보인다. 따라서, 나노 분말의 분산안정성은 흡착층의 두께가 크지 않는 저분자량의 고분자를 흡착시켜 입체반발력을 부여하는 것이 바람직하다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.686-689
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• 2005

A numerical simulation method is developed to analyze the dynamic response of a cantilever switch, which is driven by electrostatic force and a basic component of electro-mechanical coupled system. First, point-charges model on conductor is proposed as a lumped parameter of electrical part. Then, this model is easily incorporated into a multi-body dynamics analysis algorithm, the generalized recursive dynamics formula previously developed by our research group. The resulting motion of a coupled overall system is formulated as a differential algebraic equation form including electrical and mechanical variables together. The equation is simultaneously solved in every time step. To implement this approach into the useful dynamics analysis tool, we used multibody dynamics software (RecurDyn) based on the generalized recursive formula using relative coordinate. The developed numerical simulation tool is evaluated by applying to many different driving condition and switch configuration. The final analysis model will be added to RecurDyn as a basic module for dynamics analysis of electro-mechanical coupled system.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1198-1201
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• 2005

A new foxtail actuator driven by V-shape beam deflection using electrostatic force has been designed, fabricated and characterized for nano-resolution manipulators. The proposed foxtail mechanism was implemented using a pair of electrostatic actuators and a pair of holding actuators, which was analyzed based on the electromechanically coupled motion of voltage - displacement relation. The proposed actuator was fabricated onto Silicon-on-Insulator (SOI) wafer and its stepping characteristics were measured by micro optical interferometer consisting of integrated micromirror and optical fiber. The fabricated foxtail microactuator was successfully operated from 1nm to 76nm, and the magnitude of step displacement was controllable up from 26nm/cycles to 53nm/cycle by changing the voltage.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.2 no.2
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• pp.223-230
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• 1998

This paper describes a phase-shift pulse-width modulation and pulse-frequency modulation series resonant high-frequency inverter using IGBT(Insulated-Gated Bipolar Transistor) for the power control of high-frequency induction heating using neuro-fuzzy, which is practically applied for 20KHz~500KHz induction-heating and melting power supply in industrial fields. The adaptive frequency tracking based phase-shifting PWM(Pulse-Width Modulation) regulation scheme is presented in order to minimize switching losses. The trially-produced breadboards using IGBT are successfully demonstrated and discussed.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.25 no.3
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• pp.424-433
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• 2001

We present a new electrostatic repulsive-force microactuator using a lateral repulsive force induced by an asymmetric distribution of electrostatic field. The lateral repulsive force has been characterized by a simple analytical equation, derived from a finite element simulation. A set of repulsive force polysilicon microactuators has been designed and fabricated by a 4-mask surface-micromachining process. Static and dynamic micromechanical behavior of the fabricated microactuators has been measured at the atmospheric pressure for a varying bias voltage. The static displacement of the fabricated microactuator, proportional to the square of the DC bias voltage, is obtained as 1.27 $\mu\textrm{m}$ for the DC bias voltage of 140V. The resonant frequency of the repulsive-force microactuator increases from 11.7 kHz to 12.7 kHz when the DC bias voltage increases from 60V to 140V. The measured quality-factor varies from 12 to 13 for the bias volatge range of 60V∼140V. The characteristics of the electrostatic repulsive-force have been discussed and compared and compared with those of the conventional electrostatic attractive-force.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.37 no.6
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• pp.545-550
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• 2013

We present a tactile information transceiver using a friction-tunable slider-pad. While previous tactile information devices were focused on either input or output functions, the present device offers lateral position/vertical direction detection and texture expression. In characterizing the tactile input performance, we measured the capacitance change due to the displacement of the slider-pad. The measured difference for a z-axis click was 0.146 nF/$40{\mu}m$ when the x-y axis navigation showed 0.09 nF/$750{\mu}m$ difference. In characterizing the texture expression, we measured the lateral force due to a normal load. We applied a voltage between parallel electrodes to induce electrostatic attraction in DC and AC voltages. We measured the friction under identical fingertip action conditions, and obtained friction in the range of 32-152 mN and lateral vibration in the force range of 128.1 mN at 60 V, 2 Hz. The proposed device can be applied to integrated tactile interface devices for mobile appliances.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.1089-1092
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• 1995

A planar vibratory gyroscope using electrostatic actuation and electromagnetic detection is proposed. The gyroscope has large sensitivity and can be fabricated by using surface micrimachining, bulk micromachining and conventional machining technology. In this paper, the gyroscope and the electromagnetic detecting system equations are derived to determine the output characteristics for the planar vibratory gyroscope using electrostatic acturation and electromagnetic detection. The maximum output is obtained when the driving frequencyequals to the detecting frequency. The resonant frequencies of the resonator are determined by the beam stiffness, i.e. the material constants and spring dimensions. The dimensions of the beams are determined using the analytic vibration modelling. The expected resonant frequencies are 200Hz both and the sensitivity is 62mV/deg/sec with 4000 electronic circuit amplifying coefficient for an AC drive voltage of 3V bias voltage of 15V and DC field current of 50 mA.

• Proceedings of the Korean Nuclear Society Conference
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• 2004.10a
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• pp.655-656
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• 2004

1) 제어봉의 전자 클러치는 직류전원 공급 장치에 의해 12V의 직류 전력을 공급받으며 전압 강하에 대한 내성이 좋다. 제어봉은 10V의 전압이 525msec 이상 지속될 때 전자력 상실로 낙하한다. 완전정전(0V)이 발생하여도 직류전원 공급 장치는 500msec 동안 전자클러치에 직류전력을 공급하여 제어봉의 연결 상태를 유지하도록 한다. 2) 정지봉 계통에 대한 전압강하의 영향은 제어회로를 구성하는 전자접촉기의 개방에 의하여 펌프의 전원공급이 차단되고, 그 결과 정지봉이 낙하한다. 정지봉은 펌프의 전원이 상실되면 수압 실린더의 압력 상실로 약 1000msec 후에 낙하한기 시작한다. 그림 2는 제어봉 및 정지봉에 대한 정전 영향을 시간에 따라 표시한 것이다. 3) 1차 및 2차 냉각계통의 부족전압 계전기에 의해 펌프가 정지할 때까지 저유량 신호 및 N/T mismatch 신호에 의한 원자로 정지신호는 발생되지 않는다. 따라서 정지봉 및 제어봉 계통에 적용하고자 하는 순간정전 보상장치는 부족전압 계전기 동작시간 이내의 보상시간에서만 가능할 것이다.

• 전기의세계
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• v.26 no.1
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• pp.36-44
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• 1977

본고에서는 (1) 대전력장거리송전계통의 안정도향상 문제, (2) 기간송전계통의 단락전력압제 문제, (3) 대전력장거리송전계통의 계통전압과 주파수의 유지 문제, (4) 사고파급에 의한 광범위대정전의 방지 문제의 문제들에 대하여 초고압계통의 운용에 경험이 있는 외국의 전력계통운용방안들을 참고로하여 그의 개요를 기술코자 한다.