• 한국광학회지
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• 제4권1호
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• pp.15-21
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• 1993

본 연구에서는 설계제작된 KrF 엑시머 레이저 스텝퍼는 광원인 KrF엑시머 레이저, 조명광학계, 축소트영광학계, 정밀구동 웨이퍼 스테이지, 정렬시스템 및 이들을 제어하기 위한 제어계로 구성되어 있다. 본 실험에서 사용한 KrFdprtlaj 레이저는 밴드폭 3pm, 반복주파수 200Hz, 평균축력 3W이고, 5:1 투영렌즈는 N.A. 0.42, 전체 필드영역 $\varphi$21.2mm, 왜곡수차 최대 60nm 이하이다. 또한 정밀구동 웨이퍼 스테이지의 재현성과 해상도는 각각 $\pm$0.08$\mu\textrm{m}$/200mm(3 sigma), 100mm 반경에서 0.05 $\mu\textrm{m}$이다. 자동 초점 시스템은 $\pm$50$\mu\textrm{m}$범위에서 0.1$\mu\textrm{m}$의 해상도를 나타냈으며, 자동수평시스템은 120 arcsec 범위에서 larcsec의 해상도를 나타냈다. OFF-AXIS 정렬방식에서는 0.2$\mu\textrm{m}$의 해상도를 가지며, 두빔의 간섭을 이용한 새로운 TTL 정렬은 0.1$\mu\textrm{m}$의 해상도를 나타냈다. 스텝퍼 패턴 실험결과 SAL603레지스트를 사용하였을 때 웨이퍼의 노광후 열처리 $105^{\circ}C$, 60초에서 0.3$\mu\textrm{m}$ Lines and Spaces(L/S)까지 해상되었으며, 0.34$\mu\textrm{m}$ L/S에서 1$\mu\textrm{m}$의 초점심도를 얻을 수 있었다. 마스크 패턴과 레지스트 패턴의 선형성은 0.4$\mu\textrm{m}$ L/S가지 유지 되었다. 또한 XP-89131레지스트의 경우 노광후 열처리 $110^{\circ}C$, 60초에서 0.34$\mu\textrm{m}$ L/S까지 해상됨을 알수 있었다.

• 한국정밀공학회지
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• 제23권6호
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• pp.96-103
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• 2006

To establish of standard technique of nano-length measurement in 2D plane, new AFM system has been designed. In the long range (about several tens of ${\mu}m$), measurement uncertainty is dominantly affected by the Abbe error of XY scanning stage. No linear stage is perfectly straight; in other words, every scanning stage is subject to tilting, pitch and yaw motion. In this paper, an AFM system with minimum offset of XY sensing is designed. And XY scanning stage is designed to minimize rotation angle because Abbe errors occur through the multiply of offset and rotation angle. To minimize the rotation angle optimal design has performed by maximizing the stiffness ratio of motion direction to the parasitic motion direction of each stage. This paper describes the design scheme of full AFM system, especially about XY stage. Full range of fabricated XY scanner is $100{\mu}m\times100{\mu}m$. And tilting, pitch and yaw motion are measured by autocollimator to evaluate the performance of XY stage. As a result, XY scanner can have good performance. Using this AFM system, 3um pitch specimen was measured. The uncertainty of total system has been evaluated. X and Y direction performance is different. X-direction measuring performance is better. So to evaluate only ID pitch length, X-direction scanning is preferable. Its expanded uncertainty(k=2) is $\sqrt{(3.96)^2+(4.10\times10^{-5}{\times}p)^2}$ measured length in nm.

• 한국산학기술학회논문지
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• 제16권7호
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• pp.4405-4410
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• 2015

두 개의 1차원 주기 패턴을 수직으로 중첩시켜 상하층 패턴으로부터 이축 변위 정보를 각각 디코딩할 수 있는 방법을 제안한다. 투명한 상층 패턴 판별은 굴절률차에 기인한 레이저 빔의 디플렉션 검출을 통해 이뤄지고 하층 패턴 판별은 수광 전압 차의 검출를 통해 이뤄진다. 빌드 업 필름 재질의 상층 패턴은 UV 레이저 가공에 의해 미세가공되고 그리고 알루미늄 하층 패턴은 초정밀 머시닝에 의한 트렌치 가공과 불투명 소재 증착 그리고 폴리싱 과정을 통해 제작된다. 10마이크로미터 간격으로 제작된 샘플 패턴과 이를 인코딩할 수 있는 전용 광학계에 의한 변위 측정 방법은 대면적 스테이지에 장착되어 레이저 간섭계를 이용한 측정데이터와 비교하여 검증된다.

• 한국공작기계학회논문집
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• 제15권1호
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• pp.8-16
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• 2006

The communication through optical fiber is taking an important role of the expansion of communication network with excellent transmitting rate and quality. As the optical communication is introduced to the backbone network at first and becomes a general communication method of network, the demand of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM(Wavelength Division Multiplexing) element increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this paper, the driving mechanism of ultra precision stage is studied with the aim of optimal design of stage. The travel and the resolution of stage are investigated. The hysteresis of the stage is generated because of PZT actuator. The hysteresis and the inverse hysteresis are modeled in X, Y, and Z-axis motion. The input data of desired displacement of the stage according to input voltage is obtained from the inverse hysteresis equation. In the result of experiments with the input data, the errors due to hysteresis are well compensated.

• 한국생산제조학회지
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• 제25권1호
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• pp.75-82
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• 2016

In this study, a cross-damped low vibration controller was developed to reduce vibration in ultra-precision dual stage driven by master/slave principle. In master-slave structure, the master stage leads the driving motion and the slave stage follows it so as to maintain a constant gap between two stages. In this structure, a small perturbation of master stage makes big oscillations in slave servoing stage, so a low damped master stage composed of voice coil motor makes a long vibration in settling area after driving motion profile. In this research, an effective feedback damping algorithm for increase the damping characteristics of the dual stage was developed. The designed velocity damping algorithm improves the system stability and reduces the settling time of the whole system. Simulation and experimental results show that the developed algorithm reduces settling time and improves the regulating performance.

• 연구논문집
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• 통권34호
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• pp.101-112
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• 2004

In order to analyze the motion errors of the aerostatic stage, it is necessary to consider the influence of the moment variation occurredinside the pads. In this paper, a motion error anaysis method utilizing the transfer functions on the reaction force and moment is proposed, and general characteristics of the transfer functions are discussed. Calculated motion errors by the proposed method show good agreement with the ones calculated by Multi Pad Method, which is considered the entire table as an analysis object. Also, by the introduction of the transfer function of motion errors, which represent the relationship between the spatial frequency components of the rail form error and motion errors, motional characteristics of the porous aerostatic stage can be generalized. In detail, the influence of the spatial frequencies is analyzed quantatively, and the patterns of the insensitive frequencies which almost do not affect the linear motion error or angular motion error according to the rail length ratio and the number of the pad are verified. The relationship between the moment variation occurred inside the pads and the motion errors is also verified together.

• 한국기계가공학회지
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• 제19권8호
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• pp.81-87
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• 2020

A stable rotational-to-linear motion transformation structure using a driving mechanism with 2 degrees of freedom was developed for an orthogonal mechanism to prevent the interference of each axis in 2D motion. In this mechanism, a step motor was used for precise position control. This structure was developed to maneuver workparts in micro particle blast machining experiments. To determine the real-time performance of micro particle blast machining, the control, input, and output were operated simultaneously and precise position control was implemented, using a timer interrupt with multiple execution codes. The two step motors obtained precise position control by removing backlash with a ball-screw mechanism. The device has menu-type control codes for user-friendliness, and real-time sequence control was simultaneously adopted for user control input.

• 한국음향학회:학술대회논문집
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• 한국음향학회 1999년도 학술발표대회 논문집 제18권 1호
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• pp.387-390
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• 1999

누설탄성표면파(Leaky Surface Acoustic Wave : LSAW) 측정에 사용하는 것을 목적으로 PVBF 압전막을 이용하여 직선집속 초음파트랜스듀서를 제작하고 그 특성을 평가하였다. 제작은 한쪽 면이 원통형 구조를 갖는 구리, 알루미늄, 3mmPVC-에폭시 3가지 재료를 배면층으로 사용하여 각각에 PVDF를 부착시켜서 수중에 음파를 방사하도록 구성하였고, 특성평가는 임펄스응답 특성과 음장 특성으로 나누어서 평가하였다. 임펄스응답 특성은 제작한 3종류의 집속 초음파트랜스듀서에 대해 실험적으로 측정하고, Mason 등가회로1)를 이용한 이론적 해석결과와 비교하였다. 음장특성 측정실험은 구리를 배면체로 하여 제작한 집속 초음파트랜스듀서에 대해서 실시하였고, 그 이론적인 계산결과는 Raylelgh-Somme-rfeld 회 절이론2)을 도입하여 초점면에 형성되는 음압분포를 계산하는 것으로 얻어졌다. 실험은 펄스 초음파 송수기 및 $2{\mu}m/step$으로 이동하는 정밀 x-y-z 스테이지를 컴퓨터에 연결하여 자동 측정하는 것으로 수행되었는데, 그 결과는 이론 해석결과와 비교적 잘 일치하였다.

• 전기학회논문지
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• 제60권1호
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• pp.63-70
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• 2011

This paper presents the design and operating characteristics of the novel cylindrical linear motor which is designed for the long stroke XY stage. In the long stroke structure, the air gap is changed by the distortion and bending effects, and it makes additional position error in the XY stage. In order to consider the distortion and bending effects of the long stroke, the field part of the cylindrical linear motor is designed as an open structure, and the stroke is supported by the bridge guide which is positioned in the open field part. The mechanical bridge guide can reduce the bending effects of the stroke and can keep a constant air gap. The detailed design process of the proposed cylindrical linear motor is presented in this paper. The proposed motor is analyzed by the 3D FEM technology. The practical XY stage which uses the proposed motor is tested to verify the propose novel cylindrical linear motor. The FEM and experimental results show the effectiveness of the proposed motor.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2005년도 춘계학술대회 논문집
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• pp.81-86
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• 2005

As the optical communication is introduced to the backbone network at first and becomes a general communication method of network, the demand of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM(Wavelength Division Multiplexing) element increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this paper, the driving mechanism of ultra precision stage is studied with the aim of optimal design of stage. The travel and the resolution of stage are investigated. The hysteresis of the stage is generated because of PZT actuator. The hysteresis and the inverse hysteresis are modeled in X, Y, and Z-axis motion. The input data of desired displacement to the stage according to input voltage is obtained from the inverse hysteresis equation. In the result of experiments with the input data, the errors due to hysteresis are well compensated.