• Title/Summary/Keyword: 전 효율

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A Study on Batch-Type Remote Plasma Dry Cleaning Process for Native Oxide Removal (배치식 플라즈마 세정 설비를 이용한 자연산화막 제거 공정)

  • Park, Jae-Young;Yi, Wook-Yeol;Hyung, Yong-Woo;Nam, Seok-Woo;Lee, Hyeon-Deok;Song, Chang-Lyong;Kang, Ho-Kyu;Roh, Yong-Han
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.11a
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    • pp.247-251
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    • 2004
  • 반도체 소자의 제조에 있어 실리콘 표면에 성장한 자연산화막을 제거하기 위해 일반적으로 습식 세정 기술이 이용되어 왔다. 하지만 소자의 최소 선폭(design rule)이 nano급으로 고집적화 됨에 따라 contact hole 바닥의 자연산화막을 깨끗이 제거하는데 있어서 그 한계를 나타나고 있다. 이에 대한 효과적인 대안 공정으로 가스 건식 세정 기술이 연구되고 있다. 본 논문에서는 한 번에 50매 이상의 웨이퍼를 처리함으로써 생산성 측면에서 월등한 배치식 설비에서 원거리 플라즈마(remote plasma) 장치에서 2.450Hz의 마이크로웨이브(${\mu}$-wave)에 의해 형성시킨 수소라디칼과 $NF_3$ 가스를 이용하여 실리콘에 결함을 주지 않고 자연산화막을 선택적으로 제거하는 공정에 대해 고찰하였다. AFM을 이용한 표면분석, TEM을 이용한 물성분석, 그리고 ToF-SIMS 및 XPS를 이용한 화학 분석을 습식 및 건식 세정을 비교 평가한 결과, 건식 세정 공정이 실리콘 표면에 결함을 주지 않고 자연산화막을 제거 할 수 있음을 확인하였다. 산화막$(SiO_2)$, 질화막$(Si_3N_4)$, 그리고 다결정 실리콘(Poly-Si) 등의 각 막질별 식각 특성을 고찰하였으며, $NH_3$의 캐리어 가스인 $N_2$의 주입량을 조절함으로써 수소라디칼 형성 효율의 개선이 가능하였으며, 이로부터 게이트와 소스/드레인 사이를 절연하기 위해 이용되는 질화막의 식각 선택비를 2배 정도 개선할 수 있었다. nano급 소자에 실장하여 평가한 결과에서 불산(HF)에 의한 습식 세정 방식에 비하여 약 $20{\sim}50%$ 정도의 contact 저항 감소 효과가 있음이 확인되었다.두 소자 모두 $40mA/cm^2$ 에서 이상적인 화이트 발란스와 같은(0.33,0.33)의 색좌표를 보였다.epsilon}_0=1345$의 빼어난 압전 및 유전특성과 $330^{\circ}C$의 높은 $T_c$를 보였고 그 조성의 vibration velocity는 약4.5 m/s로 나타났다.한 관심이 높아지고 있다. 그러나 고 자장 영상에서의 rf field 에 의한 SAR 증가는 중요한 제한 요소로 부각되고 있다. 나선주사영상은 SAR 문제가 근원적으로 발생하지 않고, EPI에 비하여 하드웨어 요구 조건이 낮아 고 자장에서의 고속영상방법으로 적합하다. 본 논문에서는 고차 shimming 을 통하여 불균일도를 개선하고, single shot 과 interleaving 을 적용한 multi-shot 나선주사영상 기법으로 $100{\times}100$에서 $256{\times}256$의 고해상도 영상을 얻어 고 자장에서 초고속영상기법으로 다양한 적용 가능성을 보였다. 연구에서 연구된 $[^{18}F]F_2$가스는 친핵성 치환반응으로 방사성동위원소를 도입하기 어려운 다양한 방사성의 약품개발에 유용하게 이용될 수 있을 것이다.었으나 움직임 보정 후 영상을 이용하여 비교한 경우, 결합능 변화가 선조체 영역에서 국한되어 나타나며 그 유의성이 움직임 보정 전에 비하여 낮음을 알 수 있었다. 결론: 뇌활성화 과제 수행시에 동반되는 피험자의 머리 움직임에 의하여 도파민 유리가 과대평가되었으며 이는 이 연구에서 제안한 영상정합을 이용한 움직임 보정기법에 의해서 개선되었다. 답이 없는 문제, 문제 만들기, 일반화가 가능한 문제 등으로 보고, 수학적 창의성 중 특히 확산적 사고에 초점을 맞추어 개방형 문제가 확

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Relation Between Degree of Consistency of Elementary Students' Preconceptions on the Brightness of Electric Bulb and Their Cognitive Conflict (전구의 밝기에 대한 초등학생들의 사전개념 일관성 정도와 인지갈등 정도와의 관계)

  • Jung Mee-young;Kim Kung-suk;Kwon Jaesoo
    • Journal of Korean Elementary Science Education
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    • v.24 no.3
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    • pp.259-267
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    • 2005
  • This study was to investigate the elementary students' preconception on the brightness of electric bulb and degree of consistency on their preconceptions. Participants were 160 students of fifth graders in Seoul area. They had already teamed about the brightness of series circuit and parallel circuit of batteries. After they solved six problems in the same context, we provided them a pair of circuit which was an anomalous situation. And then they conducted CCLT (Cognitive Conflict Level Test). Elementary school students showed various preconceptions when they explained the light of bulb of two Simple electric Circuits. Many Students Consistently Showed the Scientific misconceptions like 'the light of bulb of two simple electric circuits was that the more batteries and the fewer bulbs were brighter.' The level of consistency that students presented scientific misconceptions was grouped all of four, such as 'high, middle, low, and nothing.' Therefore the higher scientific achievement they have, the higher consistency they have. As the students had high consistency level, they revealed high cognitive conflict level significantly. This high consistency will help them to change their preconception on the brightness of electric bulb and their cognitive conflict.

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The Phase-Shift Method for the Langmuir Adsorption Isotherms of Electroadsorbed Hydrogens for the Cathodic H2 Evolution Reactions at the Poly-Pt Electrode Interfaces (다결정 Pt 전극계면에서 음극 H2 발생반응을 위한 전착된 수소의 Langmuir 흡착등온식에 관한 위상이동 방법)

  • Chun, Jang H.;Jeon, Sang K.;Lee, Jae H.
    • Journal of the Korean Electrochemical Society
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    • v.5 no.3
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    • pp.131-142
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    • 2002
  • The Langmuir adsorption isotherms of the under-potentially deposited hydrogen (UPD H) and the over-potentially deposited hydrogen (OPD H) at the poly-Pt/0.5M $H_2SO_4$ and 0.5 M LiOH aqueous electrolyte interfaces have been studied using cyclic voltammetric and ac impedance techniques. The behavior of the phase shift $(0^{\circ}{\leq}{-\phi}{\leq}90^{\circ})$ for the optimum intermediate frequency corresponds well to that of the fractional surface coverage $(1{\geq}{\theta}{\geq}0)$ at the interfaces. The phase-shift method, i.e., the phase-shift profile $({-\phi}\;vs.\;E)$ for the optimum intermediate frequency, can be used as a new electrochemical method to determine the Langmuir adsorption isotherms $({\theta}\;vs.\;E)$ of the UPD H and the OPD H for the cathodic $H_2$ evolution reactions at the interfaces. At the poly-Pt/0.5M $H_2SO_4$ aqueous electrolyte interface, the equilibrium constant (K) and the standard free energy $({\Delta}G_{ads})$ of the OPD H are $2.1\times10^{-4}$ and 21.0kJ/mol, respectively. At the poly-Pt/0.5M LiOH aqueous electrolyte interface, K transits from 2.7(UPD H) to $6.2\times10^{-6}$ (OPD H) depending on the cathode potential (E) and vice versa. Similarly, ${\Delta}G_{ads}$ transits from -2.5kJ/mol (UPD H) to 29.7kJ/mol (OPD H) depending on I and vice versa. The transition of K and ${\Delta}G_{ads}$ is attributed to the two distinct adsorption sites of the UPD H and the OPD H on the poly-Pt surface. The UPD H and the OPD H on the poly-Pt surface are the independent processes depending on the H adsorption sites themselves rather than the sequential processes for the cathodic $H_2$ evolution reactions. The criterion of the UPD H and the OPD H is the H adsorption sites and processes rather than the $H_2$ evolution reactions and potentials. The poly-Pt wire electrode is more efficient and useful than the Pt(100) disc electrode for the cathodic $H_2$ evolution reactions in the aqueous electrolytes. The phase-shift method is well complementary to the thermodynamic method rather than conflicting.

Effect of Seed Priming and Pellet Coating Materials on Seedling Emergence of Aster koraiensis (프라이밍과 펠렛코팅 소재가 벌개미취 종자의 유묘 출현율에 미치는 영향)

  • Kang, Won Sik;Kim, Min Geun;Kim, Soo Young;Han, Sim Hee;Kim, Du Hyun
    • Journal of Korean Society of Forest Science
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    • v.109 no.1
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    • pp.41-49
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    • 2020
  • In this study, the effect of seed pre-treatments and pellet coating materials to enhance the efficiency of large-scale propagation of Aster koraiensis seeds were investigated. Seeds were immersed in water for one day, and only those that sank were used for pre-treatment to use filled seeds. Pre-treatments were divided into hormone treatments, with gibberellic acid (GA3; 200 and 500 ppm) and 24-epibrassinolide (10-6, 10-7, and 10-8M), and priming with potassium nitrate (100 mM of KNO3). To produce pellet-coated seeds, pellet materials (DTCS or DTK) were applied to control (unprimed) and primed seeds with binders (PVA or CMC). The maximum germination percent (GP) of seeds before pellet coating was 65% (with the priming treatment), and there was no difference in the GP of seeds among hormone treatments. For seeds sown in a growth chamber on filter paper, GP was 41% for control (unprimed/uncoated) seeds, 65% for uncoated primed seeds, 71% for DTCS/PVA-pellet-coated seeds, and 42% for DTK/CMC-pellet-coated seeds. Seeds that were primed first and then pellet-coated showed greatly improved GP, mean germination time (MGT), and germination rate than seeds that were only pellet-coated. For seeds sown in commercial soil in a greenhouse, control seeds had a GP of 27%, whereas primed seeds had the highest GP (58%), and their MGT and GT were 9.4 days and 7.0%·day, respectively. In addition, DTK/PVA-pellet-coated seeds (40%) also had a GP higher than the control (27%), and their MGT was 15-27 days. For seeds sown in sandy-loam soil in a greenhouse, unprimed-pellet-coated seeds and primed-pellet-coated seeds both had GPs ranged of 39%, which were lower than that of control seeds. In general, the seeds that were pellet-coated with DTK had a higher GP than those pellet-coated with DTCS. Furthermore, the MGT of unprimed-pellet-coated seeds was 15.0-19.8 days, which was longer than the MGT of primed-pellet-coated seeds. These results suggest that priming enhances seedling emergence of Aster koraiensis seeds. Moreover, when priming is combined with pellet coating, DTK is a more suitable pellet material than DTCS, and PVA and CMC are equally suitable adhesives.

CONDITIONS FOR ALASKA POLLACK AND FILE FISH SKIN GLUE PROCESSING AND THE QUALITY OF PRODUCT (명태피 및 말쥐치피를 이용한 피교의 최적가공조건과 품질에 대하여)

  • LEE Eung-Ho;HA Jin-Whan;HEO Woo-Deock
    • Korean Journal of Fisheries and Aquatic Sciences
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    • v.10 no.1
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    • pp.1-9
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    • 1977
  • The purpose of this study is to complish a method of fish glue malting with residual products such as fish head and skin discarded from sea food processing. Using the skins of Alaska pollack and file fish from fillet packers, the optimum conditions of skin glue processing were investigated and physical and chemical properties of the product were also determined. The yields of Alaska pollack, Thelagra calcogramma, skin and file fish, Novodon modestus, skin to the total body weight were $4.6\%\;and\;5.0\%$ respectively. The optimum conditions for a $49.3\%$n yield Alaska pollack skin glue processing were considered the extraction of previously tinted in $0.1\%$ calcium hydroxide solution for 3 hours with the additional water as much as 3 times of sample weight at $70^{\circ}C$ for 3 hours under the controlled pH 5.0. The conditions for file fish skin glue were similar to those of Alaska pollack except the addition of five times of water to the weight of sample skin needed for extraction. The content of crude protein of Alaska pollack and file fish skin glue were $98.0\%\;and\;96.0\%$ respectively. The contents of crude ash and crude lipid were not different from that of chemical grade gelatin. Relative viscosity, melting point, gelation temperature and jelly strength of Alaska pollack skin glue marked 5.84, $21.8^{\circ}C,\;7.1^{\circ}C\;and\;10.0g$ respectively and those of file fish skin glue showed $5.79,\;25.0^{\circ}C,\;7.4^{\circ}C\;and\;11.6g$ respectively.The color and turbidity of Alaska pollack skin glue are slightly superior to those of file fish skin glue. It is supposed that the extract residue of skin glue is valuable for use the animal feeds by the results of amino acid composition. And the ratio of each amino acid content to the total amino acid of Alaska pollack and file fish skin glue is similar to that of chemical grade gelatin.

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Influence of User Innovativeness and Knowledge Base on Acceptance of Voice Shopping (사용자의 혁신성 및 지식수준이 가상비서 기반 음성쇼핑의 이용에 미치는 영향)

  • Jo, Woong;Ahn, Suho;Chung, Doohee
    • Asia-Pacific Journal of Business Venturing and Entrepreneurship
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    • v.15 no.2
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    • pp.153-169
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    • 2020
  • A new way of shopping based on virtual assistant, so called voice shopping, is drawing attention. The voice shopping market is growing around the world, and Korea is on the verge of full-scale commercialization of this new shopping. For the development of voice shopping-related industries, it is necessary to research on specific issues related to this new shopping methods, such as the quality of services, efficient processes tailored to new ways, and ways to build customer relationships. As part of such an attempt, the study seeks to determine the factors that affect consumers' perception and attitudes toward voice shopping. The study conducted the analysis based on survey response data of 171 online shopping users. In addition to the typical factors of the technology acceptability model(TAM) such as perceived usefulness and ease of use, the impact of perceived playfulness was included for analyzing the intention on the acceptance of voice shopping. In particular, this study focuses on the impact of user attributes. For the spread of voice shopping, it is necessary to set up a valid target customer and understand users for establishing an effective customer relationship. Therefore, this study tries to analyze how the perceptions on the voice shopping(perceived usefulness, ease of use, and perceived playfulness) are affected by users' attributes, such as user innovativeness and user knowledge level. The result of analysis shows that user innovativeness have a positive relationship with all of perceived usefulness, ease of use, and perceived playfulness. The user knowledge base, however, was not significant to all these three variables. The user knowledge base is shown to have a positive effect on user innovativeness which is the source of positively significant factor for the variable of the perceptions on the voice shopping. Meanwhile, among the variables of extended technology acceptance model, perceived usefulness and perceived playfulness have positive effects on the acceptance of voice shopping, while ease of use has no significant impact on the voice shopping acceptance. Ease of use has a positive relationship with perceived usefulness and playfulness. This study is meaningful in providing implications on the development of voice shopping platforms and related services, and establishment of customer relationship.

Study of 188Re(V)-DMSA for Treatment of Cancer: Radiolabeling and Biodistribution (암 치료를 위한 188Re(V)-DMSA에 관한 연구: 방사성동위원소 표지와 생체내 분포)

  • Kim, Young Ju;Jeong, Jae Min;Chang, Young Soo;Lee, Dong Soo;Chung, June-Key;Lee, Myung Chul;Koh, Chang-Soon
    • The Korean Journal of Nuclear Medicine
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    • v.32 no.1
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    • pp.81-88
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    • 1998
  • The purpose of this study was to examine the radiolabeling and biodistribution of $^{188}Re(V)$-DMSA as a therapeutic cancer radiopharmaceutical. We made a DMSA kit($NaHCO_3$ 1.5 mg, meso-2,3-dimercaptosuccinic acid 1.0 mg, L(+)-ascorbic acid 0.7 mg, $SnCl_2{\cdot}2H_2O$ 0.34 mg, pH 2.9) for labeling with $^{188}Re$. In this kit, $^{188}ReO_4{^-}$ 5 mCi/2 ml added and boiled at $100^{\circ}C$ for 3 hr in water bath. The final pH adjusted to 7.5 with 7% $NaHCO_3$ solution. We checked the labelling efficacy with TLC-SG(n-butanol : acetic acid : $H_2O$ = 3 : 2 : 3) and examined the stability both in room temperature and in serum at $37^{\circ}C$. Biodistribution(1, 3, 13, 24, 48 hr) of $^{188}Re(V)$-DMSA compound was evaluated in Sarcoma 180 tumor-bearing mice. Each labeling efficiency and stability at room temperature for 48 hours was over 98% and 95%, respectively. The stability in serum were 82%(6 hr) and 85%(48 hr). Tumor uptake of $^{188}Re(V)$-DMSA in Sarcoma 180-bearing mice were $0.66{\pm}0.15%$(1 hr), $0.51{\pm}0.10%$(3 hr), $0.19{\pm}0.05%$(24 hr) and $0.13{\pm}0.02%$(48 hr). These result are consistent with those of $^{99m}Tc(V)$-DMSA which were reported previously. In conclusion, $^{188}Re(V)$-DMSA may be a useful therapeutic radiopharmaceutical for treating some cancers and metastatic bone lesion.

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Improvement of Green-up of Zoysiagrass and Cool-season Grass during Early Spring in Korea (한국잔디 및 한지형 잔디의 초봄 그린업 촉진)

  • Lee Jae-Pil;Kim Doo-Hwan
    • Asian Journal of Turfgrass Science
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    • v.19 no.2
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    • pp.103-113
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    • 2005
  • This study was conducted to improve the green up of zoysiagrass(2. japonica) and cool-season grass($80\%$ Kentucky bluegrass+$20\%$ Perennial ryegrass) during early spring in Korea. Treatments fur zoysiagrass were control, Polyethylene film, Black screen, Black screen+polyethylene film, Green screen+polyethylene film, Polyethylene film+Black screen, Polyethylene film+Green screen, low mowing height(1.5-2cm) and homing. For cool-season grass, non-punched Polyethylene film, punched Polyethylene film treatments were included. Application dates of covering with Polyethylene film were Feb. 22, Feb. 28, March 7, and March 14. Green up was evaluated by visual color rating. The results are as follows; 1. The best method for improving green up of zoysiagrass were Polyethylene film and optimal covering day for zoysiagrass was on Feb. 22. 2. Low mowing height(1.5-2cm) and burning of zoysiagrass showed the faster greening 1$\sim$weeks before than control. .3 Non-punched Polyethylene film covering was best to improve green up of cool-season grass. More time of covering time with cool-season grass induces rapid green up.

Effect of Continuous Cultivation Years on Soil Properties, Weed Occurrence, and Rice Yield in No-tillage Machine Transplanting and Direct Dry-seeding Culture of Rice (벼 무경운 기계이앙 및 건답직파 연속재배년수가 토양특성, 잡초발생 및 벼 생육에 미치는 영향)

  • Park, Hong-Kyu;Kim, Sang-Su;Choi, Won-Yong;Lee, Ki-Sang;Lee, Jae-Kil
    • KOREAN JOURNAL OF CROP SCIENCE
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    • v.47 no.3
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    • pp.167-173
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    • 2002
  • This experiment was conducted to figure out the change of soil physical properties, rice growth and yield with the years of continuous cultivation in direct dry-seeding and no-tillage machine transplanting. Experiments were conducted at NHAES(National Honam Agricultural Experiment Station, RDA, Iksan, Cheon Buk Province, South Korea) with a rice variety "Dongjinbyeo" from 1995 to 2000. In no-tillage machine transplanting cultivation, organic matter in soil was higher than that on direct dry-seeding and was significantly high in topsoil. Problematic weed species were E. crus-galli B., A. keisak H., and L. japonica M. Plant height and tiller number m-2 were higher in common-tillage during the total growth duration. The highest weedy rice occurrence of 27.5% was observed in live years' continuous direct dry-seeding and followed by 6.2%, in four years', and 3.7%, in three years'. The highest yield reduction of 38% was observed in five years' continuous direct dry-seeding. The reduction may resulted from the competition between weedy rice and cultivated rice.

Effects of Different Water Depths on Early Growth of Rice and Barnyard grass(Echinochloa crus-galli) (담수심차이가 벼 품종과 피의 초기생육에 미치는 영향)

  • 박성태;장안철;이수관
    • KOREAN JOURNAL OF CROP SCIENCE
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    • v.38 no.5
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    • pp.405-412
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    • 1993
  • This experiment was conducted to investigate the effects of water depths on seedling stand and early growth of califonia rice varieties, S201, M202, A301, Italico livorno and Korean variety, Hwaseongbyeo, and barnyardgrass (Echinochloa crus-galli) The coleoptile length of rice was longer with deep water depth while for the radicle length shorten. As water depth was increased, the percentage of seedling stand were decreased slightly in rice, while sharply increased in barnyardgrass. Plant height of rice with increasing water depth were longer, whereas that of barnyardgrass reduced significantly with weaker. Tiller number of rice and barnyardgrass were significantly reduced as water depth increased. Dry matter weight and healthy score of rice seedling at 35DAS were highest in 7.5cm water depth followed saturated moisture, 15, and 22.5cm water depth, while for barnyardgrass those were especially negatively affected by deep water depth. These results showed that the seedling stand and early growth of barnyardgrass was highly suppressed by deeper water levels compared with rice. Rice cultivars which are showes growth characteristics in deeper water levels at early growth stage were Italico livorno and S201 in Japonica / Indica.

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