• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.309.1-309.1
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• 2014

III-N계 기반의 광 반도체는 직접 천이형 넓은 밴드갭 구조를 갖고 있기 때문에 자외선에서 가시광을 포함한 적외선까지 포함한 폭 넓은 발광이 가능하여 조명 및 디스플레이 관련 차세대 광원으로 많은 관심을 받고 있다. 하지만 p형 GaN의 경우, 상온에서 도펀트로 사용되는 마그네슘(Mg)이 수소(H)와 결합하여 보상 효과를 나타내기 때문에 높은 정공농도를 갖기에 어려움이 있다고 알려져 있다. 따라서, 대부분의 연구 그룹에서는 GaN계 LED 소자를 성장 후 rapid thermal annealing 공정이 요구되고 있고, 최근에는 박막 성장 후 반응로 내에서 자체적으로 열처리를 진행하고 있는 실정이다. 하지만, 열처리 조건은 LED 소자의 발광특성에 큰 영향을 주기 때문에 본 연구에서는 반응로에서 열처리가 된 LED 샘플에 대해 추가적인 열처리 공정의 유무에 따른 GaN계 LED소자의 광학적 및 전기적 특성에 대해 알아보고자 하였다. 금속유기화학증착법을 이용하여 c-면 사파이어 기판에 저온 GaN 완충층 및 $2.0{\mu}m$두께의 GaN 박막을 성장한 후, $3.0{\mu}m$두께의 n-형 GaN에피층과 InGaN/GaN 5주기의 양자우물구조를 형성하고 $0.1{\mu}m$두께의 p형 GaN층을 성장하였다. P-형 GaN층 성장 후 온도를 내리면서 $750^{\circ}C$, N2 분위기에서 5분간 Mg 활성화를 위한 열처리를 반응로에서 in-situ로 진행하였다. 그 후 급속열처리 장비에 장입하여 $650^{\circ}C$, N2 분위기에서 5분간 추가적인 열처리를 진행하여 추가 열처리 유무에 따른 LED소자의 특성을 분석하였다. 추가적인 열처리 유무에 따른 LED소자의 레이저 여기에 의한 포토루미네선스 스펙트럼과 전계발광 스펙트럼을 조사한 바, 포토루미네선스 스펙트럼의 경우 추가적인 열처리를 진행하였을 경우, 이전보다 발광 세기가 감소함을 나타내었다. 이는 추가적인 열처리에 의해 InGaN/GaN 활성층이 손상되었기 때문이라고 추측된다. 그러나 전계발광 스펙트럼에서는 활성층이 손상되었음에도 불구하고 전계 발광세기가 3배 가량 증가한 것을 확인할 수 있었다. 또한, 20 mA 인가 시 4.2 V 에서 3.7 V로 전압이 감소하였다. 상기 결과로 미루어 볼 때 열처리에 의한 InGaN/GaN 활성층 손상에도 불구하고 광 세기가 크게 증가한 것은 금속유기화학증착장치의 in-situ 열처리에 의한 Mg가 충분히 활성화되지 못하였고, 추가적인 열처리에 의하여 p형 GaN에서 Mg-H 복합체의 분리로 인한 Mg 활성화가 더욱더 효과적으로 이루어졌기 때문이라고 추측된다.

• Applied Chemistry for Engineering
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• v.21 no.3
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• pp.265-271
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• 2010

Desalination effects of capacitive deionization (CDI) process was studied using $TiO_2$/activated carbon electrode. In order to enhance the wettability of electrode and decrease a electrode resistance, $TiO_2$ was coated on activated carbon. By means of $TiO_2$ coating on activated carbon, electric double layer to adsorption content in CDI process was increased. It was identified from TEM, XRD, and XPS that the activated carbon based on $TiO_2$ composite was fabricated successfully by means of sol-gel method. As a results of cyclic voltammetry and impedance, it was identified that $TiO_2$/activated carbon electrode has more electric double later capacitance and less diffusion resistance than activated carbon. Also charge-discharge and ion conductivity profiles showed that the ion removal ratios of $TiO_2$/activated carbon electrode in NaCl electrolyte of $1000\;{\mu}S/cm$ more increased about 39% than that of activated carbon. In conclusion it was possible to identify that the carbon electrode coated $TiO_2$ as electrode material was more effective than raw carbon electrode.

• Korean Chemical Engineering Research
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• v.46 no.1
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• pp.118-123
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• 2008

In the present study, the effect of oxyfluorination treatment on multi-walled nanotubes (MWNTs) supports was investigated by analyzing surface functional groups. The surface characteristics were determined by Fourier transformed-infrared (FT-IR) and X-ray photoelectron spectroscopy (XPS). After the deposition of platinum nanoparticles on the above treated carbon supports, a crystalline size and a loading level had been investigated. Electrochemical properties of the treated MWNTs-supported Pt (Pt/MWNTs) catalysts were analyzed by current-voltage curve measurements. From the results of surface analysis, an oxygen and fluorine-containing functional group had been introduced to the surface of carbon supports. The oxygen and fluorine contents were the highest value at the treatment of 100 temperature. The Pt/100-MWNTs showed the smallest particle crystalline size of 3.5 nm and the highest loading level of 9.4% at the treatment of 100 temperature. However, the sample treated at the higher temperature showed the larger crystalline size and the lower loading level. This indicated that the crystalline size and the loading level could be controlled by changing the temperature of oxyfluorination treatment. Accordingly, an electrochemical activity was enhanced by increasing the temperature of treatment upto 100, and then decreased in the case of 200 and 300. The highest specific current density of 120 mA/mg had been obtained in the case of Pt/100-MWNTs.

• Journal of the Institute of Electronics Engineers of Korea SP
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• v.42 no.4 s.304
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• pp.167-176
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• 2005

This paper proposes a new power minimization technique for the frame-based multimedia signal processing. The derivation of the technique is based on the newly proposed microscopic DVS(Dynamic Voltage Scaling) method, where, the operating frequency and the supply voltage levels are dynamically controlled according to the processing requirement for each frame of multimedia data. The multimedia signal processing algorithms are also redesigned and optimized to maximize the power saving efficiency of the microscopic DVS technology. The characterization of the mean/variance distribution of the processing load in the frame-based multimedia signal processing provides the major basis not only for the optimized application of the microscopic DVS technology but also for the optimization of the multimedia algorithms. The power saying efficiency of the proposed DVS approach is experimentally tested with the algorithms of MPEG-2 video decoder and MPEG-2 AAC audio encoder on the ARM9 RISC processor. The experimental results with the diverse MPEG-2 video and audio files show The average power saving efficiencies of 50$\%$ and 30$\%$, respectively. The results also agree very well with those of the analytic derivations.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.107-107
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• 2000

최근 반도체 소자의 고집적화 및 대용량화의 경향에 다라 MOSFET 소자 제작에 이동되는 게이트 산화막의 두께가 수 nm 정도까지 점점 얇아지는 추세이고 Giga-DRAM급 차세대 UNSI소자를 제작하기 위해 5nm이하의 게이트 절연막이 요구된다. 이런 절연막의 두께감소는 게이트 정전용량을 증가시켜 트랜지스터의 속도를 빠르게 하며, 동시에 저전압동작을 가능하게 하기 때문에 게이트 산화막의 두께는 MOS공정세대가 진행되어감에 따라 계속 감소할 것이다. 따라서 절연막 두께는 소자의 동작 특성을 결정하는 중요한 요소이므로 이에 대한 정확한 평가 방법의 확보는 공정 control 측면에서 필수적이다. 그러나, 절연막의 두께가 작아지면서 게이트 산화막과 crystalline siliconrksm이 계면효과가 박막의 두께에 심각한 영향을 주기 때문에 정확한 두께 계측이 어렵고 계측방법에 따라서 두께 계측의 차이가 난다. 따라서 차세대 반도체 소자의 개발 및 양산 체계를 확립하기 위해서는 산화막의 두께가 10nm보다 작은 1nm-5nm 수준의 박막 시료에 대한 두께 계측 방법이 확립이 되어야 한다. 따라서, 본 연구에서는 습식 산화 공정으로 제작된 3nm-7nm 의 게이트 절연막을 현재까지 알려진 다양한 두께 평가방법을 비교 연구하였다. 절연막을 MEIS (Medim Energy Ion Scattering), 0.015nm의 고감도를 가지는 SE (Spectroscopic Ellipsometry), XPS, 고분해능 전자현미경 (TEM)을 이용하여 측정 비교하였다. 또한 polysilicon gate를 가지는 MOS capacitor를 제작하여 소자의 Capacitance-Voltage 및 Current-Voltage를 측정하여 절연막 두께를 계산하여 가장 좋은 두께 계측 방법을 찾고자 한다.다. 마이크로스트립 링 공진기는 링의 원주길이가 전자기파 파장길이의 정수배가 되면 공진이 일어나는 구조이다. Fused quartz를 기판으로 하여 증착압력을 변수로 하여 TiO2 박막을 증착하였다. 그리고 그 위에 은 (silver)을 사용하여 링 패턴을 형성하였다. 이와 같이 공진기를 제작하여 network analyzer (HP 8510C)로 마이크로파 대역에서의 공진특서을 측정하였다. 공진특성으로부터 전체 품질계수와 유효유전율, 그리고 TiO2 박막의 품질계수를 얻어내었다. 측정결과 rutile에서 anatase로 박막의 상이 변할수록 유전율은 감소하고 유전손실은 증가하는 결과를 나타내었다.의 성장률이 둔화됨을 볼 수 있다. 또한 Silane 가스량이 적어지는 영역에서는 가스량의 감소에 의해 성장속도가 둔화됨을 볼 수 있다. 또한 Silane 가스량이 적어지는 영역에서는 가스량의 감소에 의해 성장속도가 줄어들어 성장률이 Silane가스량에 의해 지배됨을 볼 수 있다. UV-VIS spectrophotometer에 의한 비정질 SiC 박막의 투과도와 파장과의 관계에 있어 유리를 기판으로 사용했으므로 유리의투과도를 감안했으며, 유리에 대한 상대적인 비율 관계로 투과도를 나타냈었다. 또한 비저질 SiC 박막의 흡수계수는 Ellipsometry에 의해 측정된 Δ과 Ψ값을 이용하여 시뮬레이션한 결과로 비정질 SiC 박막의 두께를 이용하여 구하였다. 또한 Tauc Plot을 통해 박막의 optical band gap을 2.6~3.7eV로 조절할 수 있었다. 20$0^{\circ}C$이상으로 증가시켜도 광투과율은 큰 변화를 나타내지 않았다.부터 전분-지질복합제의 형성 촉진이 시사되었다.이것으로 인하여 호화억제에 의한 노화 방지효과가 기대되었지만 실제로 빵의 노화는 현저히 진행되었다

• Korean Journal of Food Science and Technology
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• v.48 no.5
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• pp.525-529
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• 2016

Twenty-nine pepper products commercially available in the market were collected and investigate for contamination levels. Pepper products purchased from traditional markets had a degree of contamination of $10^6-10^7CFU/g$ aerobic bacteria, $10^4-10^5CFU/g$ Bacillus sp., and less than $10^2CFU/g$ yeast and molds. Organic pepper showed a degree of contamination of $10^4$ aerobic bacteria, $10^2-10^3$ Bacillus sp., and less than $10^1$ yeast and molds. Intense pulsed light (IPL) treatment of 10 min (1,000 V, 5 pps and 4 cm sample-to-lamp distance) showed a bacterial death rate of 1.45-1.55 log for whole peppers, and of 0.8-0.85 log for black and white pepper powder. The sterilization rate using IPL was higher than that using other non-thermal sterilization methods, such as ozone treatment or low-pressure discharge plasma sterilization, indicating that the IPL sterilization method may find potential application in the industry. However, further studies may need to be conducted to enhance the effect of sterilization.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.32 no.2
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• pp.45-50
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• 2022

Ga₂O₃ thin films were grown on n-type Si substrates at various growth temperatures of 500, 550, 600, 650 and 700℃. The Ga₂O₃ thin films grown at 500℃ and 550℃ were characterized as featureless flat surface. Grown at higher temperatures (600, 650, and 700℃) showed very rough surface morphology. To figure out the annealing effect on the thin films grown at relatively low temperatures (500, 550, 600, 650 and 700℃), the Ga₂O₃ films were thermally treated at 900℃ for 10 minutes. Crystal structure of the Ga₂O₃ films grown at 500 and 550℃ were changed from amorphous to polycrystalline structure with flat surface. Ga₂O₃ film grown at 550℃ was chosen for the fabrication of a Schottky barrier diode (SBD). Electrical properties of the SBDs depend on the thermal treatment were evaluated. A MSM type photodetector was made on the low temperature grown Ga₂O₃ thin film. The photocurrent for the illumination of 266 nm wavelength showed 5.32 times higher than dark current at the operating voltage of 10 V.

• Korean Journal of Mineralogy and Petrology
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• v.35 no.4
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• pp.457-467
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• 2022

Electron bombardment to silicate glass during electron probe microanalysis (EPMA) causes outward migration of Na from the excitation volume and subsequent decrease in the measured X-ray count rates of Na. To acquire precise Na₂O content of silicate glass, one should use proper analytical technique to avoid or minimize Na migration effect or should correct for decreases in the measured Na X-ray counts. In this study, we analyzed 8 silicate glass standard samples using automated Time Dependent Intensity (TDI) correction method of Probe for EPMA software that can calculate zero-time intercept by extrapolating X-ray count changes over analysis time. We evaluated an accuracy of TDI correction for Na measurements of silicate glasses with EPMA at 15 kV acceleration voltage and 20 nA probe current electron beam, which is commonly utilized analytical condition for geological samples. Results show that Na loss can be avoided with 20 ㎛-sized large beam (<0.1 nA/㎛²), thus silicate glasses can be analyzed without TDI correction. When the beam size is smaller than 10 ㎛, Na loss results in large relative errors up to -55% of Na₂O values without correction. By applying TDI corrections, we can acquire Na₂O values close to the reference values with relative errors of ~ ±10%. Use of weighted linear-fit can reduce relative errors down to ±6%. Thus, quantitative analysis of silicate glasses with EPMA is required for TDI correction for alkali elements such as Na and K.

• Journal of Science Education
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• v.36 no.2
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• pp.235-250
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• 2012

This paper aims to find out whether or not elementary school students recognize and understand scientific units that they encounter in their everyday life. To select appropriate units for the survey, first, scientific units in elementary textbooks of science and other science related subjects were analyzed. Then it was examined how these units were related to the learners' daily life. The participants in the current survey were 320 elementary school 6th graders. A questionnaire consisted of 11 units of science, such as kg for mass, km for distance, L for volume, V for voltage, s for time, $^{\circ}C$ for temperature, km/h for speed, kcal for heat, % for percentage, W for electric power, pH for acidity, which can often be seen and used in daily life. The students were asked to do the following four tasks, (1) to see presented pictures and select appropriate scientific units, (2) to write reasons for choosing the units, (3) to answer what the units are used for, and (4) to check where to find the units. The data were analyzed in terms of the percentage of the students who seemed to well recognize and understand the units, using SPSS 17.0 statistical program. The results are as follows: Regarding the general use of the units, it was revealed that almost the same units were repeated in science and other subject textbooks from the same grade. With an increase of the students' grade more difficult units were used. As for the use of each unit, it was found that they seemed to relatively well understand what these units kg, km, L, $^{\circ}C$, kcal, km/h, and W stand for, showing more than 91% right. However, the units of V, s, in particular, %, and pH did not seem to be understood. With respect to the recognition of the units, most students did not recognize such units as L for volume and pH for acidity, probably because the units are difficult at the elementary level in comparison to other scientific units. The students indicated that schools were the best place where they could learn and find scientific units related to life, followed by shops/marts, newspapers/broadcasting, streets/roads, homes, and others in that order. The results show that scientific unit learning should be conducted in a systematic way at school and that teachers can play a major role in improving students' understanding and use of the units.

• Science of Emotion and Sensibility
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• v.18 no.4
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• pp.25-34
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• 2015

TThis study explored the requirement of fabric sensor that can measure the motion of the joint effectively by measuring and analyzing the variation in electric resistance of a sensor in accordance with bending and stretching motion of the arm by the implementation of a motion sensor utilizing conductive fabric. For this purpose, on both sides of two kinds of knitted fabric, namely 'L' fabric and 'W' fabric Single Wall Carbon Nano-Tube(SWCNT) was coated, fabric sensor was developed by finishing them in a variety of ways, and the sensor was attached to the arm band. The fabric sensor consisted of total 48 cases, namely background fabric for coating, the method of sensor attachment, the number of layer of sensors, the length of sensor, and the width of sensor. The performance of fabric motion sensors in terms of a dummy arm, that is, a Con-Trex MJ with 48 arm bands around it was evaluated. For each arm band, a total of 48, fastened around the dummy arm, it was adjusted to repeat the bending and stretching at the frequency : 0.5Hz, ROM : $20^{\circ}{\sim}120^{\circ}$, the voltage was recorded for each case after conducting three sets of repeat measurement for a total of 48 cases. As a result of the experiment, and as a consequences of the evaluation and analysis of the voltage based on the uniformity of the base line of the peak-to-peak voltage(Vp-p), the uniformity of Vp-p within the same set, and the uniformity of the Vp-p among three sets, the fabric sensors that have been configured in SWCNT coated 'L' fabric / welding / two layers / $50{\times}5mm$, $50{\times}10mm$, $100{\times}10mm$, and SWCNT coated 'W' fabric / welding / two layers / $50{\times}10mm$ exhibited the most uniform and stable signal value within 5% of the total variation rate. Through all these results of the experiment, it was confirmed that SWCNT coated fabric was suitable for a sensor that can measure the human limb operation when it was implemented as a fabric sensor in a variety of forms, and the optimal sensor types were identified.