• Journal of the Microelectronics and Packaging Society
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• v.28 no.3
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• pp.9-15
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• 2021

Miniaturization of semiconductor devices has recently faced a physical limitation. To overcome this, 3D packaging in which semiconductor devices are vertically stacked has been actively developed. 3D packaging requires three unit processes of TSV, wafer grinding, and bonding, and among these, copper bonding is becoming very important for high performance and fine-pitch in 3D packaging. In this study, the effects of Ti nanolayer on the antioxidation of copper surface and low-temperature Cu bonding was investigated. The diffusion rate of Ti into Cu is faster than Cu into Ti in the temperature ranging from room temperature to 200℃, which shows that the titanium nanolayer can be effective for low-temperature copper bonding. The 12nm-thick titanium layer was uniformly deposited on the copper surface, and the surface roughness (R_q) was lowered from 4.1 nm to 3.2 nm. Cu bonding using Ti nanolayer was carried out at 200℃ for 1 hour, and then annealing at the same temperature and time. The average shear strength measured after bonding was 13.2 MPa.

• Journal of Korean Society on Water Environment
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• v.27 no.6
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• pp.926-931
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• 2011

Among various techniques for hydrogen production from organic wastewater, a dark fermentation is considered to be the most feasible process due to the rapid hydrogen production rate. However, the main drawback of it is the low hydrogen production yield due to intermediate products such as organic acids. To improve the hydrogen production yield, a co-culture system of dark and photo fermentation bacteria was applied to this research. The maximum specific growth rate of R. sphaeroides was determined to be $2.93h^{-1}$ when acetic acid was used as a carbon source. It was quite high compared to that of using a mixture of volatile fatty acids (VFAs). Acetic acid was the most attractive to the cell growth of R. sphaeroides, however, not less efficient in the hydrogen production. In the co-culture system with glucose, hydrogen could be steadily produced without any lag-phase. There were distinguishable inflection points in the accumulation of hydrogen production graph that resulted from the dynamic production of VFAs or consumption of it by the interaction between the dark and photo fermentation bacteria. Lastly, the hydrogen production rate of a repeated fed-batch run was $15.9mL-H_2/L/h$, which was achievable in the sustainable hydrogen production.

• Journal of the Microelectronics and Packaging Society
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• v.29 no.3
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• pp.37-42
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• 2022

Recently, the semiconductor package structures are becoming thinner and more complex. As the thickness decrease, interfacial delamination due to material mismatch can be further maximized, so the reliability of interface is a critical issue in industry field. Especially, the polymers, which are widely used in semiconductor packaging, are significantly affected by the temperature and moisture. Therefore, in this study, the delamination prediction at the interface of package structure was performed through finite element analysis considering the moisture absorption and desorption under the various temperature conditions. The material properties such as diffusivity and saturated moisture content were obtained from moisture absorption test. The hygro-swelling coefficients of each material were analyzed through TMA and TGA after the moisture absorption. The micro-shear test was conducted to evaluate the adhesion strength of each interface at various temperatures considering the moisture effect. The finite element analysis of interfacial delamination was performed that considers both deformation due to temperature and moisture absorption. Consequently, the interfacial delamination was successfully predicted in consideration of the in-situ moisture desorption and temperature behavior during the reflow process.

• Journal of the Korean Society of Food Science and Nutrition
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• v.34 no.4
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• pp.544-548
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• 2005

The objective of this study was to determine the effect of die temperature and dimension on extraction pattern, extract yield, and crude saponin content of extruded white ginseng. The extrusion variables were die temperature $(110\;and\;120^{\circ}C)$ and die dimension (3 holes with 1.0 mm, 2 holes with 2.0 mm, and 1 hole with 3.0 mm diameter). The browness and redness were indicator of active components in ginseng extract. Both were used to evaluate the effect of die temperature and die dimension on release pattern and release rate constant. Browness and redness of extract achieved its lowest value at die temperature $110^{\circ}C$ and 2 holes with 2.0 mm diameter, indicating the lowest extraction rate constant. Extract yield highly increased by extrusion treatment. Extract yield and crude saponin content were the highest at die temperature $120^{\circ}C$ and 1 hole with 3.0 mm diameter. In conclusion, extrusion process has contributed significantly in improvement of release rate of its active components.

• Applied Chemistry for Engineering
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• v.5 no.4
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• pp.681-697
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• 1994

The enzymatic hydrolysate of gelatin extracted from fish skin was fractionated and recycled through the membrane reactor according to the molecular weight for the purpose of using as functional material. In addition, the enzymatic hydrolysis conditions of gelatin, enzyme stability by membrane and mechanical shear, and effect on the long-term operational stability of the recycle membrane reactor were investigated. Using the pH-drop technique, Alcalase, pronase E and collagenase were identified as the most suitable enzymes for the hydrolysis of fish skin gelatin. The optimum hydrolysis conditions in the 1st-step membrane reactor(1st-SMR) by Alcalase were enzyme concentration 0.2mg/ml, substrate-to-enzyme ratio(S/E) 50(w/w), $50^{\circ}C$, pH 8.0, reaction volume 600ml and flow rate 6.14ml/min. In the 2nd-SMR by pronase E were enzyme concentration 0.3mg/ml, S/E 33(w/w), $50^{\circ}C$, pH 8.0, reaction volume 600ml and flow rate 6.14ml/min. In the case of 3rd-SMR, enzyme concentration 0.1mg/ml, S/E 100(w/w), $37^{\circ}C$, pH 7.5, reaction volume 600ml and flow rate 10ml/min. Decreased enzyme activities by mechanical shear and membrane were 30% and 15% in the 1st-SMR, were 14% and 5% in the 2nd-SMR, and 18% and 8% in the 3rd-SMR, respectively. Under the optimum conditions, the degree of hydrolysis in the 1st, 2nd and 3rd-SMR were 3.5%(Kjeldahl method, 87%), 3.1%(77%) and 2.7%(70%), respectively. The productivity of hydrolysate in the continuous three-step membrane reactor was 430mg per enzyme(mg) for 10 times of volume replacements.

• Journal of the Microelectronics and Packaging Society
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• v.28 no.1
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• pp.39-46
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• 2021

The quantitative measurement of interfacial adhesion energy (Gc) of multilayer thin films for Cu interconnects was investigated using a double cantilever beam (DCB) and 4-point bending (4-PB) test. In the case of a sample with Ta diffusion barrier applied, all Gc values measured by the DCB and 4-PB tests were higher than 5 J/㎡, which is the minimum criterion for Cu/low-k integration without delamination. However, in the case of the Ta/Cu sample, measured Gc value of the DCB test was lower than 5 J/㎡. All Gc values measured by the 4-PB test were higher than those of the DCB test. Measured Gc values increase with increasing phase angle, that is, 4-PB test higher than DCB test due to increasing plastic energy dissipation and roughness-related shielding effects, which matches well interfacial fracture mechanics theory. As a result of the 4-PB test, Ta/Cu and Cu/Ta interfaces measured Gc values were higher than 5 J/㎡, suggesting that Ta is considered to be applicable as a diffusion barrier and a capping layer for Cu interconnects. The 4-PB test method is recommended for quantitative adhesion energy measurement of the Cu interconnect interface because the thermal stress due to the difference in coefficient of thermal expansion and the delamination due to chemical mechanical polishing have a large effect of the mixing mode including shear stress.

• Journal of Animal Environmental Science
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• v.6 no.3
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• pp.175-184
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• 2000

A lab-scale MF membrane reactor was installed to investigate the membrane permeability, characteristics of membrane fouling at each conditions, and quality of permeate (liquid livestock manure) in the separation of solid-matters using membrane. Experiment was divided three filtration type such as follows; continuous filtration, gravity filtration, and intermittent filtration. As a result of experiment, flux 1 LMH was maintained for 7days, and trans-membrane pressure(TMP) was increased gradually under 10cmHg, but it was increased immediately after 10cmHg, respectively. However, the flux was increased, the Tmax was decreased exponential more and more. During the pure-flux test, most of the fouling of membrane was reversible. At the gravity filtration, permeate could be obtained as 1.75 LMH for 3.5days without any other electronic pressure. As an investigation of membrane surface, this study could be decided that the reason of fouling at the lower flux (Run 1 and 2) was attached matters in membrane surface, but at the higher flux (Run 4-6) was concentration polarization.