• Transactions of the Korean Society of Mechanical Engineers A
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• v.38 no.8
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• pp.863-867
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• 2014

In this study, an acoustic emission (AE) sensor was used for measuring the abrasive and molecular-scale phenomena in chemical mechanical polishing (CMP). An AE sensor is a transducer that converts a mechanical wave into an electrical signal, and is capable of acquiring high-level frequencies from materials. Therefore, an AE sensor was installed in the CMP equipment and the signals were measured simultaneously during the polishing process. In this study, an AE monitoring system was developed for investigating the sensitivity of the AE signal to (a) the variations in the material properties of the pad, slurry, and wafer and (b) the change in conditions during the CMP process. This system was adapted to Oxide and Cu CMP processes. AE signal parameters including AE raw frequency, FFT, and amplitude were analyzed for understanding the abrasive and molecular-level phenomena in the CMP process. Finally, we verified that AE sensors with different bandwidths could function in complementary ways during CMP process monitoring.

• Journal of the Korean Vacuum Society
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• v.20 no.2
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• pp.86-92
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• 2011

The diagnosis studies of the process of chemical vapor deposition were carried out by using in-situ particle monitor (ISPM) and self-plasma optical emission spectroscopy (SPOES). We used the two kinds of equipments such as the silicon plasma enhanced chemical vapor deposition system with silane gas and the borophosphosilicate glass depositon system for monitoring. Using two sensors, we tried to verify the diagnostic and in-situ sensing ability of by-product gases and contaminant particles at the deposition and cleaning steps. The processes were controlled as a function of precess temperature, operating pressure, plasma power, etc. and two sensors were installed at the exhaust line and contiguous with each other. the correlation of data (by-product species and particles) measured by sensors were also investigated.

• Applied Chemistry for Engineering
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• v.31 no.5
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• pp.539-544
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• 2020

A three-dimensional (3D) porous polyaniline (PANI) film was fabricated by a combined photo-and soft-lithography technique based on a large-area nanopillar array, followed by a controlled chemical dilute polymerization. The as-obtained 3D PANI film consisted of hierarchically interconnected PANI nanofibers, resulting in a 3D hierarchical nanoweb film with a large surface and open porous structure. Using electrochemical measurements, the resulting 3D PANI film was demonstrated as a flexible pH sensor electrode, exhibiting a high sensitivity of 60.3 mV/pH, which is close to the ideal Nernstian behavior. In addition, the 3D PANI electrode showed a fast response time of 10 s, good repeatability, and good selectivity. When the 3D PANI electrode was measured under a mechanically bent state, the electrode exhibited a high sensitivity of 60.4 mV/pH, demonstrating flexible pH sensor performance.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.431.1-431.1
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• 2014

최근, 높은 캐리어 이동도와 유연성, 투명성의 우수한 전기적 기계적 특성을 갖는 그래핀에 관한 연구가 활발해지고 있으며 이를 기반으로 한 그래핀 field effect transistor (FET) 센서 응용 또한 관심이 커지고 있다. 작은 소자 크기, 견고한 구조, 빠른 응답속도와 CMOS 공정과의 호환성이 좋은 FET 기반의 센서의 감지 특성은 주로 전해질과 직접 접촉하는 게이트 절연체의 고유 특성에 의해 결정된다. 이러한 게이트 절연체는 일반적으로 스퍼터링, atomic layer deposition (ALD), plasma enhanced chemical vapor deposition (PECVD) 등의 진공 방법에 의해 형성되며, 이 공정 기술은 고가의 장비, 긴 공정 시간과 높은 제조비용이 요구된다. 더욱이, 위의 방식들은 소자 제작 동안에 플라즈마 발생 또는 열처리를 필요로 하게 되며 이는 그래핀 기반의 소자의 제작에 있어 큰 손상을 발생시키게 된다. 이러한 이유로 인해, 그래핀 FET 센서의 게이트 절연체의 형성에 있어 진공 증착 기술은 적절하지 않다. 본 연구에서는, 진공 증착 기술의 문제점을 극복하기 위해 sol-gel 방식을 통한 Al2O3 게이트 절연체를 갖는 그래핀 FET 센서를 제작하였다. Sol-gel 방식은 적은 비용, 공정의 단순화, 높은 처리량 뿐 아니라 소자의 대면적화 제작에 유리하다는 장점을 가지며, 또한 게이트 절연체를 증착함에 있어서 플라즈마가 발생하지 않기 때문에 그래핀 FET 제작에 쉽게 적용될 수 있다. 특히, 게이트 절연체 중 Al2O3은 우수한 화학적 안정성과 감지 특성으로 인해 본 실험에 사용하였다. 결론적으로, sol-gel 방식을 통한 Al2O3 게이트 절연체를 갖는 그래핀 FET 센서는 우수한 전기적 특성과 감지 특성 측면에서 매우 전망적이다.

• Prospectives of Industrial Chemistry
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• v.24 no.6
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• pp.3-18
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• 2021

가역적인 표면 젖음성의 제어가 가능한 스마트 표면은 첨단 센서, 기능성 멤브레인 등 여러 산업분야에 적용될 수 있는 계면제어 기술로써 많은 관심을 받을 것으로 기대된다. 표면의 젖음성은 표면의 화학적 구조와 기하학적 입체 구조에 의해 영향을 받는 데, 특히 외부자극에 의해 소재 물성을 가변시킬 수 있는 스마트 고분자 소재를 나노구조가 제어된 표면에 도입함으로써 표면의 젖음성을 초발수에서 초친수로 가역적으로 전환시킬 수 있는 스마트 표면을 효과적으로 구현할 수 있다. 자극 응답성 스마트 소재는 인가하는 외부자극에 따라 물리적 자극(빛, 온도, 전기, 자기)과 화학적 자극(pH, 용매, 이온)으로 구분할 수 있으며, 이를 복합적으로 적용한 이중/다중 유발 자극에 반응하는 소재가 있다. 본 기고문에서는 외부자극에 응답하는 자극응답성 고분자를 나노 구조 표면에 도입하여 초발수에서 초친수로의 가역적인 젖음성 변화가 가능한 고기능성 스마트 표면의 최근 연구 동향과 미래 전망에 대해 소개하고자 한다. 이런 다양한 외부자극을 이용한 표면 특성의 가역적 제어 기술을 통해 물-오일의 분리, 바이오센서, 약물 전달, 소프트로보틱스와 같은 스마트 소재의 잠재적 발전 가능성 또한 엿볼 수 있을 것으로 기대된다.

• Applied Chemistry for Engineering
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• v.22 no.3
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• pp.243-248
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• 2011

Pt deposited porous carbon nanofibers was prepared as a highly sensitive material of hydrogen gas sensor operating at room temperature. Nanofibers was obtained by electrospinning method using polyacrylonitrile as a carbon precursor and then thermally treated for carbon nanofibers. Chemical activation of carbon nanofibers was carried out to enlarge specific surface area up to $2093m^2/g$. Sputtered Pt layer was uniformly distributed keeping the original shape of carbon nanofibers. The hydrogen gas sensing time and sensitivity were improved based on effects of high specific surface area, micropore structure and deposited Pt catalyst.

• Applied Chemistry for Engineering
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• v.29 no.5
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• pp.519-523
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• 2018

Cyclodextrins are a class of oligosaccharides having an extremely low toxicity, so that they have been used for the formation of host-guest complexes and removal of toxic gases or molecules. In this study, the subtle phenomenon associated with the formation of host-guest complexes between cyclodextrin and toxic molecules (methyl paraben) was experimentally investigated. First, the formation of cyclodextrin-methyl paraben complexes was monitored by UV/Vis spectroscopy as a function of the cyclodextrin concentration. Secondly, the electrochemical measurement was performed with the surface engineered Au electrode having cyclodextrin molecules on the Au substrate. The sensing signal derived from the addition of methyl paraben solution into the Au surface was measured delicately. This study can be informative for future applications such as sensors.

• Journal of IKEEE
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• v.22 no.4
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• pp.1062-1067
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• 2018

In this study, the research processed with a chemical sensor for measuring trace amount of heavy metal ions which is based on the requirements of the efficient sensing technology as recent equipment is applies molecular system in the chemical sensing section that can precisely recognizing selective target substance and transmit its data to physical signal as a result. In this research is concentrated on realize highly precise by utilizing SPR sensor application of recognition functional sensing membrane. Consequently, according to DTSQ-dye sensing membrane, the resonance angle from low-concentration to the highest concentration $10^{-4}M$ of $Ag^+$ ion is $2.17[^{\circ}]$ and this result indicating 4.3 times larger resonance angle changes compare to the other metal substance. Based on SQ-dye sensing membrane, the difference of resonance angle between low concentration and the highest concentration $10^{-4}M$ of $Cu^{2+}$ ion is $2.3[^{\circ}]$ and this outcome is indicating 4.5 times greater resonance angle change to the other metal substance.

• Journal of the Korean Chemical Society
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• v.43 no.3
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• pp.271-279
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• 1999

A new enzyme electrode was developed by co-mobilization of chicken small intestinal tissue and ferrocene in a carbon paste for the determination of hydrogen peroxide, and its electrochemical properties are evaluated. The electrode showed the response time(t100%) as short as 3 set, the detection limit of 5.0${\times}$10-5 M,and a good selectivity for the possible interferents tested. The electrode also offered a good linearity in calibration, a higher biocatalytic stability and a larger responding signal as compared with the other animal or plant tissue based sensors.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.31 no.10
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• pp.986-992
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• 2007

This paper presents the fabrication and characterization of carbon films pyrolyzed with various photoresists for bioMEMS applications. To verify the usefulness of pyrolyzed carbon films as an electrode material in an electrochemical biosensor developed by the authors, interactions between avidin and biotin on the pyrolyzed carbon film were studied via electrochemical impedance spectroscopy based on electrostatic interactions between avidin and negatively-charged ferricyanide. The pyrolyzed carbon films were characterized using a surface profiler, a precision semiconductor parameter analyzer, a nanoindentor, scanning electron microscopy, and atomic force microscopy. Amine conjugated biotin was immobilized on the electrode using EDC/NHS as crosslinkers after $O_2$ plasma treatment to enhance functional groups on the carbon electrode pyrolyzed at $1000^{\circ}C$ with AZ9260. The detection of avidin binding with different concentrations in a range of 0.75 nM to $7.5\;{\mu}M$ to the pyrolyzed carbon electrode modified with biotin was carried out by measuring the electrochemical impedance change. The results show that avidin binds to the biotin on the electrode not by non-specific interaction but by specific interaction, and that EIS successfully detects this binding event. Pyrolyzed carbon films are a promising material for miniaturization, integration, and low-cost fabrication in electrochemical biosensors.