• Journal of the Semiconductor & Display Technology
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• v.18 no.1
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• pp.5-9
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• 2019

Optical emission spectroscopy is used to identify chemical species and monitor the changes of process results during the plasma process. However, plasma process monitoring or fault detection by using emission signal variation monitoring is vulnerable to background signal fluctuations. IR heaters are used in semiconductor manufacturing chambers where high temperature uniformity and fast response are required. During the process, the IR lamp output fluctuates to maintain a stable process temperature. This IR signal fluctuation reacts as a background signal fluctuation to the spectrometer. In this research, we evaluate the effect of infrared background signal fluctuation on plasma process monitoring and improve the plasma process monitoring accuracy by using simple infrared background signal subtraction method. The effect of infrared background signal fluctuation on plasma process monitoring was evaluated on $SiO_2$ PECVD process. Comparing the $SiO_2$ film thickness and the measured emission line intensity from the by-product molecules, the effect of infrared background signal on plasma process monitoring and the necessity of background signal subtraction method were confirmed.

• Journal of Korea Multimedia Society
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• v.10 no.11
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• pp.1483-1495
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• 2007

Thanks to IEEE 802.11 technique, accessing Internet through a wireless LAN(Local Area Network) is possible in the most of the places including university campuses, shopping malls, offices, hospitals, stations, and so on. Most of the APs(access points) for wireless LAN are supporting 2.4 GHz band 802.11b and 802.11g protocols. This paper is introducing a C# library function which can be used to read RSSIs(Received Signal Strength Indicator) from APs. An LBS(Location Based Service) estimates the current location of the user and provides useful user's location-based services such as navigation, points of interest, and so on. Therefore, indoor, LBS is very desirable. However, an indoor LBS cannot be realized unless indoor position ing is possible. For indoor positioning, techniques of using infrared, ultrasound, signal strength of UDP packet have been proposed. One of the disadvantages of these techniques is that they require special equipments dedicated for positioning. On the other hand, wireless LAN-based indoor positioning does not require any special equipments and more economical. A wireless LAN-based positioning cannot be realized without reading RSSIs from APs. Therefore, our C# library function will be widely used in the field of indoor positioning. In addition to providing a C# library function of reading RSSI, this paper introduces implementation of indoor positioning modules making use of the library function. The methods used in the implementation are K-NN(K Nearest Neighbors), Bayesian and trilateration. K-NN and Bayesian are kind of fingerprinting method. A fingerprint method consists of off-line phase and realtime phase. The process time of realtime phase must be fast. This paper proposes a decision tree method in order to improve the process time of realtime phase. Experimental results of comparing performances of these methods are also discussed.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.205-205
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• 2013

테라헤르쯔(terahertz: THz)파는 0.1~10 THz 의 범위로 적외선과 방송파 사이에 광대역 주파수 스펙트럼을 차지하고 있으며 직진성, 투과성, 그리고 낮은 에너지 (meV)를 가지고 있어 비 파괴적이고 무해한 장점을 지니고 있다. Ti:sapphire laser와 같은 femto-pulse source 등이 많은 발전이 되어 현재 많은 연구와 발전이 이루어지고 있다. femto-pulse source를 이용한 THz 응용에서는 높은 저항, 큰 전자 이동도, 그리고 아주 짧은 전하수명의 기판을 요구하는데 저온에서 성장한 (low-temperature grown : LT) GaAs는 격자 내에 Gallium 자리에 Arsenic이 치환 하면서 AsGa antisite가 발생하여 전하수명을 짧아지는 것을 응용하여 가장 많이 이용되고 있다. 현재 THz 응용분야에서 보다 작고 가격경쟁력이 있는 광통신을 이용한 THz photomixer등이 활발히 연구 하고 있다. 광섬유 내에서 손실과 분산이 최소값을 가지는 부분이 1.55 ${\mu}m$ 부근이고 In0.53Ga0.47As 기판을 이용하였을 때 여기에 완벽하게 만족하게 된다. 하지만 LT-InGaAs 의 경우 AsGa antisite로 인하여 carrier lifetime은 짧아지지만 높은 n-type 전하밀도를 가지게 된다. 이때 Be을 doping하여 전하밀도를 보상하여 높은 저항을 유지해야 하는데 Be의 활성화를 위해서는 열처리를 필요로 한다. 하지만 열처리를 하면 carrier lifetime이 길어지기 때문에 carrier lifetime과 저항을 적절히 조율해야 한다. 이는 물질자체의 특성이기 때문에 InGaAs는 GaAs보다 낮은 amplitude와 짧은 cut-off frequency를 가진다. 본 연구에서는 보다 높은 저항을 얻기 위하여 molecular beam epitaxy를 이용하여 semi-insulating InP:Fe 기판위에 격자 정합된 InGaAs:Be/InAlAs multi quantum well (MQW)를 온도별 ($250{\sim}400^{\circ}C$), 주기별 (50~150)로 성장을 하였고 이때 InGaAs layer의 Be doping level은 $2{\times}1018\;cm^{-3}$, Ex-situ annealing은 $550^{\circ}C$에서 10분으로 고정 하였다. THz 발생 실험에서는 InGaAs/InAlAs MQW은 4000 pA로 1,000 pA를 가지는 InGaAs epilayer보다 4배 높은 전류 신호를 얻을 수 있었고 모든 샘플이 2 THz에서 cut-off frequency를 가지고 있었다. THz 검출 실험에서는 LT-InGaAs:Be epilayer LT-InGaAs:Be/InAlAs, HT-InGaAs/InAlAs 샘플이 각각 180, 9000, 12000 pA의 전류신호를 가지고 있었고 모든 샘플이 2 THz에서 cut-off frequency를 가지고 있었다. HT-InGaAs/InAlAs MQW를 이용한 검출실험에서는 InGaAs layer가 defect free이지만 LT-InGaAs:Be/ InAlAs MQW 보다 높은 전류 신호를 얻을 수 있었다. 이는 InAlAs layer가 저항만 높이는 것뿐만 아니라 carrier trapping layer로써의 역할도 하는 것으로 사료된다.

• Journal of the Korean Vacuum Society
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• v.15 no.2
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• pp.216-222
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• 2006

In this paper, we investigated the effect of hydrogen-plasma (H-plasma) treatment on the electrical and optical properties of a quantum dot infrared photodetector (QDIP) with a 5-stacked InAs dots in an InGaAs/GaAs well structure and $Al_{0.3}Ga_{0.7}As/GaAs$ SL (superlattice) current blocking layer. It has been observed that H-plasma treatment didn't affect the band structure of QDIP. It has been also observed that the H-plasma treatment on the QDIP not only enhance the electrical property of QDIP by curing the defect channels in $Al_{0.3}Ga_{0.7}As/GaAs$ SL but also introduce defects in QDIP structure. The H-plasma treatment for 10 min with 20 W of RF power provided the lowest dark current, which made it possible to measure the photo-current (PC) of QDIP whose PC was not detectable without the H-plasma treatment due to the high dark current.

• Journal of Astronomy and Space Sciences
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• v.24 no.4
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• pp.339-348
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• 2007

KASINICS (Korea Astronomy and Space Science Institute Near Infrared Camera System) is equipped with a InSb array which can observe $1-5\;{\mu}m$ bands in near-infrared. The absorption and emission by telluric water vapor becomes serious in the bands longer than $3\;{\mu}m$. We measured PWV (precipitable Water Vapor) levels above Bohyusan Optical Astronomy Observatory and Sobaeksan Optical Astronomy Observatory from July 2006 to August 2007 using the GPS PWV measurement system of KASI. We found that monthly averaged PWVs are lower than the prediction using dew-point temperature and as low as above Kitt Peak from September to February.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.46 no.2
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• pp.150-158
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• 2018

Numerical simulation and experimental study on the thermal flow field of the micro turbojet engine have been carried out for the purpose of developing infrared reduction technology for aircraft. A circular basic nozzle and five rectangular nozzles with different aspect ratio were considered. The conditions for CFD analysis were derived from the analysis of the engine performance. The temperature distribution of the nozzle plume was measured using a temperature sensing system. The thrust of the rectangular nozzle with the aspect ratio 5 was reduced about 1.8% compared to the circular nozzle, and the thrust decreased with increasing the aspect ratio of the nozzle. In the case of thermal flow field, it was observed that, as the aspect ratio increases, the exhaust plume in the experiment was formed wider than in the CFD analysis.

• Korean Journal of Remote Sensing
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• v.32 no.6
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• pp.681-691
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• 2016

Using various satellite measurements in UV, visible and IR, diverse algorithms to retrieve aerosol information have been developed and operated to date. Advanced Himawari Imager (AHI) onboard the Himawari 8 weather satellite was launched in 2014 and has 16 channels from visible to Thermal InfRared (TIR) in high temporal and spatial resolution. Using AHI, it is very valuable to retrieve aerosol optical properties over dark surface to demonstrate its capability. To retrieve aerosol optical properties using visible and Near InfRared (NIR) region, surface signal is very important to be removed which can be estimated using minimum reflectivity method. The estimated surface reflectance is then used to retrieve the aerosol optical properties through the inversion process. In this study, we retrieve the aerosol optical properties over dark surface, but not over bright surface such as clouds, desert and so on. Therefore, the bright surface was detected and masked using various infrared channels of AHI and spatial heterogeneity, Brightness Temperature Difference (BTD), etc. The retrieval result shows the correlation coefficient of 0.7 against AERONET, and the within the Expected Error (EE) of 49%. It is accurately retrieved even for low Aerosol Optical Depth (AOD). However, AOD tends to be underestimated over the Beijing Hefei area, where the surface reflectance using the minimum reflectance method is overestimated than the actual surface reflectance.

• Economic and Environmental Geology
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• v.46 no.6
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• pp.495-508
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• 2013

Recently, stable isotopes (${\delta}^{18}O$ and ${\delta}D$) of water are increasingly analyzed using laser-based technologies. These methods have advantages over Isotope Ratio Mass Spectrometry (IRMS) in that they can be used for in-situ measurements and require much less maintenance and preparation work. Two types of laser-based methods are currently available, which have different analytical principles; OA-ICOS (off-axis integrated cavity output spectroscopy) and WS-CRDS (wavelength-scanned cavity ring-down spectroscopy). In the WS-CRDS instrument, water is vaporized at controlled environment and transferred to an optical cavity by nitrogen carrier gas, and stable isotopic compositions of water vapor are measured using the degree of absorbance of specific wavelengths and the ratios of attenuation time of the laser intensity with the sensitivity of ppb to tens of ppt level. In this study, we introduce the principle of the WS-CRDS technology and the performance results including stability and comparisons with Isotope Ratio Mass Spectrometry (IRMS) and suggest possible applications of various topics in isotope hydrology.

• KIPS Transactions on Computer and Communication Systems
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• v.2 no.10
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• pp.427-436
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• 2013

In this paper, a method of moving path control of an automatic guided vehicle in an indoor environment through recognition of marker images using vision sensors is presented. The existing AGV moving control system using infrared-ray sensors and landmarks have faced at two critical problems. Since there are many windows in a crematorium, they are going to let in too much sunlight in the main hall which is the moving area of AGVs. Sunlight affects the correct recognition of landmarks due to refraction and/or reflection of sunlight. The second one is that a crematorium has a narrow indoor environment compared to typical industrial fields. Particularly when an AVG changes its direction to enter the designated furnace the information provided by guided sensors cannot be utilized to estimate its location because the rotating space is too narrow to get them. To resolve the occurrences of such circumstances that cannot access sensing data in a WSN environment, a relative distance from marker to an AGV will be used as fingerprinting used for location estimation. Compared to the existing fingerprinting method which uses RSS, our proposed method may result in a higher reliable estimation of location. Our experimental results show that the proposed method proves the correctness and applicability. In addition, our proposed approach will be applied to the AGV system in the crematorium so that it can transport a dead body safely from the loading place to its rightful destination.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2021.05a
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• pp.365-368
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• 2021

In this study, a plastic bottle recycling bin system that utilizes an infrared sensor was implemented. The proposed system consists of a recognition unit, a control unit, an alarm unit, and a driving unit. The recognition unit detects the plastic bottle, measures the distance between the plastic bottle and the infrared sensor, extracts the value of the bottle, compares the extracted value with a standard range, and then transmits the control value to the control unit if the extracted value of the bottle is outside the standard range. In this case, the result of the presence or absence of a brand label or bottle cap is transmitted to the controller. The control unit opens the entrance of the recycling bin or alerts the alarm unit according to the result value transmitted from the sensor unit. In order to implement the proposed system, the recognition unit was implemented with an infrared sensor, and the control unit was made with an Arduino IDE controller, based on the C programming language. Additionally, the recognition unit and the control unit are able to communicate using analog signals. The proposed system accurately judges the presence or absence of a brand label and bottle cap of plastic bottles according to a predetermined algorithm. It then blocks the entrance of the recycling bin when a brand label or bottle cap is still attached. As the amount of waste discharged per person is relatively high and the majority of such waste is incinerated rather than recycled, the system proposed in this study is expected to increase the recycling rate of plastic bottles.