• Korean Journal of Optics and Photonics
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• v.8 no.1
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• pp.37-41
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• 1997

The optical property, the environmental stability and the crystallization of ZnS thin films prepared by ion-assisted deposition (IAD) were investigated and compared with those of conventional electron-beam deposited thin films. The humidity(R.H. 85%) test and the thermal(15$0^{\circ}C$) show that the IAD films have relatively higher refractive index, smaller extinction coefficient and environmentally more stable than the conventional films. It is believed to originate from the reduced adsorption of moisture which reflect the increased packing density and the improved microstructure by ion bombardment. XRD experiments also confirm that conventionally grown films have an amorphous in comparison with the crystalline structured IAD films.

• Journal of Sensor Science and Technology
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• v.5 no.5
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• pp.31-37
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• 1996

This paper presents characteristics of pressure sensor using shear-type piezoresistor of LPCVD(low pressure chemical vapour deposition) grown polycrystalline silicon films. The sensor has 3.1mV/V of pressure sensitivity in the pressure range of $1kgf/cm^{2}$, ${\pm}0.012%FS/^{\circ}C$ of TCO, and ${\pm}0.08%FS/^{\circ}C$ of TCS in the temperature range of $-20{\sim}+125^{\circ}C$. It showed ${\pm}0.2%FS$ of hysteresis and ${\pm}1.5%FS$ of non-linearity. Shear-type polycrystalline silicon pressure sensor can eliminate temperature dependence of offset caused by resistors mismatch and be used in relatively wide temperature range, compared to the conventional full-bridge silicon pressure sensors.

• Transactions of the Korean Society of Mechanical Engineers
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• v.14 no.6
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• pp.1679-1688
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• 1990

The method of nonlinear parameter estimation(NPE), which is a statistical and an inverse method, is used to estimate the thermal diffusivity of the porous insulation material. In order to apply the NPE method for measuring the thermal diffusivity, and algorithm for programing suitable to IBM personal computer is established, and is studied the statistical treatment of experimental data and theory of estimation. The experimental data obtained by discrete measurement using a constant heat flux technique are used to find the boundary conditions, initial conditions, and the thermal diffusivity, and then the final values are compared with the values obtained by some different methods. The results are presented as follows:(1) NPE method is used to establish the estimation of the thermal diffusivity and compared results with experimental output shows, that this method can be applicable to define the thermal diffusivity without considering hear flux types. (2) Because of all of the temperatures obtained by the discrete measurement on each steps of time are used to estimate the thermal diffusivity. Although some error in the temperature measurements of temperature are included in estimating process, its influences on the final value are minimzed in NPE method. (3) NPE method can reduce the experimental time including the time of data collecting in a few minutes and can take smaller specimen compared with steady state method. If the tube-type furnace is used, also the adjusting time of surrounding temperature can be reduced.

• Journal of Sensor Science and Technology
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• v.9 no.1
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• pp.1-8
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• 2000

One of today's very critical and sensitive accurate accelerometer which can be used higher temperature than $200^{\circ}C$ and corrosive environment, is particularly demanded for automotive engine. Because silicon is a material of large temperature dependent coefficient, and the piezoresistors are isolated with p-n junctions, and its leakage current increase with temperature, the performance of the silicon accelerometer degrades especially after $150^{\circ}C$. In this paper, The temperature characteristic of a accelerometer using silicon on insulator (SOI) structure is studied theoretically, and compared with experimental results. The temperature coefficients of sensitivity and offset voltage (TCS and TCO) are related to some factors such as thermal residual stress, and are expressed numerically. Thermal stress analysis of the accelerometer has also been carried out with the finite-element method(FEM) simulation program ANSYS. TCS of this accelerometer can be reduced to control the impurity concentration of piezoresistors, and TCO is related to factors such as process variation and thermal residual stress on the piezoresistors. In real packaging, The avarage thermal residual stress in the center support structure was estimated at around $3.7{\times}10^4Nm^{-2}^{\circ}C^{-1}$ at sensing resistor. The simulated ${\gamma}_{pT}$ of the center support structure was smaller than one-tenth as compared with that of the surrounding support structure.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.376.2-376.2
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• 2014

마이크로볼로미터 적외선 센서는 인체감지, 전자부품의 품질검사, 에너지 절감, 산업시설감시 및 군사용으로 다양하게 적용되고 있다. 기존에 이러한 적외선 센서의 감지재료로 VOx 또는 비정질 Si이 가장 많이 사용되고 있으며, VOx는 감도가 높고, 세계적으로 가장 많이 사용되고 있는 물질이다. 본 연구에서는 기존의 VOx 박막 증착법을 개선하여 Zn 산화물 박막을 혼용한 적외선 감지재료를 이용한 마이크로볼로미터 제작 및 특성에 대해 보고한다. RF sputtering 방법으로 약 140 nm의 VOx/ZnO/VOx 샌드위치 박막을 증착하고, 산소분위기에서 열처리함으로써 온도저항계수(TCR)가 약 -3.0 %/K의 값을 갖는 특성을 구현하였다. 갓 증착된 V-Zn 박막에서는 XRD 스펙트럼에서는 V2O5 관련 피크가 주로 관측되었으며, 산소열처리에 의해 VO2 피크가 새롭게 관측되었다. 볼로미터 감지소자는 유효면적 $50{\times}50{\mu}m^2$ 으로 bulk micromaching 공정을 통해 제작하였다. Si 기판위에 SiNx 박막을 PECVD 장치를 이용하여 증착하였으며, 적외선 감지층으로 V-Zn 산화물을 RF sputtering 방법으로 증착하여 열처리 후 SiNx passivation 박막으로 보호하였다. 열적고립을 위해 패터닝 후 Si 기판을 KOH 용액을 이용하여 약 $20{\mu}m$ 식각하여 소자를 구현하였다. 제작된 소자의 특성을 평가한 결과 반응도는 1.57e+4 V/W, 탐지도는 $8.79e+7cmHz^{1/2}/W$를 얻을 수 있었다. 소자의 동작 특성을 평가하기 위해 진공 압력을 1e-3 torr 이하에서 thermoelectric cooler를 장착한 metal package를 제작하여 동작온도에 따른 특성을 평가하였다. 동작온도를 $10^{\circ}C{\sim}40^{\circ}C$로 하여 측정한 결과 동작온도가 증가할수록 신호전압은 감소함을 알 수 있었다.

• Journal of Sensor Science and Technology
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• v.3 no.1
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• pp.68-77
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• 1994

Grid type 70Ni-30Co thin films on slide glass at $250^{\circ}C$ has been fabricated to develope. From fabricated sensors using above process, we investigated the relation of temperature, resistivity, line width to magnetoresistance and we obtained the following results after observation of coercive force, saturated magnetization, maxium usable sensitivity, delay time, slew rate, white noise, resolution of the sensors. We confirmed that the $600{\AA}$ thin film at $250^{\circ}C$ formed crystalized magnetic anisotropy spontaneously and the sensor using the thin film had capability of detecting magnetic field with sensitivity of 230 nT. In these devices, the magnetoresistance change was increased linearly in ${\pm}10$ Oe range, and the magnetoresistance effect was increased when the ratio between line width and length was increased. When the devices was soldered using indium, the temperature-resistivity coefficient showed $8{\times}10^{-3}/deg$ and increased during the specific properties as magnetic field sensor were weakened. In this studies, the coercive forces of the films were about 5.1 A/cm and saturated magnetizations were 0.64 T, and the delay time in these devises was $5{\mu}s$ and slew rate showed 0.39 $Oe/{\mu}s$ and white noise was -120 dB.

• Journal of the Korean Society for Nondestructive Testing
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• v.27 no.1
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• pp.23-30
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• 2007

We observed the NaCl concentration of solutions using a near-field microwave microprobe(NFMM). Instead of the usual technique, we take advantage of the noncontact evaluation capabilities of a NFMM. A NFMM with a high Q dielectric resonator allows observation of small variations of the permittivity due to changes in the NaCl concentration. The changes of NaCl concentration due to a change of permittivity of the NaCl solution were investigated by measuring the microwave reflection coefficient $S_{11}$ of the resonator. The NaCl sensor consisted of a dielectric resonator coupled to a probe tip at an operating frequency of about f=4 GHz. The change of the NaCl concentration is directly related to the change of the reflection coefficient due to a near field electromagnetic interaction between the probe tip and the NaCl solution. In order to determine the probe selectivity, we measured a mixture solution of NaCl and glucose.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.34 no.2
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• pp.73-77
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• 2024

The spinel-type oxide (Ni_x, Mn_y, Co_3-x-y)O₄ (NMC) is widely utilized as a material for temperature sensors with a negative temperature coefficient (NTC), finding applications across various industries including electric vehicle battery management systems. Typically, NMC is manufactured using solid-state reaction methods employing powders of Ni, Mn, and Co compounds, with the densification process through sintering recognized as a crucial factor determining the electrical properties of the temperature sensor material. In this study, NMC pellets were synthesized via solid-state reaction and their crystallographic and microstructural characteristics were investigated. Also, the activation energy for densification behavior during the sintering process was determined. According to the analysis results, the room temperature resistance of the NMC pellets was measured at 10.03 Kohm, with the sensitivity parameter, B-value, recorded at 3601.8 K, indicating their potential applicability as temperature sensors across various industrial fields. Furthermore, the activation energy for densification was found to be 273.3 ± 0.4 kJ/mol, providing valuable insights into the thermodynamic aspects of the sintering process of the NMC.

• KOREAN JOURNAL OF CROP SCIENCE
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• v.53 no.4
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• pp.359-368
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• 2008

Black soybean has been widely utilized as foods and oriental medicinal materials. The pigmentation in the seed coat of black soybean is due to accumulate anthocyanins in the epidermis palisade layer. The anthocyanins of black soybean seed coat are considered as a parameter of quality evaluation of black soybean. Therefore, the purpose of this study was to investigate the most suitable HPLC condition for simultaneous determination of anthocyanins in black soybean seed coats extracts. The efficient HPLC analytical condition of D3G, C3G, and Pt3G contained extracts of black soybean seed coats was developed. The gradient elution employed a $250\;mm\;{\times}\;4.6\;mm$ i.d. YMC-pak ODS-AM 303 column. The gradient system was used two mobile phases. A gradient elution was performed with mobile phase A, consisting of 5% aqueous formic acid, and mobile phase B, comprising 5% formic acid - acetonitrile, and delivered at a flow rate of 0.7 mL/min as follows: $0{\sim}35\;min$, $90%\;A{\sim}60%\;A$; 36 min, 90% A; 46 min, 90% A. The UV-VIS. detection wavelength was set at 520 nm. The limit of detection (LOD) for D3G, C3G, and Pt3G were under 10 ng/mL.

• KOREAN JOURNAL OF CROP SCIENCE
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• v.53 no.2
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• pp.224-232
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• 2008

The health benefits associated with tea consumption have resulted in the wide inclusion of green tea extracts in botanical dietary supplements, which are widely consumed as adjuvants for complementary and alternative medicines. Tea contains polyphenols such as catechins or flavan-3-ols including (-)-epicatechin (EC), (-)-epigallocatechin (EGC), (-)-epicatechin gallate (ECG), and (-)-epigallocatechin gallate (EGCG), as well as the alkaloid, caffeine. The contents of catechins and caffeine in green tea are considered as a standard of quality evaluation of green tea. Therefor, the purpose of this study was to investigate the most suitable HPLC condition for simultaneous determination of catechins and caffeine in green tea extracts. The efficient HPLC analytical condition of catechins and caffeine contained green tea extracts was developed. The gradient elution employed a $250\;mm\;{\times}\;4.6\;mm$ i.d. YMC-pak ODS-AM 303 column. The gradient system was used two mobile phases. A gradient elution was performed with mobile phase A, consisting of 0.1% aqueous phosphoric acid, and mobile phase B, comprising 100% MeOH, and delivered at a flow rate of 1 mL/min as follows: $0{\sim}25\;min$, 80% A; $26{\sim}50\;min$, $80{\sim}70%$ A; 51 min, 80% A. $51{\sim}55\;min$, 80% A. The UV detection wavelength was set at 280 nm. The limit of detection (LOD) for catechins and caffeine standards were under 50 ng/mL.