A study on the Poly-$Si_{1-x}Ge_x$ thin film deposition(II) Variation of surface roughness, grain size and electrical property with deposition parameters
(다결정 $Si_{1-x}Ge_x$ 박막 증착에 관한 연구(II) 증착변수에 따른 표면거칠기, 결정립크기 및 전기적성질 변화)
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- Journal of the Korean Crystal Growth and Crystal Technology
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- v.8 no.1
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- pp.64-72
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- 1998