• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.9-10
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• 2005

Process diagrams of selective epitaxial growth of silicon(SEG) could be developed from CVD thermodynamics. They could not only be helpful with understanding of the mechanism, but also offer good processing guidelines in manufacturing high density devices. Through the process optimization skill, applications of SEG to high-density device structures could be possible without problems such as loading effect and facet generation, with producing outstanding electronic properties.

• Proceedings of the Materials Research Society of Korea Conference
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• 1997.05a
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• pp.27-27
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• 1997

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.46-47
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• 2005

이번 연구는 $BCl_3/CF_4$ 플라즈마를 사용하여 반도체소자 제조 시 널리 이용되는 GaAs 계열반도체 중 대표적인 재료인 GaAs/AlGaAs 및 GaAs/InGaP 구조를 선택적으로 건식 식각한 후 분석한 것이다. 공정변수로는 ICP 소스파워를 0-500W, RIE 파워를 0-50W 그리고 $BCl_3/CF_4$ 가스 혼합비를 중점적으로 변화시켰다. $BCl_3$ 플라즈마만을 사용한 경우 (20$BCl_3$, 20W RIE power, 300W ICP source power, 7.5mTorr) 는 GaAs:AlGaAs의 선택비가 0.5:1 이었으며 이때 GaAs의 식각률은 ~2200${\AA}/min$ 이었으며 AlGaAs의 식각률은 ~4500${\AA}/min$ 이었다. 식각 후 표면의 RMS roughness은 < 2nm로 깨끗한 결과를 보여주었다. 15% $CF_4$ 가스가 혼합된 $17BCl_3/3CF_4$, 20W RIE power, 300W ICP source power, 7.5mTorr의 조건에서 3분 동안 공정한 결과 순수한 $BCl_3$ 플라즈마만을 사용한 경우보다 표면은 다소 거칠었지만 (RMS roughness: ~8.4) GaAs의 식각률 (~980nm/min)과 AlGaAs와 InGaP에 대한 GaAs의 선택도 (GaAs:AlGaAs=16:1, GaAs:InGaP=38:1)는 크게 증가하였다. 그리고 AlGaAs 및 InGaP의 경우 식각 시 나타난 휘발성이 낮은 식각 부산물 ($AlF_3:1300^{\circ}C$, $InF_3:1200^{\circ}C$)로 인하여 50nm/min 이하의 낮은 식각률을 보였고, 62.5%의 $CF_4$가 혼합된 $7.5BCl_3/12.5CF_4$플라즈마의 조건에서는 AlGaAs 및 InGaP에 대한 GaAs의 선택도가 각각 280:1, 250:1을 나타내었다.

• Korea Science and Art Forum
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• v.19
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• pp.293-305
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• 2015

At the same time the unique cultural traits of each country are valued, it has become an essential element to establish the cultural identity of a country. This study is aimed at comparing the residence architectural cultures in East-Asia and thus identifying Korea's own unique traits by determining the application characteristics of traditional architectures of Korea, China and Japan through practical investigation of materials, a basic element of architectural shaping. Literature survey and field study were conducted in parallel for this study, and architectural buildings under investigation included Mucheomdang House in Korea, Prince Gong Mansion in China and Dokyudo Building in Japan. Construction materials in Korea, China and Japan include natural materials such as wood, stone and clay, and artificial materials such as metals, paper, roof tiles, plug and glass. and the buildings were constructed with the combination of these materials. This commonality can be often found in the architectural composition. However, in the interior composition, the choice and application of different materials were clear between three countries, which were shown to be different depending on climates, processing methods and living culture of each country. First of all, since each country selected materials under the influence of its own vegetation and climates, living environment of each country could be seen via its residence. Also, it could be seen that while Korea and Japan show a certain similarity such as the traits of standing-sitting culture and the finish of paper in the interior, China is clearly different. In particular, regarding the material processing, the artificial processing was minimized in Korea, which mainly gave rough and crude feelings while due to the use of straight timbers, the architectural representation with organized and refined feelings was made in Japan. China showed the highest percentage of artificial processing of materials among three countries, which was highly associated with the coloring culture of China. Also, it could be seen that technology related to fine architectural materials such as bricks and glass was greatly advanced in China. Thus, how immaterial elements such as natural characteristics, functionality and aesthetics were applied in relation to residence in Korea, Japan and China could be determined through the comparison of architectural materials.

• Journal of the Korean Ceramic Society
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• v.40 no.11
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• pp.1073-1077
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• 2003

The Sn $O_2$-based gas sensors can detect inflammable and toxic gases of low concentration by the modulation of surface resistance, but they lack in selectivity on the whole. To give selectivity to the Sn $O_2$-based gas sensors, studies on the sensing mechanism, selective gas sensing materials and signal processing techniques are demanded. Ethanol (C$_2$ $H_{5}$OH) and acetonitrile ($CH_3$CN) were confirmed to undergo catalytic oxidation on Sn $O_2$ by gas chromatography. PdCl$_2$-doped Sn $O_2$ showed excellent sensitivity to ethanol and acetonitrile, while La$_2$ $O_3$-doped Sn $O_2$ showed excellent sensitivity to ethanol, but poor sensitivity to acetonitrile. Using these two sensors and pattern recognition, the selectivity to acetonitrile is greatly enhanced. The minimum detection level of acetonitrile was 15 ppm in air and 20 to 100 ppm when exposed to interfering gases together with acetonitrile.

• Korean Journal of Materials Research
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• v.9 no.3
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• pp.257-262
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• 1999

The selective area growth of GaN by metal organic chemical vapor deposition has been carried out on GaN/ sapphire substrate using $SiO_2$ mask. We investgated the effect of growth parameters such as flow rate of $NH_3$(500­~1300sccm) and the growth temperature(TEX>$950~1060^{\circ}C$) on the growth selectivity and characteristics of GaN using the Scanning Electron Microscopy(SEM). The selectivity of GaN improved as flow rate of NH, and growth temperature in­creased. But the grown GaN shapes on the substrate windows was independent of the flow rate of $NH_3$. On the pattern shapes such as circle, stripe, and radiational pattern(rotate the stripe pattern by $30^{\circ}, 45^{\circ}$), we observed the hexagonal pyramid, the lateral over growth on the mask layer, and the difference of the lateral growth rate depending on growth condition.

• The Journal of the Korean dental association
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• v.58 no.7
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• pp.435-442
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• 2020

Porcelain is the first ceramic material to be introduced into dentistry. Porcelain jacket crown was introduced by Dr. Charles H Land in 1886, which was an excellent aesthetic dental restoration but has not been widely used due to high firing shrinkage and low tensile strength. Then metal-ceramic system, which combines the esthetic properties of ceramics and the mechanical properties of metals, was introduced and nowadays it is still used in dental clinical field. However, the metal-ceramic system has shown some problems, such as increased lightness by reflection of light at opaque layer, shadow beneath the gingival line due to the block-out of light by metal coping, exposure of metal in margin part, bond failure between metal and porcelain, oxidation of metal coping during firing the porcelain, etc. Recently, along with the advance of fabrication methods of dental ceramics, the all-ceramic restorations with high esthetic and mechanical properties has increased and gradually replaced metal-ceramic restorations. Especially, CAD/CAM technology has opened a new era in fabricating the dental ceramic restorations. This overview will take a look at the past, present and future possibility of the dental ceramic materials.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.03a
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• pp.73-73
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• 2003

나노 크기의 기공이 규칙적으로 배열되어 있는 실리케이트 메조포러스 분말 재료는 넓은 표면적과 화합물에 대한 선택적 흡착 등이 가능하여 많은 연구가 진행퇴고 있다. 최근에는 실리케이트 메조포러스 재료를 박막으로 제조하여 전자소자 혹은 광소자의 제작에 응용하기 위한 연구가 많이 진행되고 있다. 이러한 실리케이트 기공 내부의 표면에 소수성, 극성, 광전자 활성 등, 특정한 기공 표면 특성을 부여하기 위해서 grafting 방법과 co condensation 방법을 이용하고 있다. 특히, co-condensation 방법을 이용하여 tetraalkoxysilane 과 organo-trialkoxysilane을 함께 반응시키는 경우, 유기성분의 양을 더욱 증가시킬 수 있고 물질 내부에 균일한 유기성분의 분포를 얻을 수 있다. 메조포러스 무기 network에 fluorine을 포함하는 그룹이 공유결합으로 결합되어져 있는 물질은 소수성, 흡착성 및 광학적으로 응용 가능성을 가질 것으로 기대된다.

• Geotechnical Engineering
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• v.13 no.2
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• pp.29-38
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• 1997

Strain softening is observed for geomaterials such as rocks when they are sheared. The proper computational modelling for strain softening is very important because this behavior is closely related to failure in geotechnical problems. In this paper, we have investigated the proper FEM techniques for modelling strain softening in order to simulate failure behavior numerically. In showing numerical examples, the effects of element shape, mesh pattern and of imperfection and the difference between small and large deformation theories, of displacement control and pressure control after peak have been discussed.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2002.10a
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• pp.183-188
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• 2002

Co-cured composite materials has its own characteristics, so its thermal expansion is different each other. The selection of tool material for co-cured composite part in high temperature more over $350^{circ}F$ and 50 Psi pressure have to consider part thermal expansion, size, shape, and economic aspect in production line. So it is important choose tooling material in manufacturing composite parts. We called the tool for airplane composite parts as BAJ (Bonding Assembly Jig). Composite parts are cured on the BAJ in autoclave. BAJ have to stable at high temperature over $350^{circ}F$ and 50 Psi pressure, Considering composite parts' dimensional tolerance compare to heat up in autoclave. This paper come from the results of the experiment at the composite parts production line and review other aircraft company's method for tooling This is for the engineer engaged in composite parts manufacturing.