• Title/Summary/Keyword: 자성 센서

Search Result 100, Processing Time 0.032 seconds

Magnetoresistive Properties of Array IrMn Spin Valves Devices (어레이 IrMn 스핀밸브 소자의 자기저항특성 연구)

  • Ahn, M.C.;Choi, S.D.;Joo, H.W.;Kim, G.W.;Hwang, D.G.;Rhee, J.R.;Lee, S.S.
    • Journal of the Korean Magnetics Society
    • /
    • v.17 no.4
    • /
    • pp.156-161
    • /
    • 2007
  • To develop array magnetic sensors, specular-type giant magnetoresistive- spin valve (GMR-SV) film of Glass/Ta(5)MiFe(7)/IrMn(10)NiFe(5)/$O_2$/CoFe(5)/Cu(2.6)/CoFe(5)/$O_2$/NiFe(7)/Ta(5)(nm) was deposited by using a high-vacuum sputtering system. One of 15 way sensors in the area of $8{\times}8mm^2$ was Patterned a size of $20{\times}80{\mu}m^2$ in multilayer sample by Photo-lithography. All of 15 sensors with Cu electrodes were measured a uniform magnetic properties by 2-probe method. The highest magnetic sensitivity of MR and output voltage measured nearby an external magnetic field of 5 Oe were MS = 0.5%/Oe and ${\triangle}$V= 3.0 mV, respectively. An easy-axis of top-free layers of $CoFe/O_2/NiFe$ with shape anisotropy was perpendicular to one of bottom-pinned layers $IrMn/NiFe/O_2/CoFe$. When the sensing current increased from 1 mA to 10 mA, the output working voltage uniformly increased and the magnetic sensitivity was almost stable to use the nano-magnetic devices with good sensitive properties.

Development of DNA Sensor Using Magnetic Iron Oxide Nanoparticle (자성 산화철(iron oxide) 나노입자를 이용한 DNA 센서 개발)

  • Nam, Ki-Chang;Song, Kwang-Soup
    • Journal of the Institute of Electronics Engineers of Korea SC
    • /
    • v.48 no.6
    • /
    • pp.51-56
    • /
    • 2011
  • The surface of magnetic iron oxide nanoparticles (${\gamma}-Fe_2O_3$) is functionalized ($-NH_2$, -COOH) with bifunctional organic molecules and evaluated using FT-IR (Fourier transform infrared spectroscopy). We immobilize 21-base pair probe DNA and hybridize fluorescence-labeled (Cy5) target DNA onto the functionalized iron oxide nanoparticles. The fluorescence images obtained from a confocal microscopy show that the functionalized iron oxide nanoparticles should detect the hybridization of complementary and noncomplementary DNA.

ADD's Test Facilities for National Defense Magnetic Research (국방 자기분야 연구를 위한 국방과학연구소 시험시설)

  • Yang, Chang-Seob;Chung, Hyun-Ju;Jung, Woo-Jin
    • Journal of the Korean Magnetics Society
    • /
    • v.24 no.4
    • /
    • pp.114-122
    • /
    • 2014
  • Since 1990, Agency for Defense Development (ADD) has been operating the nonmagnetic laboratory and the magnetic sensors laboratory to develop the key technology of the ship's magnetic silencing and to research the high performance magnetic sensors used in the weapon system and to perform the technical support for Republic of Korea Navy. Recently, the main test equipment in the laboratories has been upgraded to improve the measurement and analysis abilities against magnetic target and to evaluate the performance of the magnetic sensors. In this paper, the capability and the current state of magnetic test facilities of ADD are described.

A Micro Fluxgate Magnetic Sensor with Closed Magnetic Path (폐자로를 형성한 마이크로 플럭스게이트 자기 센서)

  • 최원열;황준식;강명삼;최상언
    • Journal of the Microelectronics and Packaging Society
    • /
    • v.9 no.3
    • /
    • pp.19-23
    • /
    • 2002
  • This paper presents a micro fluxgate magnetic sensor in printed circuit board (PCB). In order to observe the effect of the closed magnetic path, the magnetic cores of rectangular-ring and two bars were each fabricated. Each fluxgate sensor consists of five PCB stack layers including one layer magnetic core and four layers of excitation and pick-up coils. The center layer as a magnetic core is made of a Co-based amorphous magnetic ribbon with extremely high DC permeability of ~100,000. Four outer layers as an excitation and pick-up coils have a planar solenoid and are made of copper foil. In case of the fluxgate sensor having the rectangular-ring shaped core, excellent linear response over the range of -100 $\mu$T to + 100 $\mu$T is obtained with 540 V/Tsensitivity at excitation square wave of 3 $V_{p-p}$ and 360 KHz. The chip size of the fabricated sensing element is $7.3 \times 5.7\textrm{mm}^2$. The very low power consumption of ~8 mW was measured. This magnetic sensor is very useful for various applications such as: portable navigation systems, telematics, VR game and so on.n.

  • PDF

A New LC Resonator Fabricated by MEMS Technique and its Application to Magnetic Sensor Device (MEMS 공정에 의한 LC-공진기형 자기센서의 제작과 응용)

  • Kim, Bong-Soo;Kim, Yong-Seok;Hwang, Myung-Joo;Lee, Hee-Bok
    • Journal of the Korean Magnetics Society
    • /
    • v.17 no.3
    • /
    • pp.141-146
    • /
    • 2007
  • A new class of LC-resonator for micro magnetic sensor device was invented and fabricated by means of MEMS technique. The micro LC-resonator consists of a solenoidal micro-inductor with a bundle of soft magnetic microwire cores and a capacitor connected in parallel to the micro-inductor. The core magnetic material is a tiny glass coated $Co_{83.2}B_{3.3}Si_{5.9}Mn_{7.6}$ microwire fabricated by a glasscoated melt spinning technique. The core materials were annealed at various temperatures $150^{\circ}C,\;200^{\circ}C\;,250^{\circ}C\;,$ and $300^{\circ}C$ for 1 hour in a vacuum to improve soft magnetic properties. The solenoidal micro-inductors fabricated by MEMS technique were $500{\sim}1,000{\mu}m$ in length with $10{\sim}20$ turns. The changes of inductance as a function of external magnetic field in micro-inductors with properly annealed microwire cores were varied as much as 370%. Since the permeability of ultra soft magnetic microwire is changing rapidly as a function of external magnetic field. The inductance ratio as well as magnetoimpedance ratio (MIR) in a LC-resonator was varied drastically as a function of external magnetic field. The MIR curves can be tuned very precisely to obtain maximum sensitivity. A prototype magnetic sensor device consisting of the developed microinductors with a multivibrator circuit was test successfully.

A Study on Structure and Magnetic Properties of Fe-N Films with Different Sputtering time (증착 시간에 따른 Fe-N 박막의 구조 및 자성 특성에 관한 연구)

  • Han, Dong-Won;Park, Won-Uk;Gwon, A-Ram
    • Proceedings of the Korean Institute of Surface Engineering Conference
    • /
    • 2017.05a
    • /
    • pp.161.2-161.2
    • /
    • 2017
  • 희토류계 영구자석은 대부분의 전기, 전자 제품의 핵심부품이며 높은 보자력, $BH_{max}$를 가지고 있어 자기기록저장매체, MEMS(엑츄에이터), 소형센서, 소형모터 등의 응용 분야에 적용시키기 위해 다양한 연구들이 진행되고 있다. 그러나 영구자석에 들어가는 희토류계 원소의 수급의 어려움 및 가격의 문제점으로 친환경 자석으로의 전환 및 희토류나 중희토류를 사용하지 않는 비희토류계 영구자석을 제조 및 개발하는데 많은 연구가 이루어지고 있다. 이 중 Fe-N 계 자성물질인 $Fe_{16}N_2$는 포화 자화 값이 현재까지의 비희토류계 자성물질 중 가장 높은 값(240emu/g)을 나타내며 상대적으로 높은 결정자기이방성 상수를 가지고 있어 비희토류계 영구자석 물질 중 하나로 주목받으며 연구되어지고 있다. 본 연구에서는 $Fe_{16}N_2$ 박막을 얻기 위해 DC Magnetron Sputtering 방법을 이용하여 Si wafer 위에 박막을 증착하고 증착시간에 따라 두께를 제어하여 제조한 후 박막의 미세구조, 상 분석, 자성 특성을 관찰을 통해 최적의 공정 조건을 찾고자 하였다. 증착 시간에 따른 박막의 성장 속도는 일정하게 증가하였으며, 증착 시간의 증가에 따라 박막 내 $Fe_{16}N_2$의 상대적인 분율은 감소하였다. 모든 공정 조건에서 $Fe_3N$, $Fe_4N$, $Fe_{16}N_2$ 상들이 섞여 성장하였으며 XRD를 통한 상분석과 더불어 VSM을 통한 자성 특성을 분석해본 결과 $Fe_{16}N_2$의 분율을 가장 높게 성장된 공정 조건은 증착 시간이 10분이며 박막의 두께가 ${\sim}1{\mu}m$ 일 때, 최적의 조건을 얻을 수 있었으며, 이 때의 자성 특성을 분석한 결과 ~2.45T의 포화 자화 값과 ~1.41T의 잔류 자화 값을 얻을 수 있었다.

  • PDF

Post-annealing Effect of Giant Magnetoresistance-Spin Valve Device for Sensor (센서용 거대자기저항 스핀밸브소자의 열처리 효과)

  • Lee, Sang-Suk;Park, Sang-Hyun;Soh, Kwang-Sup;Joo, Ho-Wan;Kim, Gi-Wang;Hwang, D.G.
    • Journal of the Korean Magnetics Society
    • /
    • v.17 no.4
    • /
    • pp.172-177
    • /
    • 2007
  • In order to detect of the magnetic property in the cell unit, we studied the GMR-SV (giant magnetoresistance-spin valves) biosensor, which was depended on the micro patterned features according to two easy directions of longitudinal and transversal axes. Here, the multi layer structure was glass/NiO/NiFe/CoFe/Cu/CoFe/NiFe. The uniaxial anisotropy direction was applied to the patterned biosensor during the deposition and vacuum post-annealing at $200^{\circ}C$ under the magnitude of 300 Oe, respectively. Considering the magnetic shape anisotropy effect, the size of micro patterned biosensor was a $2{\times}5{\mu}m^2$ after the photo lithography process. By our experimental results, we confirmed that the best condition of GMR-SV biosensor should be the same direction of the axis sensing current and the easy axis of pinned NiO/NiFe/CoFe triple layer oriented to the width direction of device, and the direction of the easy axis of free CoFe/NiFe bilayer was according to the longitudinal direction of device.