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http://dx.doi.org/10.4283/JKMS.2007.17.4.172

Post-annealing Effect of Giant Magnetoresistance-Spin Valve Device for Sensor  

Lee, Sang-Suk (Dept. of Oriental Biomedical Engineering, Sangji University)
Park, Sang-Hyun (Biomedical Physics Laboratory School of Physics and Astronomy, Seoul National University)
Soh, Kwang-Sup (Biomedical Physics Laboratory School of Physics and Astronomy, Seoul National University)
Joo, Ho-Wan (Life Science Institute, Sangji University)
Kim, Gi-Wang (College of Oriental Medicine, Sangji University)
Hwang, D.G. (Department of Applied Electronic Physics, Sangji University)
Publication Information
Journal of the Korean Magnetics Society / v.17, no.4, 2007 , pp. 172-177 More about this Journal
Abstract
In order to detect of the magnetic property in the cell unit, we studied the GMR-SV (giant magnetoresistance-spin valves) biosensor, which was depended on the micro patterned features according to two easy directions of longitudinal and transversal axes. Here, the multi layer structure was glass/NiO/NiFe/CoFe/Cu/CoFe/NiFe. The uniaxial anisotropy direction was applied to the patterned biosensor during the deposition and vacuum post-annealing at $200^{\circ}C$ under the magnitude of 300 Oe, respectively. Considering the magnetic shape anisotropy effect, the size of micro patterned biosensor was a $2{\times}5{\mu}m^2$ after the photo lithography process. By our experimental results, we confirmed that the best condition of GMR-SV biosensor should be the same direction of the axis sensing current and the easy axis of pinned NiO/NiFe/CoFe triple layer oriented to the width direction of device, and the direction of the easy axis of free CoFe/NiFe bilayer was according to the longitudinal direction of device.
Keywords
giant magrletoresistance-spin valve (GMR-SV); biosensor; post-annealing effect; magnetic sensitivity; magnetic easy axis;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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