• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.4
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• pp.35-41
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• 2008

R/In order to satisfy the customer's variant needs for a product quality in recent years, a demand for developing higher precision machining technologies in a lot of application areas such as automobile, cellular phone and semiconductor has been increased more and more. Magnetic abrasive polishing(MAP) process is one of these precision technologies. In this study, to verify the parameters' effect of the MAP process on the surface roughness improvement of the plane and the inclined workpiece, well planned experiments which was called the design of experiments were carried out. Considered polishing factors were spindle speed, supplied current, abrasive type and working gap between the workpiece and the solid tool. As a result, it was seen that the supplied current and the working gap greatly affected the surface roughness improvement.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.11a
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• pp.163-164
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• 2010

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1991.04a
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• pp.113-120
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• 1991

근년, 정밀가공기술의 진보에 따라 AI 합금이나 동등의 연질금속을 이용한 고출력 Laser용 Mirror, 전자계산용 자기Disc기반, Laser Printer용 PloygonMirror등의 Opto-electronics 부품이 경면(Mirror Surface)절삭가공에 의해서, 또 LSI용 Silicon Wafer의 가공은 연마가공에 의해서 nmRmax의 표면조도로 마무리 가공되고 있다. 본 연구에서는 고출력 Laser용 Mirror, 자기Disc기반, Silicon Wafer와 같은 경면(표면 조도 submicron이하)에 존재하는 미소표면결함을 정량적이며, 고속측정이 가능한 방법인 새로운 측정법을 제안하고, 이 시스템을 생산라인에서 가공과 동시에 검사하는 In-process측정이 가능한 특정 시스템의 개발을 최종목표로 하고 있다.

• Journal of the Microelectronics and Packaging Society
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• v.19 no.1
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• pp.61-66
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• 2012

Chemical Mechanical Planarization (CMP) is a polishing process used in the microelectronic fabrication industries to achieve a globally planar wafer surface for the manufacturing of integrated circuits. Pad conditioning plays an important role in the CMP process to maintain a material removal rate (MRR) and its uniformity. For metal CMP process, highly acidic slurry containing strong oxidizer is being used. It would affect the conditioner surface which normally made of metal such as Nickel and its alloy. If conditioner surface is corroded, diamonds on the conditioner surface would be fallen out from the surface. Because of this phenomenon, not only life time of conditioners is decreased, but also more scratches are generated. To protect the conditioners from corrosion, thin organic film deposition on the metal surface is suggested without requiring current conditioner manufacturing process. To prepare the anti-corrosion film on metal conditioner surface, vapor SAM (self-assembled monolayer) and FC (Fluorocarbon) -CVD (SRN-504, Sorona, Korea) films were prepared on both nickel and nickel alloy surfaces. Vapor SAM method was used for SAM deposition using both Dodecanethiol (DT) and Perfluoroctyltrichloro silane (FOTS). FC films were prepared in different thickness of 10 nm, 50 nm and 100 nm on conditioner surfaces. Electrochemical analysis such as potentiodynamic polarization and impedance, and contact angle measurements were carried out to evaluate the coating characteristics. Impedance data was analyzed by an electrical equivalent circuit model. The observed contact angle is higher than 90o after thin film deposition, which confirms that the coatings deposited on the surfaces are densely packed. The results of potentiodynamic polarization and the impedance show that modified surfaces have better performance than bare metal surfaces which could be applied to increase the life time and reliability of conditioner during W CMP.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.18 no.1
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• pp.22-28
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• 2009

In order to optimize the polishing process, Run to Run control scheme has been applied to the micro mold polishing in this study. Also, to fully understand the effect of parameters on the surface roughness a design of experiment is performed. By linear approximation of main factors such as gap and rotational speed of micro quill, EWMA (Exponential Weighted Moving Average) gradual mode controller is adopted as a optimizing tool. Consequently, the process converged quickly at a target value of surface roughness Ra 10nm and Rmax 50nm, and was hardly affected by unwanted process noises like initial surface quality and wear of magnetic abrasives.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.19 no.3
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• pp.313-320
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• 2010

The magnetic abrasive polishing (MAP) process is used to achieve the nano-meter grade polishing results on flat or complicated surface. In previous study, polishing the stainless steel plate which is a non-magneto-material was tried. To polish non-magneto-materials using the MAP process was very difficult because the process was fundamentally possible by the help of a magnetic force. Therefore, it had lower efficiency than magneto-materials such as SM45C. In this study, optimization for tool geometry of the MAP was performed to improve the magnetic force between tool and workpiece. Moreover, a permanent magnet was installed below the non-magneto-material to improve the magnetic force. And then the design of experiments was carried out to evaluate the effect of the MAP parameters on the polishing results.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.04b
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• pp.97-101
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• 1995

This paper describes a new surface finishing process which uses magnetic abrasive polishing. This is applied to automatic finishing of die & mold surface. Nowadays, most of die & mold meanufaturing procedures have been automated by the introduction of NC machine tool and CAD/CAM system. But the surface finishing of die & mold must be done by hand work of well-skilled workers. Though many attempts were tried in the past 15 years to eliminate this hand work, the automatic finishing of die & mold surface with 3D curvature has not been achieved yet. New magnetic abrasive finishing process is thought as one of the possible methods for the automation of 3D surface finishing. In order to improve the grindability of the method, ultra-high speed and 5-axis machining was introduce. The magnetic abrasive polishing which has adopted these methods was confirmend to improve the efficiencyof die & mold surface finishing.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.16 no.3
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• pp.1620-1625
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• 2015

In this study, a variety of industrial gears, shafts, chains, rollers, mold, etc. are widely used inautomotive steel carbon steel for machine structural SM45C typical material used for the experiments. In order to cure the surface of the test piece after the rough grinding and fine grinding was performed in order polishing. Perform the surface hardening of SM45C lacal area by using a diode laser. The output of the laser diode and the feed rate to the process variable. Micro-hardness testing, microstructure testing, scanning electron microscope testing(SEM), the heat input to the analysis. After analyzing the experiment to compare the mechanical properties of the material. When using a diode laser to assess the soundness of the surface hardening. Accordingly, the process for deriving the optimum demonstrate the feasibility.

• Journal of Powder Materials
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• v.8 no.1
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• pp.20-25
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• 2001

Most of mold manufacturing procedures have been automated by the introduction of NC machine tool and CAD/CAM system. But the three-dimensional surface curvature of the mold must be done by hand work of well-skilled workers. Magnetic abrasive polishing powders were investigated for surface polishing for 3D curvature. This study aims to investigate homogeneously distributed hard phase in Fe matrix and strong bonding between Fe-matrix and hard phase. The NbC powder, $B_4C$ powder and $Al_2O_3$ powder were mixed in Fe-matrix respectively. Mixed Fe-hard phase powders were compacted by press and then these were melted by plasma melting. According to SEM, XRD and OM observation, Fe-NbC magnetic abrsive powder had the most homogeneous distribution and strong bonding. As a result of magnetic polishing, the surface roughness before magnetic polishing, 1 ${\mu}m$ $R_{max}$, was reduced to 0.2 ${\mu}m$ $R_{max}$ over the entire inner surface of the tube.

• Journal of the Korean Society of Safety
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• v.16 no.3
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• pp.35-40
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• 2001

An internal finishing process applying Magnetic Abrasive Finishing (MAF) was proposed to produce smooth inner surfaces of tubes at a high rate. Since this process uses the tube rotation system, it has been considered applicable only to tubes which are rotatable at high speeds. Here development of the stainless tube(STS 304) rotation system to extend the scope of the application of the internal finishing process applying MAF was made. By the stainless tube(STS 304) rotation system, the abrasive magnetically attracted by the poles is rotated along the inner surface of the tube by magnetic force together with fixed poles, finishing the inner surface of the tube. The main results obtained are as follows : 1) The magnet abrasive finishing minimized influence due to external force because non-contact finishing, 2) The profile of surface roughness decreased very good in 11.4m/min range because abrasive size and speed, 3) The profile of surface roughness by flux density decreased in finishing speed 28m/min, 4) The profile of surface roughness by fled rate decreased in 0.16mm/rev and 0.18mm/rev.