A Study on the Characteristics of Radio-Frequency Induction Coupled Plasma Using a double probe method (Double Probe 측정법에 의한 RFI 플라즈마 특성에 관한 연구)
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- Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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- 1997.10a
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- pp.21-24
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- 1997