• Journal of the Korean Magnetics Society
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• v.27 no.4
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• pp.115-122
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• 2017

The antiferromagnet IrMn based four different GMR-SV multilayers on Corning glass were prepared by using ion beam deposition and DC magnetron sputtering system. The magnetoresistance (MR) properties for single-type and dual-type GMR-SV multilayer films were investigated through the measured major and minor MR curves. The exchange bias coupling field ($H_{ex}$) and coercivity ($H_c$) of pinned layer, the $H_c$ and interlayer exchange coupling field ($H_{int}$) of free layer for the dual-type structure GMR-SV multilayer films consisted of top IrMn layer were 410 Oe, 60 Oe, 1.6 Oe, and 7.0 Oe, respectively. The minor MR curve of two free layers was performed the squarelike feature having a MR ratio of 8.7 % as the sum of 3.7 % and 5.0 %. The value of average magnetic field sensitivity (MS) was maintained at 2.0 %/Oe. Also, the magnetoresistance properties of the single-type and dual-type structure GMR-SV multilayer films consisted of bottom IrMn layer were decreased more than those of top IrMn layer. Two antiparallel states of magnetization spin arrays of the pinned and free layers in the dual-type GMR-SV multilayer films occurred the maximum MR value by the effect of spin dependence scattering.

• Journal of the Korean Magnetics Society
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• v.6 no.1
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• pp.15-20
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• 1996

Co/Pd와 Co/Pd 다층박막으로 구성된 이중막 시스템에서 direct overwriting을 구현하는데 필수적인 교환결합 (exchange coupling)에 대하여 연구하였다. Co/Pd 및 Co/Pd 다층박막을 수직자성을 가지도록 하기 위하여 Co층의 두께를 4- .angs. 이하로 하여 전자빔 증착법으로 제작한 후 x-ray 회절 실험으로 구조 분석을 하였고, Kerr spectrometer, VSM을 사용하여 자기 및 자기광학적 성질을 조사하였다. 기억막과 기준막으로 구성된 이중막에서는 exchange coupling이 커서 자화반전이 두 박막에서 동시에 일어나며, 두 박막사이에 적당한 두께의 비자성 사이막(non-magnetic spacer)이 존재하는 경우에는 두 박막사이의 교환결합의 크기가 줄어들어서 두 박막의 자화반전이 분리되어 계단식 자화곡선이 생겼다. 또 비자성 사이막이 두꺼우면 두 박막사이의 교환결합이 사라짐이 관찰 되었다. 두 박막사이의 교환결합은 자구 기록 실험을 통해서도 그 존재를 확인할 수 있었다.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.11a
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• pp.221-221
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• 2003

본 연구에서는 스핀밸브 다층박막에서 교환 바이어스에 영향을 끼치는 요인 중 하나인 강자성층과 반강자성층사이의 접합 계면에서의 표면 거칠기 [1,2]를 줄이기 위해 현재 반도체 공정에 사용되고 있는 이온빔 에칭 장비를 사용하여 스핀 밸브 다층박막의 씨앗층 에칭에 따른 교환 바이어스를 알아보고자 하였다. 스핀밸브 구조는 강자성층/비자성층/강자성층의 기본구조를 갖는데 이중 하나의 강자성층의 스핀방향이 반강자성층에 의해 고정되는 구조[3]로써 이러한 고정 효과를 교환 바이어스(exchange bias)라 부른다. 교환 바이어스(exchange bias)현상은 강자성과 반강자성의 접합계면에서 강한 상호 교환결합력에 의해 나타나는 현상으로 이러한 교환 바이어스 특성은 하드드라이브의 고밀도 자기헤드소자 및 비휘발성 자기 메모리소자에 응용되어 기존의 자기저항 소자의 특성을 크게 향상시킬 수 있게 되었다.

• Journal of the Korean Magnetics Society
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• v.27 no.4
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• pp.123-128
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• 2017

The magnetic isotropy property from the magnetoresistance (MR) curve and magnetization (MH) loop for the PtMn based spin valve (SV) multilayer films fabricated with different the bottom structure after post-annealing treatment was investigated. The exchange biased coupling field ($H_{ex}$), coercivity ($H_c$), and MR ratio of Glass/Ta(10 nm)/CoFe(6 nm)/Cu(2.5 nm)/CoFe(3 nm)/Ta(4 nm) SV multilayer film without antiferromagnetic PtMn layer are 0 Oe, 25 Oe, and 3.3 %, respectively. MR curve for the Glass/Ta(10 nm)/CoFe(6 nm)/Cu(2.5 nm)/CoFe(3 nm)/PtMn(6 nm)/Ta(4 nm) SV multilayer film showed $H_{ex}=2Oe$, $H_c=316Oe$, and MR (%) = 4.4 % with one butterfly MR curve having by the effect of antiferromagnetic PtMn layer. MR curve for the dualtype Glass/Ta(10 nm)/CoFe(6 nm)/Cu(2.5 nm)/CoFe(3 nm)/PtMn(6 nm)/CoFe(3 nm)/Cu(2.5 nm)/CoFe(6 nm)/Ta(4 nm) SV multilayer film showed $H_c=37.5Oe$ and 386 Oe, MR = 3.5 % and 6.5 % with two butterfly MR curves and square-like hysteresis MH loops. The anisotropy property in CoFe spin valve-PtMn multilayer is neglected by the effects of a very small value of $H_{ex}$ and a very slightly shape magnetic anisotropy. This result is possible to explain the effect of magnetization configuration spin array of the bottom SV film and the top SV film of PtMn layer.

• Journal of the Korean Vacuum Society
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• v.20 no.1
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• pp.7-13
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• 2011

[ $L1_0$ ]phase FePd nano-dot structures were successfully fabricated on self-organized Fe/Au bilayers. With atomic force microscopy, it is determined that surface morphologies of initially flat Fe/Au bilayer films were agglomerated and transformed their shape into nano-dots structures with increasing annealing temperature. With this bilayer as a template, FePd multilayers were deposited at various temperatures, i.e. $300^{\circ}C$, $350^{\circ}C$, $400^{\circ}C$, and $450^{\circ}C$. Surface morphologies of FePd superlattice had a near resemblance to self-organized bilayer. According to X-ray diffraction results, it is confirmed that $L1_0$ superlattice structures of FePd were obtained from samples which were annealed above $350^{\circ}C$. Results of X-ray photoelectron spectroscopy depth-profile analysis showed that chemical composition is identical to deposition sequence. As a result, without additional etching processes, fabrication of chemically ordered FePd superlattice nano-dots was achieved.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.24-24
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• 2010

대형구조물의 구조안정성 진단, 로봇과 같은 지능기계의 제어, 환경오염을 감지하기 위한 센서의 중요성은 날로 증대되고 있다. 이러한 센서의 감도와 성능을 높이기 위해서 소형화, 다기능화, 집적화가 요구되고 있는데, 고성능 센서소자들의 집적화를 위해서 기존에 적용된 벌크형태의 재료들을 박막화하여 다층적층 및 소형화할 필요가 있다. 집적화 센서의 구현에 있어서 전극박막은 센서의 특성을 좌우하는 중요한 역할을 한다. 일반적으로 금속박막이 전극으로 사용되고 있으나 열적 불안정성 및 박리현상의 문제점을 지니고 있다. 따라서 이를 해결하기 위해 전도성산화막을 전극으로 적용하고자하는 연구가 요구되고 있다. 전도성산화막을 전극으로 적용하면 센서소자의 성능이 개선되는 경향이 있다. $Sr_2FeMoO_6$(SFMO) 산화물은 자기장을 인가했을 때 저항이 감소하는 CMR(colossal magnetoresistance) 물질이며 상온비저항이 낮은 것으로 알려져 있다. 이중 페롭스카이트 (double perovskite) 구조를 갖는 $Sr_2FeMoO_6$ 박막은 센서소자의 전극으로 적용 가능할 것으로 생각되어 박막을 제조하고자 하였으며 미세구조와 전기전도 특성을 조사하였다. 박막제조를 위해서는 RF 스퍼터법을 사용하였다. 스퍼터를 위한 타겟은 고상반응법으로 분말타겟을 제조하였다. Ar/$O_2$ 가스 유랑변화, 압력변화, 기판 온도변화가 박막의 상형성 등 박막특성에 미치는 영향을 조사하였다. 기판으로는 $SiO_2$(100nm)/Si 기판을 사용하였다. 증착직후에는 비정질막이 얻어졌으며 SFMO 상을 만들기 위해서는 후열처리가 필요하였는데, 환원성 가스 분위기 [$H_2$(5%)/Ar] 에서 열처리 조건을 최적화하여 이중 페롭스카이트 구조의 단일상 박막을 제조할 수 있었다. SFMO 단일상 박막은 증착시에나 후열처리 시 산소의 억제가 중요함을 알 수 있었다.

• Journal of the Korean Ceramic Society
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• v.34 no.2
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• pp.181-187
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• 1997

The layered BaTiO3 thin films with a high dielectric constant of polycrystalline BaTiO3 and a good in-sulating property of amorphous BaTiO3 were prepared. And their electrical properties were characterized with stacking methods. The BaTiO3 thin films were prepared by rf-magnetron sputtering technique using a ceramic target on Indium-doped Tin oxide coated glasses. A new stacking method resulted in higher dielec-tric constant, capacitance per unit area, and breakdown strength than those prepared by a conventional stacking method; the new method continuously decrease the substrate temperature after initial deposition of a polycrystalline BaTiO3 layer. The observed high dielectric constant could be explained only by a mul-tilayered amorphous/microcrystalline/polycrystalline structure, which was confirmed indirectly by AES depth profile.

• Journal of the Korean Magnetics Society
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• v.4 no.1
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• pp.20-24
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• 1994

The read/write characteristics of CoCr/NiFe double layered media are strongly affected by the magnetic properties of NiFe magnetic soft layer as well as those of CoCr recording layer. Modification of the permalloy layer by NiFe/Ge multilayer scheme resulted in the higher recording sensitivity and the higher reproduced voltage of CoCr/NiFe medium and this is attributed to the higher permeability of the back layer and high perpendicular anisotropy of the CoCr recording layer. Although higher permeability of back layer results in higher recording sensitivity, the increment of the reproduced voltage was not remarkable, which can be confirmed in the FEM numerical analysis. On the contrary, peak shift characteristics of the CoCr/NiFe medium with the NiFe multi back layer was deteriorated compared to that of the CoCr/NiFe medium with NiFe single back layer. Insertion of ferromagnetic thin CoZrNb intermediate layer between CoCr and NiFe layer was effective to ensure large reproduced voltage and low peak shift. These recoridng characteristics were also discussed in connection with microstructural characteristics.

• Journal of the Korean Magnetics Society
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• v.18 no.5
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• pp.180-184
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• 2008

The relation of ferromagnet anisotropic magnetization and the antiferromagnet atomic spin configuration has been investigated for variously angles of unidirectional deposition magnetic field of FeMn layer in Corning glas/Ta(5 nm)/NiFe(7 nm)/FeMn(25 nm)/ Ta(5 nm) multilayer prepared by ion beam deposition. Three unidirectional deposition angles of FeMn layer are $0^{\circ},\;45^{\circ}$, and $90^{\circ}$, respectively. The exchange bias field ($H_{ex}$) obtained from the measuring easy axis MR loop was decreased to 40 Oe in deposition angle of $45^{\circ}$, and to 0 Oe in the angle of $90^{\circ}$. One other side hand, $H_{ex}$ obtained from the measuring hard axis MR loop was increased to 35 Oe in deposition angle of $45^{\circ}$, and to 79 Oe in the angle of $90^{\circ}$. Although the difference of uniderectional axis between ferromagnet NiFe and antiferromagnet FeMn was 90o, the strong antiferromagnetic dipole moment of FeMn caused to rotate the weak ferromagnetic dipole moment of NiFe in the interface. This result implies that one of origins for exchange coupling mechanism depends on the effect of magnetic field angle during deposition of antiferromgnet FeMn layer.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.44 no.2
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• pp.1-6
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• 2007

This study investigated the magnetic properties of $Ni_{80}Fe_{20}/SiO_2$ laminates with shape-induced magnetic anisotropy. The multilayer films were deposited on Si or upilex substrates, from separate $Ni_{80}Fe_{20}$ and $SiO_2$ (at %) alloy targets using a rf diode sputtering system. $Ni_{80}Fe_{20}/SiO_2$ laminates with a various number of bilayers (N) were prepared. The laminates with ellipse array patterns were prepared using photolithographic technique. The magnetic properties were measured at room temperature using a B-H hysteresisgraph and a high frequency permeameter. The several steps during domain wall reversal were observed in multilayer films, attributing to inter-magnetic layer coupling. Intrinsic uniaxial anisotropy field increases with N. The experimental values of the total anisotropy field are found to be in good agreement with the calculated values. This study utilized the shape anisotropy of the laminated film objects with small ellipse array patterns to induce a larger uniaxial anisotropy so as to maximize their operating frequency.